5 Port Solenoid Valve Series SY3000/5000/7000/9000 Series SY7000 Flow characteristics Note 1) Mass (g) Note 2) Valve model Type of actuation 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size M plug connector DIN terminal W M8 connector Grommet L plug connector, C (dm3/(sbar)) Cv b b C (dm3/(sbar)) Cv 218 (89) 237 (108) 221 (92) 242 (113) Single Double 242 (113) 284 (155) 225 (96) 250 (121) 2 position 4.1 0.41 1.1 4.1 0.29 1.0 3.0 0.43 0.80
(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.
set of a, b, c, e) (Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A
10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate
3/4 325 1-1/16 400 1-1/16 1/32 R EA MM BA TD UV E B AA A C FA G TT J LF + STROKE ZB + STROKE R WF TL TM TL E X119 Option (in) TD 0.001 0 Bore (in) MM KK A AA B BA C D DD E EA EE FA G J R TL TM TT UM UV WF Y LF P XI ZB 200 (2) 1 3/4-16 1 1/8 2.6 1.5 1 1/8 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1.26 1.06 1.84 1 1 3 1.18 5 2.56 1 3/8 2.09 3 5/8 2.40 3.29 5 1/8 250 (2.50 1 3/4-16 1 1/8 3.1 1.5 1
Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.
MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Bore size (mm) Bore size (mm) 50 st 75 to 200 st 250 to 400 st 250 to 400 st 75 to 200 st 50 st 75 to 200 st 250 to 400 st 75 to 200 st 250 to 400 st 50 st 50 st 80 100 168.5 80 100 193 71.5 160 193 25 47 38.5 71.5 167 142 30 45.5 20.5 203 62 178.5 180 203 30 37.5 39 62 187 162 36 46 21
x n2 + e + 93.7 M = (L1 + c)/12.5 + 1 Decimal fractions are truncated.
Individual -X Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35
(Ball bushing) MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] MGPM (Slide bearing)/A, DB, E Dimensions [mm] Bore size [mm] A DB E 50 to 200 st 250 st or more 50 to 200 st 250 st or more 80 131.5 180.5 30 10 59 100 151.5 190.5 36 10.5 49.5 Bore size [mm] A DB E 50 to 200 st 250 st or more 50 to 200 st 250 st or more 80 158.5 191.5 25 37 70 100 178.5 201.5 30 37.5 60.5 468 Compact
AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF Y LF P XI A AA B BA C D DD E EA EE FA G J R MM KK Bore size (in) 200 (2") 1 1 3 1.18 5 2.56 1 3/8 2.09 3 5/8 2.40 3.29 5 1/8 1 1/8 2.6 1 1/2 1 1/8 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1.26 1.06 1.84 1 3/4-16 250 (2.5") 5 1/4 1 1 3 1/2 1.18 5 1/2 3.39 1 3/8 2.13 3 3/4 2.48 3.37 1 3/4-16 1 1/8
/8 1.57 1.18 3.32 5 7/16 6 1/4 1 5/8 2.59 2.72 5 7/8 6 1/2 CA2 CS1 C76 Oversized Rod-Center Trunnion Style: NCA1T (XB5) C85 C95 XI + 1/2 stroke CP95 Y P + Stroke UM 4-DD 2-EE (NPTF) D across flats KK NCM 1/32 R NCA 0.001 0 EA MM BA TD UV E AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF A Y AA LF B P BA XI C D DD E EA EE FA G MM J R KK
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.
connector CN6B MECHATROLINK-3communication connector CN7 PC connector CN8 Safety connector 140 (For LECYU-V5,V7) 170 (For LECYU-V8) B A D C q e CN6 A/B CN3 Note) Digital operator is JUSP-OP05A-1-E manufactured by YASKAWA Electric Corporation.
3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 70.5 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 148 137.5 92.9 13 3 160.5 150 103.4 14 4 173 162.5 113.9 15 5 185.5 175 124.4 16 6 198 187.5 134.9 17 7 198 187.5 145.4 12 8 210.5 200 155.9 13 9 223 212.5 166.4 14 10 235.5 225 176.9 15 11 248 237.5 187.4 16 12 260.5 250
Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G Replacement Parts Description Note Material Part no. No.
P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W).
4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.