"#$ " %# &'# D t D D t t c c e c e e u u u s s s d d d i i i Rotary Gripper g g g o o o n n n r r r P P P A A A 9 9 9 MRHQ 10/16/20/25 w w w 9 9 m 9 I m I 1 1 n 9 9 9 9 n 9 9 d u d u r u a a a r u 9 o 9 9 s o s F tr F ie tr ie r r r 1 1 1 Modular construction D r D r d d d e e e e v v s s o o i i n g n g n n n n a a H H n P n P g g r r Gripper section is unitized for simple replacement.
Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17
2 r w e i !0 !5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !
3 w e q !1 r y o e t !2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !
2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 r !7 !6 t !8 !0 !2 i !9 y u MHZ Component Parts MHF Description Material Description Material Note Note No. No.
E' Section E-E' CYV32 No.
9 Mounting screw 12-3-11 12 Series MHF2 Dimensions MHF2-8D 2.5H9 +0.025 0 depth 2.5 16 2.5H9 +0.025 0 depth 2.5 2-M3 x 0.5 thread depth 7 Mounting thread 3 28.3 3.4 36 32 2-M3 x 0.5 thread depth 4 15.8 22 Mounting thread 5.9 E 11 11 14 19 E 2-2.6 through (Mounting hole) M3 x 0.5 Finger opening port M3 x 0.5 0 -0.1 17 12 12 Finger closing port 2-4.5 0.8 0.8 E-E +0.1 0 Close: 0 Open: 81 Use
13 MHY 25 30 41 25 MHW MRHQ 2-5.2 through (Mounting hole) 0 -0.1 32 E Misc.
D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C
Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Since there are other applicable auto switches than listed, refer to page 8-7-22 for details.
2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.
2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.