asilltr

fi; ,Ek---<j i E ; l l t , _ p i Ughr6ftdrn9drcd.i ^9 ixrf*H rill.l+r iE I ll zenrdDd i i-:--:-:]"ffi -l*L r-Choks i n"a El6ctric (-) o-A73c it\ihr ;ifie ;rod; i :t r**G}ri 'p D-479W / rwo @tor6 Solid. Sta,te Suitches D-J79. D-J79C, D-F7BV D-F79.D-F7NV l--;;;-;-l .."e D-F7P. D-F7PV .r_ i Frod i i l r E . l I I 19* i --r ,-t o'rp'r _T_ 5*"" I whhe !t, I L l i o -J Alack D-J79W.

Air Cylinder NCQ7 Series Compact Cylinder

fi; ,Ek---<j i E ; l l t , _ p i Ughr6ftdrn9drcd.i ^9 ixrf*H ri ll .l + r iE I ll zenrdDd i i-:--:-:]"ffi -l*L r-Choks i n"a El6ctric (-) o-A73c it\ihr ;ifie ;rod; i :t r**G}ri 'p D-479W / rwo @tor6 Solid. Sta,te Suitches D-J79. D-J79C, D-F7BV D-F79.D-F7NV l--;;;-;-l .."e D-F7P. D-F7PV .r_ i Frod i i l r E . l I I 19* i --r ,-t o'rp'r _T_ 5*"" I whhe !t, I L l i o -J Alack D-J79W.

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Applicable Tube OD: 07 (Ø1/4"), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 3/8 Basis, Thread: NPT, Port Size: 1/4, Applicable Tube OD: Ø1/4", Sealant: Sealant, Lock Nut: Round

Modular Design with Uniform Body Style

N T Bracket (Option) AR50-D to AR60-D A 2 x P1 (Port size) C B Q OUT IN Round type pressure gauge R P2 J (Pressure gauge port size) S H Center of piping T N M J D Bracket (Option) U Optional specifications Round type pressure gauge (Semi-standard: Z) Round type pressure gauge (with color zone) Model Standard specifications Round type pressure gauge P1 P2 A B*1 C D F J K H J H J H J AR20-D

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Note 2) The material of the lock nut option-J (round type) is brass. However, note that only the AS220 uses steel.

Ejector Valve Unit Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Number of ejectors 1 to 10 Enter the following together with the manifold number: 1. Part no. of solenoid for SY3000/SX3000 2. Part no. of ejector valve for ZYY3000/ZYX3000.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N03 NPT 3/8 AS431FG-N04 AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N03 NPT 3/8 AS431FG-N04 AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Compact Manifold Regulator Series ARM5

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

NARM Series

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

Pulse Valve

K (C) Port size: Size 14 A ( 52) (20) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) H Exhaust port 3/8 2 x P Port size (F) L M (G) (E) (B) J K 20 (C) Dimension in ( ) shows the dimension after tightening.

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 11 (Ø3/8"), Sealant: S (Sealant), Lock Nut: J (Round)

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45 Mounting position U side D side J Symbol U D Ejector/Valve total stations 02 Stations Symbol Number of ejectors 1 to 10 stations A, B port size (Valve only) 2 SUP/EXH block assembly specifications ... ...

VM

VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB Black VM120-01-30B VM

VM

VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-

VM

VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB Black VM120-01-30B VM

Table of Contents

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

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-J 1000 2000 3000 * P ease v sil our SMC homepage illpj,\i/rvw.smcwo d.com lor lhe atesl dela ls on our CE compl anl products.