Electric Actuator

s] Lead Stroke [mm] Model AC servo motor Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 A B C 12 900 450 225 600 300 150 LEY25; 100 W 6 3 Motor mounting position: /;40 Top mounting/In-line (4500 rpm) (3000 rpm) (Motor rotation speed) A B C 20 10 1200 800 400 200 LEY32 200 W 600 300 Motor mounting position: /;60 5 Top mounting (3600 rpm) (2400 rpm) (Motor rotation speed) A B C 16 1000

5

c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Compact Hydraulic Cylinder

Dimensions CHmKDBm-m-XC61m CHQ F with effective thread depth G CHKm Width across flats f CHN C CHM D d CHSm a CH2m Width across flats E b e g H CHA h + Stroke X with thread depth Y Note) J Related B + Stroke C Equipment Rod end male thread A + Stroke D-m A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1

Air Cylinder

-X Bore size B C GA LB NA WA S Z 10 15 17 7.5 16.5 21 14.4 66 122 16 18.3 20 7.5 23 21 14.4 67 123 Technical Data 69 CJ2W Series Flange (F) Stroke CJ2WF6 Z Mounting nut Piping port 2 x M5 x 0.8 Rod end nut NDh8 GA View E GA NN NN Cover surface C MM MM D 0 0.3 FB FY B FT 0 0.3 FZ FX 2 x FC Mounting hole NA S + Stroke Z + 2 x Stroke H + Stroke A F T A H F T NA B View E Stroke CJ2WF 10 16

e

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load Mass: E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400

24

+ Stroke G 6H9 depth 10 E B + Stroke A + Stroke With rod end lock HN b a DM 6H9 d c 23 e 7 5 6H9 T-slot dimensions [mm] 10 End lock mechanism (Manual release lock type) Bore size [mm] T-slot dimensions a b c d e 80 13.3 20.3 12 8 22.5 100 15.3 23.3 13.5 10 30 30 Detailed figure of section XX With head end lock *: For intermediate strokes other than standard strokes, refer to the Manufacture

Mechanically Jointed Rodless Cylinders

Refer to front matter 6 for details. 22 Mechanically Jointed Rodless Cylinders Series MY3M Side Support Side support A MY-SA 2 x G E F 2 x H B A D C Side support B MY-SB 2 x J E B A C D (mm) B C 15 25 35 G 6.5 8 9.5 H 3.4 4.5 5.5 J M4 x 0.7 M5 x 0.8 M6 x 1 D 26 38 50 E 4.9 6.4 8 F 3 4 5 A 53 65 77 97 112 138 160 Model Applicable cylinder MY3A16MY3B16 MY3A20MY3B20 MY3A25MY3B25 MY3A32MY3B32

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Air Slide Table

Shock Absorber/RJ [mm] Model A B C D E F Applicable part no.

Compact

1 t q r e A A B !6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Electric Actuator

[mm] L A B n C D E Model Without lock With lock LEJS40S;;-200;-; 523.5 563.5 206 260 6 1 200 80 LEJS40S;;-300;-; 623.5 663.5 306 360 6 1 200 180 LEJS40S;;-400;-; 723.5 763.5 406 460 8 2 400 80 LEJS40S;;-500;-; 823.5 863.5 506 560 8 2 400 180 LEJS40S;;-600;-; 923.5 963.5 606 660 10 3 600 80 LEJS40S;;-700;-; 1023.5 1063.5 706 760 10 3 600 180 LEJS40S;;-800;-; 1123.5 1163.5 806 860 12 4 800

Dual Rod Cylinder Series CXSJ/CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 400 Over 400 Up to 400 Over 400 Up to 400 Over 400 Up to 400 Over 400 Up to 400 Over 400 6 b n m 10 15 Selection graph . 0 1 2 3 4 5 20 , 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is horizontally mounted and the plate

Cylinder with Lock Series CLS

V C B W FA AL T A K N N C B F M H BY S + Stroke ZZ + Stroke BW For 180, 200, 250 With rod boot BV e BZ BG BE l f h + l 4 x MA Effective thread depth MB (for holding eyebolt) ZZ1 + l + Stroke (mm) Stroke range (mm) Bore size (mm) A AL B BA BB BC BD BE BG BV BW MB BY BZ BP C D E EA F FA GA GB H K KA N M J MM MA GC 125 140 160 180 200 250 14 35 50 47 145 75 18 110 136 1/4 115 36 90 59 43 16

48

L B (Table traveling distance) (4) 56 C (46.5) (C) Stroke 10.4 10.4 [D] D 28 28 (48) 35.5 [Origin] Note 3) Origin Note 2) (40) 46.5 48 43.4 (115) With lock With motor cover Motor cable (2 x 5) Lock cable (3.5) 15 Cable length 300 20 113.9 Cable length 250 20 151.3 65 20 (1.1) Motor cable (2 x 5) 54 (36.3) 46.5 [mm] Model L L A B C D E Note 1) Distance within which the table can move when

Compact Type

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

Compact Type Dual-Rod Cylinder Series CXSJ

Stroke (mm) up to 10 up to 30 up to 50 up to 75 up to 100 Max. speed (mm/s) up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 up to 400 more than 400 6 5 6 7 10 15 Selection graph 14 15 20 8 9 10 11 12 13 25 32 The maximum speeds for 6 to 32 are: 6, 10: up to 800 mm/s; 15, 20: up to 700 mm/s; 25, 32: up to 600 mm/s Caution If the cylinder is

Parallel Style Air Gripper Series MHZ

Axial Ported (with M5 Port) [M] (mm) Auto switch mounting groove (4 locations) (Except 10) Model A D2 B E F G H D1 M5 x 0.8 Piping port S C S C S C S C MHZ2-10 M 0.016 0.043 12f8 15 11 7 52.8 18 28.3 5.5 Plug 10 : M-3P 16 to 25: M-5P End boss assembly MHZ2-16 M 0.016 0.043 16f8 20 10 15 58.7 16.2 27.7 6.5 H G Note 1) MHZ2-20 M 0.020 0.053 20f8 22 12 19 70.5 18.2 31.2 7.5 D2 MHZ MHZ2-25 M

CLS

200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100