High Vacuum Angle Valve

(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Table of Contents

D-C73/D-C76/D-C80 Band Mounting Style. D-B53/D-B54/D-B64 Band Mounting Style . D-C73C/D-C80C Band Mounting Style. D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. D-E73A/D-E76A/D-E80A Direct Mounting Style. 2-color Indication Type .

Free Mount Cylinder

D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

ISO Cylinder

, M9P, M9B, M9NV, M9PV, M9BV D-M9NW, M9PW, M9BW, M9NWV, M9PWV, M9BWV D-M9NA, M9PA, M9BA, M9NAV, M9PAV, M9BAV Reed D-A90, A93, A96, A90V, A93V, A96V Standard 1.

Aluminum High Vacuum Angle Valve

100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

Table of Contents

63 80 100 MGTL D-Y5 type D-Z7 type Note 1) Note 1) D-Z8 type D-A9 type D-F9 type D-Y6 type D-Y7 type Note 1) Vertical outlet types cannot be mounted.

Table of Contents

D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style .

5

Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Its Mounting Height 32 to 100 D-M9l D-M9lW D-M9lA D-A9lV D-M9lV D-M9lWV D-M9lAV D-A9l A B U 32 to 100 D-A7l D-A80 D-A7lH D-A80H D-F7l D-J79 D-F7lW D-J79W D-F79F D-F7NT D-A73C D-A80C D-J79C D-A79W D-F7lWV D-F7lV U B A 32 to 100 D-P3DWA A B U Auto Switch Proper Mounting Position (mm) D-M9l/D-M9lV D-M9lW D-M9lWV

Air Cylinder

MB1 D-G5/K5/G5W/G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7/C8, D-C73C/C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-B5/B6/B59W 20 to 100 D-H7/H7W D-H7NF/H7BA/D-H7C 20 to 63 Hs Hs 24.5 16 B A A B Auto Switch Mounting Height (mm) D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-G5NT D-G59F D-H7C D-G5BA D-C73C D-C80C

Smooth Cylinder/Low Speed Cylinder

D-M9 D-M9W D-M9A ( ): Denotes the values of D-A93.

MY1

D-A90(V) AC DC AC DC 100V or less 20mA AC DC 24V or less 50mA Maximum load current Contact protection box OUT () Brown [Red] Reed switch Reed switch Reed switch Contact protection circuit Internal voltage drop CD-P11 OUT ( ) Blue [Black] CD-P12 D-A93, A93V, D-A96, A96V (with indicator light) D-A93(V) D-A93 In-line D-A93V Perpendicular D-A96 In-line D-A96V Perpendicular Relay, PLC IC circuit

CXS

B (mm) Symbol D-A90, D-A96 15.4 13.4 5.4 D-A93 15.4 10.9 7.9 D-F9 19.4 0.6 9.4 9.4 A B Note) C D A C Note) For D-A90, D-A96, and D-A93, only outward electrical entry (D dimension) is available.

Compact Type

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

NCQ8

Applicable load IC circuit, Relay, PLC Load voltage 24 V or less 48 V or less 100 V or less AC DC AC DC AC DC Maximum load current 50 mA 40 mA 20 mA Contact protection circuit None 1 or less (including lead wire length of 118"(3m)) Internal resistance D-A93, D-A93V, D-A96, D-A96V (With indicator light) D-A93, D-A93V D-A96, D-A96V Auto switch part no.

Table of Contents

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT () Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

Compact Cylinder

( ) is for D-A93.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Compact Type Dual-Rod Cylinder Series CXSJ

47 C 11 21 27 34.5 35.5 44.5 A 19.5 29.5 35.5 43 44 53 6 10 15 20 25 32 Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.