24

50 40 50 100 40 100 80 30 30 80 50, 63 50, 63 50, 63 20 20 32, 40 50, 63 32, 40 32, 40 25 32, 40 10 10 25 Load mass m [kg] Load mass m [kg] 20 20 5 5 16 25 20 16 25 20 16 16 1 1 0.5 10 20 25 26 50 100 200 400 0.5 10 20 25 26 50 100 200 400 Stroke [mm] Stroke [mm] (17) L = 50 mm, V = 400 mm/s (18) L = 100 mm, V = 400 mm/s 50 50 40 100 40 100 80 30 30 80 50, 63 50, 63 50, 63 20 20 40 50, 63

MGP

12 1 1 12 12 12 0.5 10 20 30 31 50 100 101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50

MGP

50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -200 0.2 MGPA16-75 MGPA16-75 50 63 MGPA -150 0.3 0.15 50 63 MGPA -100 MGPA16-50 MGPA16-50 0.2 0.1 MGPA16-10 MGPA16-10 0.1 0.05 50 63 MGPA -50 50 63 MGPA -50 0 0 0 10 20 30 0 20 40 60 80 100 Horizontal load N Horizontal load N MGPA20 MGPA80 0.45 0.7 MGPA80-400 MGPA80-400 MGPA20-400 MGPA20-400 0.4 0.6 Plate displacement mm Plate displacement mm 0.35

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Same side 75 90 100 110 90+50 (n4) 2 n=4, 8, 12, 16, 100+50 (n4) 2 n=4, 8, 12, 16, 110+50(n4) 2 n=4, 8, 12, 16, 20+50(n2) Dif. sides Additional Weight of Lock (kg) D-B59W n=2, 4, 6, 8, n (n2) 2 40 50 63 80 100 Bore size (mm) 75+50 n=2, 3, 4, 90+50(n2) n=2, 4, 6, 8, 100+50(n2) n=2, 4, 6, 8, 110+50(n2) n=2, 4, 6, 8 , Same side Rear end lock (H) 0.02 0.03 0.03 0.10 0.12 Manual release

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Same side 75 90 100 110 90+50 (n4) 2 n=4, 8, 12, 16, 100+50 (n4) 2 n=4, 8, 12, 16, 110+50(n4) 2 n=4, 8, 12, 16, 20+50(n2) Dif. sides Additional Weight of Lock (kg) D-B59W n=2, 4, 6, 8, n (n2) 2 40 50 63 80 100 Bore size (mm) 75+50 n=2, 3, 4, 90+50(n2) n=2, 4, 6, 8, 100+50(n2) n=2, 4, 6, 8, 110+50(n2) n=2, 4, 6, 8 , Same side 0.02 0.03 0.03 0.10 0.12 Rear end lock (H) Manual release

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

HRX-OM-W002

Note1) Applicable model HRR012/018-A/W-10-T/MT HRR012/018/024/030-A/W-20-T HRR012/018/024/030-A/W-20-MT Rated flow50/60Hz Note23 L/min 7(0.36MPa)/10(0.42MPa) 10(0.42MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Maximum pumphead 50/60Hz m 50 50 50 Pump Output W 320 550 Circuit protector A 15 15A10A for standard Recommended earth leakage breaker capacity A 15 Cooling capacity Note 4 W The cooling

Cylinder

-c" urrent -;:--nge O I-road c t + ---_ In _t _ e_ rn _a _l _v _ o _ lt _ a ,, 9 ,, e_d _'_ 0 cP _ _ + _ ~ 0 I 2AVOf~ __ -Leak current 0 Response time 1.2 ms COJPB6-1OD _ In _d _ ic c.a :.. t_ o_ , _ Ia _ m ..: p _ _ + __ .---!'

Magnet: D (Built-in), Mounting: D (Clevis), Style: A (Non-lube Air Cushion), Bore Size: 40mm, Stroke: 75mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: N (Non-locking Type), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Magnet: Built-in, Mounting: Clevis, Style: Non-lube Air Cushion, Bore Size: 40mm, Stroke: 75mm, Rod Boot: w/o Rod Boot, Lock Position: Front Lock, Release of Manual: Non-locking Type, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Air Cylinder Series CM2

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Air Cylinder Series CA2

50 (n 4) 2 (n = 4, 8, 12, 16, ) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) (n = 2, 4, 6, 8, ) 20 + 50 (n 2) 2 90 + 50 (n 4) 2 D-B59W (n = 4, 8, 12, 16, ) n 75 + 50(n 2) (n = 2, 3, 4, ) 90 + 50(n 2) (n = 2, 4, 6, 8, ) 100 + 50(n 2) (n = 2, 4, 6, 8, ) 110 + 50(n 2) (n = 2, 4, 6, 8, ) Same surface 90 15 35 100 1 100 110 Different surfaces Same surface 75 100 80 100 90 100 2 D35 + 30(n 2) (n = 2,

CA2

= 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides With 2 Same side (n 2) 2 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 20 + 50 n = 2, 4, 6, 8 Different sides D-B59W With n 75 + 50(n 2) n = 2, 3, 4 90 + 50(n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50

Air Cylinder

8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 188 With Rod Boot (mm) Bore size B3 e f h l ZZ (Both sides) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 20 30 36 18 68 81 93 106 131 12.5 25 37.5 50 75 198 224 248 274 324 25 32 36 18 72 85 97 110 135 12.5 25 37.5 50 75 206 232 256 282

AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

voltage Q CE-compliant Nil Symbol Rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 1313 Series VFR6000 Use as a guide for selection.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

•

71 43 19 14 190 230 15 M14x1.5,15 13 0125 Up to 1000 50 47 143 145 17 15 27 171 27 . t3 128 20 212 112 255 '15 'UpJo.1 QOO 50 47 157 1060 32 19 15 43 M14n.. ?