Smooth Cylinder

CQSYB12 -30DCM 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CA2D50-200N 2.60 mm/s 0 Speed wave form -3.0 Operating direction OUT Operating direction IN CA2YD50-200 30 Displacement wave form 15 5 seconds

Smooth Cylinder Series CQSY

CQSYB12 -30DCM 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CA2D50-200N 2.60 mm/s 0 Speed wave form -3.0 Operating direction OUT Operating direction IN CA2YD50-200 30 Displacement wave form 15 5 seconds

Smooth Cylinder/Low Speed Cylinder

Pressure can be controlled regardless of its direction. 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance MPa Smooth operation with less sticking and slipping REA CA2D50-200N CQSYB12 -30DCM Average speed Average speed 2.52mm/s Speed mm/s Displacement mm 3.0 REB 2.60 mm/s 0 Speed wave form

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

ML2B 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Smooth operation with less sticking and slipping CA2D50-200N CQSYB12 -30DCM C J G5-S Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CV 2.60 mm/s 0 Speed wave form -3.0 MVGQ CA2YD50-200 Operating direction

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

ML2B 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Smooth operation with less sticking and slipping CA2D50-200N CQSYB12 -30DCM C J G5-S Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CV 2.60 mm/s 0 Speed wave form -3.0 MVGQ CA2YD50-200 Operating direction

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

MHZ

Lead wire length symbols:0.5 mNil (Example) M9BV 3 m L (Example) M9NL 5 m Z (Example) F59AZ (Example) When ordering with an air gripper When ordering auto switches only 61 D-F8PLMHZ 2-16D-F8NS61 Auto switches marked with a symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

XM, XY

-M9NL u Seal material and its changed part Seal material Seal material Compound No.

NCQ8

L M9NL 197in (5 m) .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ MA D491 Series MHR2/MDHR2 Model/Specifications Nominal size 20 10 15 30 Double acting Action Gripping force (N) (1) External grip 33 12 58 24 (Effective value) at 0.5 MPa Internal grip 34 12 59 25 Finger closing width (mm) Finger opening width (mm) 16 10 19 14 Opening/ Closing

Rotary Gripper Series MRHQ

L M9NL 5 m . Z M9NZ Refer to page 731 for further information on auto switches. Order with an auto switch part number when ordering a single auto switch unit. Auto switches marked with a "" are made upon receipt of order.

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid state switch Yes Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

Magnet: D (Built-in), Mounting: A (Both Ends Tapped), Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 30mm, Body Option: C (Rubber Bumper), Auto Switch Groove: None (for 12-25 Bore w/o Magnet), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: M (1m)

Magnet: Built-in, Mounting: Both Ends Tapped, Type: Standard, Bore Size: 63mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 30mm, Body Option: Rubber Bumper, Auto Switch Groove: None (for 12-25 Bore w/o Magnet), Mounting Bolt: None, Rod End Bracket: None, Auto Switch: No Switch, Lead Wire or Prewired Connector: 1m, Number: -, Mounting Threads: -, Rod Type: -, Speed Control

RS2H-OM0045P

DC AC 0.5 1 3 5 () (M) (L) (Z) M9NV M9N IC 3 NPN 5V 3 PNP M9PV M9P 12V 2 12V M9BV M9B M9NWV M9NV IC 3 PNP M9PWV M9PW 3 NPN 5V 12V 2 2 12V M9BWV M9BW 24V M9NAV M9NA IC 3 PNP M9PAV M9PA PLC 3 NPN 5V 12V 2 2 12V M9BAV M9BA 2 2 P3DW 3 NPN A96V A96 IC 12V 100V A93V A93 2 24V 5V 100V A90V A90 IC PLC 12V 0.5m D-M9N M 1m D-M9NM L 3m D-M9NL Z 5m D-M9NZ 1 17 - 7-2. -1516