MG

MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) 50 st 75 to 200 st 250 to 400 st 250 to 400 st 75 to 200 st 50 st 75 to 200 st 250 to 400 st 75 to 200 st 250 to 400 st 50 st 50 st 80 100 168.5 80 100 193 71.5 160 193 25 47 38.5 71.5 167 142 30 45.5 20.5 203 62 178.5 180 203 30 37.5 39 62 187 162 36 46 21

Compact 5-Port Solenoid Valve

x n2 + e + 93.7 M = (L1 + c)/12.5 + 1 Decimal fractions are truncated.

Air Cylinder Series MB

Individual -X Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35

24

(Ball bushing) MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] MGPM (Slide bearing)/A, DB, E Dimensions [mm] Bore size [mm] A DB E 50 to 200 st 250 st or more 50 to 200 st 250 st or more 80 131.5 180.5 30 10 59 100 151.5 190.5 36 10.5 49.5 Bore size [mm] A DB E 50 to 200 st 250 st or more 50 to 200 st 250 st or more 80 158.5 191.5 25 37 70 100 178.5 201.5 30 37.5 60.5 468 Compact

NCA1

AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF Y LF P XI A AA B BA C D DD E EA EE FA G J R MM KK Bore size (in) 200 (2") 1 1 3 1.18 5 2.56 1 3/8 2.09 3 5/8 2.40 3.29 5 1/8 1 1/8 2.6 1 1/2 1 1/8 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1.26 1.06 1.84 1 3/4-16 250 (2.5") 5 1/4 1 1 3 1/2 1.18 5 1/2 3.39 1 3/8 2.13 3 3/4 2.48 3.37 1 3/4-16 1 1/8

NCA1

/8 1.57 1.18 3.32 5 7/16 6 1/4 1 5/8 2.59 2.72 5 7/8 6 1/2 CA2 CS1 C76 Oversized Rod-Center Trunnion Style: NCA1T (XB5) C85 C95 XI + 1/2 stroke CP95 Y P + Stroke UM 4-DD 2-EE (NPTF) D across flats KK NCM 1/32 R NCA 0.001 0 EA MM BA TD UV E AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF A Y AA LF B P BA XI C D DD E EA EE FA G MM J R KK

Electric Actuator

Connector C (Terminal no.)

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

connector CN6B MECHATROLINK-3communication connector CN7 PC connector CN8 Safety connector 140 (For LECYU-V5,V7) 170 (For LECYU-V8) B A D C q e CN6 A/B CN3 Note) Digital operator is JUSP-OP05A-1-E manufactured by YASKAWA Electric Corporation.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 70.5 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 148 137.5 92.9 13 3 160.5 150 103.4 14 4 173 162.5 113.9 15 5 185.5 175 124.4 16 6 198 187.5 134.9 17 7 198 187.5 145.4 12 8 210.5 200 155.9 13 9 223 212.5 166.4 14 10 235.5 225 176.9 15 11 248 237.5 187.4 16 12 260.5 250

smcmaintenancepartslist

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G Replacement Parts Description Note Material Part no. No.

Electric Actuator

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W).

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

Air Cylinder Series CM2

CD-S02 CD-S03 20, 25 32, 40 8 19.5 0.9 1.6 24.5 7.6 Type C 8 for axis B 10 29 1.15 1.35 34 9.6 Type C 10 for axis C D d Applicable bore size d H C B D Part no.

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Air Cylinder

3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

Table of Contents

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

Air Slide Table

Shock Absorber/RJ [mm] Model A B C D E F Applicable part no.