Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

n 8 7 6 5 4 3 2 Stations 1 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 9 60 37 26 For top ported 4 4 4 4 4 4 4 4 3 R P 1 2 2 2 2 2 2 2 2 7.5 13.1 29.6 58.1 43.5 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable tubing O.D.: 3.2 : 4 : 6 Thread size: M5 L n Formula L1 = 11.5n + 55.5 L2 = 11.5n + 73 n: Stations (Max. 24 stations) Dimensions 24 331.5 349 375

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

8 223 212.5 200 11.5 Stations L1 L2 L3 L4 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 9 248 237.5 216 16 10 260.5 250 232 14 (mm) (mm) 17 373 362.5 344 14.5 Stations L1 L2 L3 L4 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 18 385.5 375

5 Port Solenoid Valve Series VQZ1000/2000/3000

tubing O.D.: 6, 8 2x Rc 1/8, 1/4 B B B 2 x one-touch fitting assembly (A, B port) Applicable tubing O.D.: 6, 8 2 2 2 A A A 45 65.5 4 4 4 B 25 2 A Dimensions Formula L1 = 22n + 24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 2 1 14 16 3 4 5 6 7 8 9 11 15 10 12 L1 L2 L3 68 46 310 332 376 90 112 134 156 178 200 222 266 354 244 288 87.5 75 337.5 362.5 400 112.5 137.5 162.5 175 200 225 250 287.5 375

0.4

Exhaust Regulator unit VVQ1000-AR-1 With ejector unit [-J] Double check block VQ1000-FPG-To CYL port 374 A SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 375 Plug-in Unit Base Mounted VQ2000 Series [Option] Note) For CE-compliant models, DC-type only.

Hydraulic

11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375

Fieldbus System

216.7 232.7 248.7 264.7 280.7 296.7 312.7 328.7 344.7 360.7 376.7 392.7 408.7 424.7 440.7 456.7 472.7 L2 80 96 112 128 144 160 176 192 208 224 240 256 272 288 304 320 336 352 368 384 400 416 432 L3 148 160.5 185.5 198 210.5 235.5 248 260.5 273 298 310.5 323 348 360.5 373 385.5 410.5 423 435.5 448 473 485.5 498 L4 137.5 150 175 187.5 200 225 237.5 250 262.5 287.5 300 312.5 337.5 350 362.5 375

Base Mounted Metal Seal/Rubber Seal Series VQ

Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) L n 2 85 105 137.5 148 3 101 121 150 160.5 4 117 137 162.5 173 5 133 153 187.5 198 6 149 169 200 210.5 7 165 185 212.5 223 8 181 201 225 235.5 9 197 217 250 260.5 10 213 233 262.5 273 11 229 249 275 285.5 12 245 265 300 310.5 13 261 281 312.5 323 14 277 297 325 335.5 15 293 313 337.5 348 16 309 329 350 360.5 17 325 345 375

Compact Hydraulic Cylinder

11 12 10 80 280 80 26 65 M12 x 1.75 32 8 100 75 28 32 22 20 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90 35.5 35 27 19 27 21 34 35 1/2 66 140 12 20 16 100 340 125 34 80 M14 x 2 M27 x 2 38 6.5 140 112 35.5 35 27 19 27 24 34 35 1/2 77 140 12 20 16 100 340 160 43 100 M16 x 2 M33 x 2 42 9 174 140 45 38 36 22 28 27 38 40 3/4 94 159 12 24 20 108 375

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14 x 2 27 24 34 M27 x 2 35 1/2 77 140 12 20 16 100 340 34 160 42 9 174 140 45 100 38 36 22 M16 x 2 28 27 38 M33 x 2 40 3/4 94 159 12 24 20 108 375

Tie-rod Type Hydraulic Cylinder

11 12 10 80 280 80 26 65 M12 x 1.75 32 8 100 75 28 32 22 20 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 100 34 80 M27 x 2 M12 x 1.75 38 6.5 118 90 35.5 35 27 19 27 21 34 35 1/2 66 140 12 20 16 100 340 125 34 80 M14 x 2 M27 x 2 38 6.5 140 112 35.5 35 27 19 27 24 34 35 1/2 77 140 12 20 16 100 340 160 43 100 M16 x 2 M33 x 2 42 9 174 140 45 38 36 22 28 27 38 40 3/4 94 159 12 24 20 108 375

Table of Contents

Applicable dryer Weight (g) A B IDF-FL200 IDF-FL201 IDF-FL202 IDF-FL203 IDF-FL204 IDF-FL205 20 30 45 55 70 75 150 200 IDF1E, 2E IDF3E IDF4E IDF6E, IDU3E IDF8E, IDU4E IDF11E, IDU6E 220 310 375 340 375 195 (IDF-FL200, 201) (IDF-FL202, 203, 204, 205) 265 12 14 Accessory (Option) Bypass Piping Set/Dimensions IDF1E, 2E, 3E For NPT For Rc (E) (E) Air outlet Air inlet Air outlet Air inlet Port size

Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: Ø25, Piping: Rc, Stroke: 450mm

Magnet: Built-in, Mounting: Front Flange, Bore Size: Ø25, Piping: Rc, Stroke: 450mm, Rod Boot: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

IDU/IDF

Power cord outlet IDU6D to 15C, IDF6D to 15C IDF75C A 240 240 30 30 240 240 65 65 B 40 40 49 49 40 40 40 40 Model IDU6D IDU8D IDU11C IDU15C IDF6D IDF8D IDF11C IDF15C E 225 225 181 Model IDF37C1 IDF55C IDF75C A 425 190 208 B 375 140 158 C 75 75 66 D 153 153 144 Power cord outlet (17) Grommet with waist Back side Cooling water outlet Cooling water inlet A D E Compressed air pressure gauge B

Series VQ Base Mounted Metal Seal/Rubber Seal

SY SYJ SX VK VZ VF VFR VP7 VP4 VQ VQ4 VQZ VQD VZS VFS VS VS7 < >: AC type and TV approved type Dimensions (mm) L n Equation L1=16n+53, L2=16n+73 n: Station (Max. 24) 24 437 457 487.5 498 23 421 441 462.5 473 22 405 425 450 460.5 21 389 409 437.5 448 20 373 393 412.5 423 19 357 377 400 410.5 18 341 361 387.5 398 17 325 345 375 385.5 16 309 329 350 360.5 15 293 313 337.5 348 14 277 297 325

Metal Seal/Rubber Seal Series VQ Body Ported

L1 = 16n + 29, L2 = 16n + 40 n: Stations (Maximum 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 61 72 150 160.5 L1 L2 L3 L4 45 56 137.5 148 77 88 162.5 173 93 104 187.5 198 109 120 200 210.5 125 136 212.5 223 141 152 225 235.5 157 168 250 260.5 173 184 262.5 273 189 200 275 285.5 205 216 300 310.5 221 232 312.5 323 237 248 325 335.5 253 264 337.5 348 269 280 362.5 373 285 296 375

0.4

16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153 169 185 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 457 137.5 150 162.5 187.5 200 212.5 225 250 262.5 275 300 312.5 325 337.5 350 375

AC Servo Motor Driver (Network card type ）

Shaft resonance suppression filter setting frequency selection Setting value Frequency [Hz] Setting value Frequency [Hz] _ _ 0 0 Disabled _ _ 1 0 562 _ _ 0 1 Disabled _ _ 1 1 529 _ _ 0 2 4500 _ _ 1 2 500 _ _ 0 3 3000 _ _ 1 3 473 _ _ 0 4 2250 _ _ 1 4 450 _ _ 0 5 1800 _ _ 1 5 428 _ _ 0 6 1500 _ _ 1 6 409 _ _ 0 7 1285 _ _ 1 7 391 _ _ 0 8 1125 _ _ 1 8 375 _ _ 0 9 1000 _ _ 1 9 360 _ _ 0 A 900

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Shaft resonance suppression filter setting frequency selection Setting value Frequency [Hz] Setting value Frequency [Hz] _ _ 0 0 Disabled _ _ 1 0 562 _ _ 0 1 Disabled _ _ 1 1 529 _ _ 0 2 4500 _ _ 1 2 500 _ _ 0 3 3000 _ _ 1 3 473 _ _ 0 4 2250 _ _ 1 4 450 _ _ 0 5 1800 _ _ 1 5 428 _ _ 0 6 1500 _ _ 1 6 409 _ _ 0 7 1285 _ _ 1 7 391 _ _ 0 8 1125 _ _ 1 8 375 _ _ 0 9 1000 _ _ 1 9 360 _ _ 0 A 900

LEC-OM07605CN

PB49]4(_ _ _ 1) _ _ x x 5.4 00h _ x _ _ 0:-40dB 1:-14dB 2:-8dB 3:-4dB 0h x _ _ _ 0h 5.4 [Hz] [Hz] 00 10 562 01 11 529 02 4500 12 500 03 3000 13 473 04 2250 14 450 05 1800 15 428 06 1500 16 409 07 1285 17 391 08 1125 18 375 09 1000 19 360 0A 900 1A 346 0B 818 1B 333 0C 750 1C 321 0D 692 1D 310 0E 642 1E 300 0F 600 1F 290 PB18 LPF 3141 100 [rad/s] 18000 [Pr. PB23] [Pr.