High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

ZP

Model Model ZPT20B-0-A10 ZPT40B-0-A14 12.4 47.5 24.4 20 22 23.5 32.5 25 40 48 16 43 34 10.5 ZPT25B-0-A10 ZPT50B-0-A14 15.6 25 27 24 33 28 51.5 32.4 50 57 19 53 38 ZPT32B0-A10 32 34 29 38 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 20 25 32 Model F F H E E F H F E E E F Model G: 6 G: 8 G: 6 G: 8 ZPTB10-0-A14 150.5 60 64 145 149 154.5 G: 4 G: 6 G: 4 G: 6 G: 4 G: 6 ZPTB10-0-A10

ZP

2.5 Deep H: M6 x 1 H: M8 x 1 Y Model A B C E F G I C E F G I D ZPT25D 25 28 20 3 25 25 51 8 3.5 30 15 46 12 10 Elliptic Model a ZPT2004U 4 2 2.6 4.6 1.2 0.3 7 3.5 4.3 7.8 1.8 0.5 10 4 5 11 2 0.8 ZPT3507U ZPT4010U b c d e Y Dimensions of D, E, G are the same.

Battery-less

How to Order LEFS 25 H R B E 200 C N K R1 CD17T q w e r t u y i o !0 !1 !

Compact Cylinder

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 C Mounting bolt part no.

Table of Contents

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

smcmaintenancepartslist

-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MH-G01 (contents quantity 30 g) Main parts No. e (1 pc.) !

5-Port Solenoid Valve

E 16 D-sub connector (25 pins)*1*2 F 16 Spring type terminal block (32 pins)*1*2 Symbol Description P PNP N NPN tEX600 digital input/output unit EX600 DM E P Input/Output type Number of inputs/outputs and connector Connector Connecting Base Symbol Number of inputs Number of outputs Connector E 8 8 D-sub connector (25 pins)*1*2 F 8 8 Spring type terminal block (32 pins)*1*2 Symbol Description

Air Cylinder Series CM2

Mounting style Bore size Basic style B L F G C D T E BZ FZ Head side trunnion style CNA Nil S n 20 25 32 40 20 mm Axial foot style Clevis integrated style 1 pc. 25 mm Rod side flange style Boss-cut basic style n pcs.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

E D E M H L1 L1 L2 M W Model D LQ3H21-T LQ3H31-T LQ3H32-T LQ3H41-T LQ3H51-T LQ3H61-T 6 10 8 12 19 25 17 16 16 53 51.5 18 20 14 6 10 8 12 19 25 1/4 22.5 19.5 21 67.5 64.5 22.5 25 18 (E,E) L2 L1,L1 24 26.5 30 22 24 26 24 32 41 74 83.5 97.5 72 81 93.5 24 26.5 31 29 37 49 22 30 36 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L: Nut material PVDF dimensions

V

E ZPT20U C 20 23 14 3 19 25 45 8 3.5 24 15 40 12 4 1.7 F:M5x0.8 F:M6x1 Model A B C Y ZPT25U C 25 28 14 3 19 25 45 8 3.5 24 15 40 12 4 1.8 D E G D E G ZPT32U C 32 35 14.5 3 19.5 25 45 8 3.5 24.5 15 40.5 12 4.5 2.3 ZPT02U 2 2.6 1.2 D E E P T Y P E 0.8 ZPT04U 4 4.8 1.6 3 19 7 4 20 8 ZPT06U 6 7 H:M6x1 H:M8x1 2.5 Model A B D Y ZPT08U 8 9 1 A E F G I C E F G I ZPT25D 25 28 20 3 25.5 25 51 8 3.5

Made to Order

, 32, 40 25, 32, 40 10, 20 16 to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.

0.4

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 9 7.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications (Pitch) 24 P=24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E) port

Table of Contents

(X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

Vacuum Pad

F Y E F Y E Y 3 4 3 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-

Vacuum Pad

F Y E F Y E Y 3 4 3 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-

Vacuum Pad

F Y E F Y E Y 3 4 3 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-

Vacuum Pad

F Y E F Y E Y 3 4 3 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-