A

S E R I E S E40-N04 4000 S E R I E S E40-N06 4000 S E R I E S E60-N06 5/6000 S E R I E S E60-N10 5/6000 S E R I E S mm Model Port size A B C E10-M5 M5x0.8 16 17.5 14 E20-N01 18 E20-N02 14 23 22 22 E20-N03 38 E30-N02 14 26 34.2 29 E30-N03 38 D I M E N S I O N S P I P I N G A D A P T O R E30-N04 12 40 34.2 29 E40-N03 38 33 42.2 35 E40-N04 12 E40-N06 34 50 42.2 35 E50-N06 34 36 44 46.2 E60-

Compact and Lightweight

DIN rail mounting bracket (Brackets on both sides) L x n pcs.+ J x 2 L ZH15DA-09-N03-11 ZH15DA-N02-N03-N03 ZH18DA-11-N03-13 ZH18DA-N03-N03-N03 ZH20DA-10-04-12 ZH20DA-03-04-04 ZH20DA-11-N04-13 ZH20DA-N03-N04-N04 The above shown products cannot be mounted closely together, as width across flats of the screw-in connection will interfere with each other.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Note 2) The material of the lock nut option-J (round type) is brass. However, note that only the AS220 uses steel.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): 1,190, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint

Body Size: 6 (1/2 Basis), Port Size: N04 [Cylinder Side (NPT 1/2) Pilot Port (NPT 1/4)], Applicable Tube OD: 11 (Ø3/8"), Lock Nut: J (Round)

Body Size: 1/2 Basis, Port Size: F04 [Cylinder Side (R(PT)1/2) Pilot Port (G(PF)1/4)], Applicable Tube OD: Ø1/2", Lock Nut: -

Body Size: 6 (1/2 Basis), Port Size: F04 [Cylinder Side (R(PT)1/2) Pilot Port (G(PF)1/4)], Applicable Tube OD: 13 (Ø1/2")

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Option: With Seal, Types

AS: AS, Body Size: 4 (1/2 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 04 (1/2), Applicable Tube OD: 13 (1/2"), Option: S (Sealant), Lock Nut: J (Round)

Size: 5 (3/8 Basis), Style: 1 (Union Tee), Thread: N (NPT), Port Size: 04 (R1/2), Tube Size: 13 (1/2"), Sealant: S [Sealant (01,02,03,04)], Option: None, Made to Order: None, Lock Nut: J (Round)

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Option: With Seal, Types

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Option: With Seal, Types of

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Option: With Seal, Types of Screw: NPT, Applicable Tube O.D.

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/2, Option: With Seal, Types of Screw: NPT, Applicable Tube O.D. mm

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread +

Vacuum

I J , J -0.97 50 1.97 -6.67 -0.193 1 0 0.394 1 .333 -0.00193 0.10 0.00394 -0.01333 -0.000193 0.01 0.000394 -0.000133 Vacuum System Specif ication In the vacuum circuit, vacuum pressure and adsorption response time are affected by piping conditions (tubes, fitting joints, pads, etc.) and the characteristics of the workpiece.