Rotary Table Series MSU

9, D-T99 D-9A, D-S99, S9P High precision type MSUA 90 3 Single vane 7 180 D-R73, D-T79 D-R80, D-S79, S7P 20 1 D-9, D-T99 D-9A, D-S99, S9P 90 Single vane 3 MSUB Double vane 180 7 D-R73, D-T79 D-R80, D-S79, S7P 20 Double vane is available with 90 rotation setting only.

PSxx-OMS0004CN

-2No.PS-OMS0004CN-D / 1 1.5 *3) *3)1 1 [] -3No.PS-OMS0004CN-D () () () () -4No.PS-OMS0004CN-D () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMS0004CN-D * (Nm) R1/8 35 R1/4 812 (50N ) () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMS0004CN-D * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMS0004CN-D 0 01 PSE57 / M12(3m) 0 (01MPa) L M12(3m) 3 (-100100kPa) N 4

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Pressure Sensor

Product failure Replace the product. -11No.PS-OMG0004-D Specification Specifications Model No.

Pressure Sensor

Product failure Replace the product. -11No.PS-OMG0009-D Specification Specifications Model No.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

Compact Vacuum Unit Ejector/ Vacuum Pump System

When increasing the number of stations, order the required number of single unit of the body type 3 valve (b) and the required number of either the pressure sensor (d) assembly (c) or the vacuum pressures switch assembly (d).

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D

PSE200

D Auto identification function Display units can be selected using either or . This function automatically identifies the pressure range of the pressure sensor that is connected to the multi-channel pressure sensor controller, thus eliminating the need of having to reset the range again after replacing the sensor.

Multi Channel Pressure Sensor Controller

C: Revision D: Limited warranty and Disclaimer and measurement laws are added. E: Contents revised in several places. F: Contents revised in several places.

Digital Pressure Switch

D: Contents revised in several places. [July 2018] E: Contents are added.

Digital Pressure Switch

(Tensile force is 50N or less) Hold the body when handing. Otherwise it can result in damage of the Pressure switch causing failure or malfunction. The strength of the piping to screwing is 40 Nm for ISE70 and 80 Nm for ISE75(H). If a force over these values is given, the piping may be damaged.

ZB-OM00301

U / PVPD ZZB-SM5 ZB0030-K1L(O)E F D U 36 - No.ZB-OM00301 ZB1/2-K1 46 ZB3-K11 40 g ZB1-PS-A 5 ZB1-ZS-A Assy 14 1 2 3 4 5 6 7 8 9 10 11 12 g 16 22 28 34 41 47 53 60 66 72 79 85 ++ 5 40g 5 + 5g 5 + 41g 266g 37 - No.ZB-OM00301 0.3 N.C. / ZB03-K1/J1 (0.35MPa ) [L/min(ANR)] [L/min(ANR)] [KPa] [KPa] [L/min(ANR)] [MPa] 0.4 N.C. / ZB04-K1/J1 (0.35MPa ) [L/min(ANR)]

PSxx-OMT0005CN

-2No.PS-OMT0005CN-A / 1 1.5 *3) *3)1 1 [] -3No.PS-OMT0005CN-A () () () () -4No.PS-OMT0005CN-A () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMT0005CN-A * (Nm) R1/4 812 (50N () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMT0005CN-A * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMT0005CN-A 7 02 PSE57 / M12(3m) 5 (02MPa) L M12(3m) 6 (05MPa) N 7 (010MPa) (1~5V)

Low torque Metal seal type Rotary joint

Printed in Japan. 1st printing June, 2002 D-MITAKA P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.

Series PF2W Digital Flow Switch For Water

HOLD BANK1 BANK2 MULTI COUNTER:CEU5 UP Nil D 100 to 240 VAC 24 VDC Output transistor mode COUNT PRESET FUNC. LEFT RIGHT DOWN Nil P NPN open collector output SEL.

Magnet: D (Built-in), Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: TN (NPT), Stroke: 50mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: P (Air Pressure Lock-up)

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.08 to 1.0, Specification: Built-in magnet

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: None, Operating Pressure(MPa): 0.08 to 1.0, Specification: Built-in magnet

Low torque Metal seal type Rotary joint

Allowable radial load (allowable coupling axis reaction) Note 4) 1N 15N 30N 40N 50N Weight 0.025kg 0.16kg 0.39kg 0.76kg 1.26kg Note 1) The temperature 80C includes temperature rise during rotation. Note 2) The rotational torque does not change with the supply pressure or with non-use (remains within allowable torque), but it does change with the rotational speed. (Refer to page 2).