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Load voltage Auto switch model Lead wire length (m) Pre-wired connector 0.5 (Nil) Indicator light Wiring (Output) Special function Type Electrical entry Applicable load 3 (L) 5 (Z) AC DC Perpendicular In-line 3-wire IC circuit 5 V A96V A96 Yes Reed switch Solid state switch (NPN equivalent) Grommet 100 V 24V 12 V 5 V, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV

The current part number for the old CDQ2B32-30D is “CDQ2B32-30DZ.” For this product, the auto switch mounting rail on the body has been changed to a round auto switch mounting groove. Cylinder body mounting is possible. A mounting bracket may be required if the auto switch in use is to be used as is. Check the auto switch model first.

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VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

VFR

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

42

P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.

Electromagnetic Digital Flow Switch

The straight piping length shall be 5 times (5D) or more of the piping size to achieve the stable measurement. 3 Accuracy change [% F.S.] 2 [mm] 1 Model Straight piping length D 5D LFE1 11 55 LFE2 21 105 LFE3 27 135 [Port size] [Measurement conditions] Fluid: Tap water Pressure: 0.2 MPa 0 D 2D 3D 4D 5D LFE1: 3/8 inch LFE2: 3/4 inch LFE3: 1 inch 0 Straight piping length Operating Pressure

VFN2000N

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

LFE-OMY0008

[%F.S.] 2 1 0 OUT OUT OUT OUT 0 D 2D 3D 4D 5D IN IN IN IN 0 1 2 3 4 5 5 (5D) [] [] LFE13/8 inch 0.2 MPa LFE23/4 inch LFE31 inch (mm) D 5 D LFE1 11 55 LFE2 21 105 LFE3 27 135 68 No.LFE*-OMY0008 4.0 3.5 3.0 2.5 [%F.S.]

VQ4000

115.5 (Plug lead type) 12.5 25 VQD 73 A SUP stop valve spacer is mounted on a manifold block, making it possible to individually shut off supply air to each valve. 1 (P) P U S H 4(A) 26.4 LOCK FREE 2(B) Rc 3/8 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Release valve spacer: For D side mounting 149 (Plug-in type) 101.5 (Plug lead type) VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D

VQ5000

plug-in type) VVQ5000-37A-5 (plug lead type) 1 (P) A SUP stop valve spacer is mounted on a manifold block, making it possible to individually shut off supply air to each valve. 4(A) P U S H 40.3 LOCK FREE 2(B) 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Release valve spacer: For D side mounting 179 (plug-in type) 133 (plug lead type) VVQ5000-24A-1D (plug-in type) VVQ5000-24A-5D

As the CDQ2B32-30DMZ-M9BW is a cylinder with 2 auto switches, be sure to order 2 D-M9BW auto switches if 2 are needed.

LV50-OMQ0002

The straight piping length shall be 5 times (5D) or more of the piping size to satisfy and achieve the stable measurement.

LFE-OMZ0012

The straight piping length shall be 5 times (5D) or more of the piping size to satisfy and achieve the stable measurement.

V100

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

plug-in type) VVQ5000-37A-5 (plug lead type) 1 (P) A SUP stop valve spacer is mounted on a manifold block, making it possible to individually shut off supply air to each valve. 4(A) P U S H 40.3 LOCK FREE 2(B) 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Release valve spacer: For D side mounting 179 (plug-in type) 133 (plug lead type) VVQ5000-24A-1D (plug-in type) VVQ5000-24A-5D

LEC-OM07605CN

204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D 19.4 5D