Vacuum

Manifolds :-:: _, i n j "t'. Example) Due to lhe common supply/exhaust fealure, nole that ditlerenl pressLrre rdnge colnbinalions are nol avarhbb. lfv00-03 .1 set (Manitold part number) I loption lfa DIN raillonger lhan the specilied shlions is required, specily the applicable shlions in l'&o digils ([/a]imumlO slations) Erample) llW0O05-07 I ot-lZ;r"f"* Tos.3-r"!"

Vacuum

Manifolds :-:: _, i n j "t'. Example) Due to lhe common supply/exhaust fealure, nole that ditlerenl pressLrre rdnge colnbinalions are nol avarhbb. lfv00-03 .1 set (Manitold part number) I loption lfa DIN raillonger lhan the specilied shlions is required, specily the applicable shlions in l'&o digils ([/a]imumlO slations) Erample) llW0O05-07 I ot-lZ;r"f"* Tos.3-r"!"

Model: ASR (Pressure Valve), Size: 6 (1/2 Standard), Port Size: 03 (3/8), Applicable Tubing O.D.: 12 (ø12mm)

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Model: ASR (Pressure Valve), Size: 6 (1/2 Standard), Port Size: 03 (3/8), Applicable Tubing O.D.: 12 (ø12mm), Option: F20 (Fixed set pressure type (0.2 MPa))

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Table of Contents

50 70 Note 1) J dimension is at fully closed.

Dual Speed Controller with One-touch Fitting Series ASD

83 20.9 22 55.9 34.4 6 ASD530F-03-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5 15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 14 23 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

22 25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8 46.9 41.9 48.8 43.8 19 R 3/8 14 40 35 32.6 54.1 10 21 18.5 ASD530FG-03-10S 23.1 34.4 55.9 12 22 20.9 ASD530FG-03-12S 32.6 64.3 10 21 18.5 ASD630FG-04-10S 28.6 26.5 25.9 64.8 57.3 57.6 50.1 24 R 1/2 18.6 49.6 42.1 34.4 66.1 12 22 20.9 ASD630FG-04-12S Reference dimensions of M5 x 0.8, R threads after

AS-FG/ASD-FG

25.2 48.3 6 17 12.8 ASD530FG-03-06S 20.3 28.2 51.3 8 18.5 15.2 ASD530FG-03-08S 23 19.8 46.9 41.9 48.8 43.8 19 R(PT) 3/8 40 14 35 32.6 54.1 10 21 18.5 ASD530FG-03-10S 23.1 34.4 55.9 12 22 20.9 ASD530FG-03-12S 32.6 64.3 10 21 18.5 ASD630FG-04-10S 28.6 26.5 64.8 57.3 57.6 50.1 24 R(PT) 1/2 25.9 49.6 18.6 42.1 34.4 66.1 12 22 20.9 ASD630FG-04-12S Reference dimensions for M5 x 0.8 and R(PT)

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 25.7 23.3 25.7 23.3 25.7 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

Dual Speed Controller with One-touch Fitting Series ASD 1

83 20.9 22 55.9 34.4 6 ASD530F-03-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5 15.2 51.3 28.2 41.9 46.9 46.5 41.5 19.8 23 14 R 3/8 19 40 35 10 ASD530F-03-10S 98 21 54.1 32.6 18.5 23.1 12 ASD530F-03-12S 101 22 55.9 34.4 20.9 10 ASD630F-04-10S 177 21 64.3 32.6 18.5 57.3 64.8 57.6 50.1 18.6 R 1/2 49.6 42.1 26.5 28.6 25.9 24 12 ASD630F-04-12S 179 22 66.1 34.4 20.9 Reference dimensions

ASD

22 20.9 83 34.4 55.9 6 ASD530F-03-06S 17 74 12.8 25.2 48.3 20.3 8 ASD530F-03-08S 18.5 93 28.2 51.3 15.2 41.9 46.9 46.5 41.5 23 19.8 14 R(PT)3/8 19 40 35 10 ASD530F-03-10S 21 98 32.6 54.1 18.5 23.1 12 22 ASD530F-03-12S 101 34.4 55.9 20.9 10 21 177 ASD630F-04-10S 32.6 64.3 18.5 57.3 64.8 57.6 50.1 18.6 R(PT)1/2 49.6 42.1 28.6 26.5 25.9 24 12 22 179 ASD630F-04-12S 34.4 66.1 20.9 Reference dimensions

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A AulO switch o o c: C' iii' JJ o Q, .J!

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

0.4

2 0 1 " 565 Series VQC4000 Plug-in Unit Base Mounted Manifold Option * + ,),) Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-102 03 Individual EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 SJ SY !"

Information

ASG22F-M5-04 ASG22F-M5-06 ASG32F-01-04S ASG32F-01-06S ASG32F-01-08S ASG42F-02-06S ASG42F-02-08S ASG42F-02-10S ASG52F-03-08S ASG52F-03-10S ASG52F-03-12S ASG62F-04-12S 4 10.6 23 28.8 11.6 25.2 18.2 M5 x 0.8 8 15.8 37.2 33.7 33.7 30.2 6 13 23.6 30.6 14 34.4 18.8 4 10.6 24.8 32 14.3 39.4 18.2 1/8 12 18.6 44 39 40 35 6 13 25.4 32.6 14.3 42.4 18.8 8 15 27.5 35.5 16 52.4 20.9 6 13 27.3 36.2 17.9

Fieldbus System

SS5Y5 12S NA 05 N M U Refer to page 23 for Type 12/ Top ported dimensions. q w e r y t u Mixed Mounting Type It is possible to mount SY3000 size valves on all stations.

Model: ASR (Pressure Valve), Size: 6 (1/2 Standard), Port Size: 04 (1/2), Applicable Tubing O.D.: 12 (ø12mm)