0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C
), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.
Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.
(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
C D Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A 55 14.8 8.5 9 14 M10 x 1.5 80 B MY-S63A 70 18.3
Manifold overall length Manifold overall length Approx. 29% reduced SY5000 manifold SY5000 3 stations SY3000 manifold SY3000 4 stations Mixed manifold SY5000 3 stations SY3000 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A A A A A A A A B B B B B B B B 12 B 12 B 12 B 12 B 12 B 12 B 136.7 mm
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
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This is a legacy product, and replaced byMDBG40-15Z, CYL, TIE ROD, AUTO-SW, ACTUATOR, MB TIE-ROD CYLINDER, ME, 40MM MB DBL-ACT AUTO-SW, 3.52245 lb
This is a legacy product, and replaced byCJ2KB10-15Z, CYL, ROUND BODY, NON ROTATING, ACTUATOR, CJ2 ROUND BODY CYLINDER, EK, 10MM CJ2 NON-ROTATING, .09704 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CJ2Air cylinderCJ2Double acting, Single rodExcept with air cushion666
This is a legacy product, and replaced byMGPM20-15Z, 20MM MGP SLIDE BEARING, ACTUATOR, MGP COMPACT GUIDE CYLINDER, HM, 20MM MGP SLIDE BEARING, 1.45441 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040020MGPM20?0.67?0.750.830.911.171.371.571.761.962.162.633.033.423.82
This is a legacy product, and replaced byMXH10-15Z
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This is a legacy product, and replaced byCDJ2B10-15Z-A, CYL, DBL ACT, ACTUATOR, CJ2 ROUND BODY CYLINDER, EE, 10MM CJ2 DBL-ACT AUTO-SW, .18516 lb
This is a legacy product, and replaced byCDJ2F10-15Z-F7PL-A, CYL, RND BODY, DBL ACT, A-SW, ACTUATOR, CJ2 ROUND BODY CYLINDER, EE, 10MM CJ2 DBL-ACT AUTO-SW, .16534 lb
This is a legacy product, and replaced byCDJ2KB10-15Z-A, CYL, DBL ACT, NON ROT, ACTUATOR, CJ2 ROUND BODY CYLINDER, EL, 10MM CJ2 NON-ROT AUTO-SW, .15562 lb
This is a legacy product, and replaced byMGPM40-15Z
This is a legacy product, and replaced byMXH6-15Z, CYL, COMPACT SLIDE TABLE, ACTUATOR, MXH HIGH RIGIDITY GUIDE CYL, CE, 6MM MXH DBL-ACT AUTO-SW, .20924 lb, ModelBore size (mm)Standard stroke (mm)Made to Order 51015202530405060MXH66------------------XB13 : Low-speed cylinder (5 to 50 mm/s)XC3 : Special port positionsXC19 : Intermediate stroke (Spacer type)XC22 : Fluororubber