Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-Y59A, B/D-Y69A, B/D-Y7P(V) Direct Mounting Style . D-M5N/D-M5P/D-M5B Direct Mounting Style. D-F9G/D-F9H Normally Closed Direct Mounting Style. D-Y7G/D-Y7H Normally Closed Direct Mounting Style. 2-color Indication Type . D-H7NW/D-H7PW/D-H7BW Band Mounting Style. D-G59W/D-G5PW/D-K59W Band Mounting Style.

Table of Contents

D-M9N(V)/D-M9P(V)/D-M9B(V) Direct Mounting Style . D-F8N/D-F8P/D-F8B Direct Mounting Style . D-Y59A, B /D-Y69A, B/D-Y7P(V) Direct Mounting Style . D-F9G/D-F9H Normally Closed Direct Mounting Style. D-Y7G/D-Y7H Normally Closed Direct Mounting Style. 2-color Indication Type . D-H7NW/D-H7PW/D-H7BW Band Mounting Style. D-G59W/D-G5PW/D-K59W Band Mounting Style.

Rotary Actuator/Vane Type

V V V 100 V 93A Oilproof heavy-duty cord V V V M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V S79 V V v v IC circuit 3-wire (PNP) S7P V V v v Solid state auto switch Grommet Yes For 20, 30, 40 Oilproof heavy-duty cord Relay, PLC 2-wire 12 V T79 V V v v Connector T79C V V V

Smooth Cylinder/Low Speed Cylinder

D-M9 (V) D-M9W (V) D-M9A (V) D-B59W D-B5 D-B64 D-G5NT Bore size (mm) A A A B A B B B A B A B A B A B 20 25 32 40 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 7.5 6.5 11.5 10.5 2 1 7 5 4 1.5 0.5 7 6 3.5 2.5 8 13.5 11.5 17.5 15.5 7 6 12 10 9 6.5 5.5 12 11 8.5 7.5 13 Note) Adjust the auto switch after confirming the operating conditions in the

NCQ8

Solid state switch D-M9 (V) D-F9 W(V) B A B A HS 056 HS B A B A 075, 106 HS B A B A 150, 200, 250 Note 1) Figures in the table below are references for auto switch mounting positions in the stroke end detection.

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state auto switch 2-wire 12 V M9BV M9B M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire

Made to Order

D-H7BA D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7/C80 D-H7 D-H7W D-H7NF D-H7BA D-M9(V) D-M9W(V) D-M9A(V) D-A9(V) D-C7 D-C80 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B64 D-B59W D-A9(V) Bore size (mm) Bore size (mm) B 24 (32) 24 (32) 25 (33) 27 (36) 32 (36) B 20 (28) 20 (28) 21 (29) 23 (32) 28 (40) A A 21.5 (29.5) B 20.5 (28.5) A B 15.5 (22.5) A B 17.5 (25.5) A B 19.5 (27.5

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMA Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA V V V V V V XYA V V V V V Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 3.

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

15

SANMOTION R R2 V V OMRON Corporation Sysmac G5 R88M-K V V Panasonic Corporation MINAS-A4 MSMD V V MINAS-A5 MSMD/MHMD V V FANUC CORPORATION is V V (1 only) V NIDEC SANKYO CORPORATION S-FLAG MA/MH/MM V V KEYENCE CORPORATION SV SV-M/SV-B V V FUJI ELECTRIC CO., LTD. ALPHA5 GYS/GYB V V FALDICGYS V V ORIENTAL MOTOR Co., Ltd.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 LEFS25 V V V V V V V V V V V V V V V V LEFS32 V V V V V V V V V V V V V V V V V V V V LEFS40 V V V V V V V V V V V V V V V V V V V V * Please consult with SMC for non-standard strokes as they are produced as special orders.

2–4

size (mm) Solid state switch D-P5DW A B HS (mm) D-P5DW Auto switch model 40, 50 A B Hs 9 7 4.5 7.5 44 50 Symbol Bore size (mm) 40 50 8 Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection HS Reed switch D-A9 V Solid state switch D-F9 V D-F9 WV A B 12 HS A B 16, 20, 25 HS A B 32, 40, 50 (mm) D-F9 V, D-F9 WV D-A9 V Auto switch model Symbol A B Hs A B Hs 12

Integrated Controller

6 53 Solid State Auto Switch Direct Mounting Type D-M9N(V)/D-M9P(V)/D-M9B(V) Refer to the SMC website for details on products that are compliant with international standards.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

12 V 100 V Relay, PLC 2-wire 24 V 12 V Connector Diagnostic indication (2-color indication) A79W Grommet F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV F79 F7P J79 F79W F7PW J79W F7BA M9NV M9PV M9BV F9NWV F9PWV F9BWV M9N M9P M9B F9NW F9PW F9BW F9BA 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A96V A96 5 V Grommet Yes 12 V A93 A93V 24 V 100 V Relay, PLC 2-wire 3-wire (NPN) M9N M9NV IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) M9B M9BV 2-wire 12 V F9NW F9NWV Relay, PLC 3-wire (NPN) Diagnostic indication IC circuit 5 V, 12 V 24 V Grommet Yes 3-wire (PNP) F9PW F9PWV (2-color display) F9BW F9BWV Improved water resistance (2-color display) 2-wire 12 V F9BA Though it is possible

e-Rodless Actuator

Yes 5 V A93V A93 Grommet 12 V 100 V Relay PLC 24 V 2-wire IC circuit A90V A90 5 V,12 V 100 V or less M9NV M9N 3-wire (NPN) IC circuit 5 V 12 V M9PV M9P 3-wire (PNP) M9BV M9B 12 V 2-wire Relay PLC Yes Grommet 24 V F9NWV F9NW 3-wire (NPN) Diagnostic indication 2-color display IC circuit 5 V 12 V F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire 12 V . . .

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.