Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 32 40 32 40 Rod end threads Female threads Male threads Air 1.5MPa 1.0MPa Fluid Proof pressure Maximum operating pressure Minimum operating pressure Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port Ambient and fluid temperature JIS class 2 +1.0 0 mm 0.035MPa 0.025MPa M5 x 0.8 M5 x 0.8 Without

STANDARD (PT), .03972 lb, ModelTubing O.D.Controlled flow (Free flow)Metric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)ASD230FM-M5?

Body Size: 2 (M5 Basis), Thread: Metric Thread (M5)/R(PT)/Unified Thread (10-32UNF), Port Size: M5X0.8, Applicable Tube OD: 04 (Ø4 mm)

.: 5 × 0.8, Types of Screw: M, Applicable Tube O.D. mm(mm): 4, Applicable Tube O.D. inch size(inch): -, Body Size: M5 Standard, Sealing Method: No Seal, Made-to-order specifications: None

2

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 484 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

ZP

C N S U F GN GS 29.4 B4 M4 x 0.7 4 ZP R 06 08 B 04 06 20.5 M5 x 0.8 B5 M5 x 0.8 5 2.52 Dimensions Per Vacuum Inlet Model Construction p. 115 C D E Fitting part min. hole size Vacuum inlet direction q Pad dia.

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

Table of Contents

(mm) 4 L Weight (g) Application Model D1 D2 KQ2C-04 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 2.9 10.1 5.2 Applicable tubing 4 KQ2C-04A8.5 5 2.2 0.1 KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04B9.7 5 2.2 0.1 KQ2C-06 0.1 6 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 2.2 6 KQ2C-06A10.5 7 0.1 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 6 KQ2C-06B12.0

Table of Contents

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

Table of Contents

(10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14-M5

AS

7 9.6 17.5 9.3 10.8 28.7 28.6 25.8 25 22.2 12.7 28.7 17.5 AS131F-M5-04 AS131F-M5-03 5/32" ASS M5 x 0.8 M5 x 0.8 8 9.3 20.3 20.3 4 9.6 9.3 28.6 25.8 22.2 7 25 9.3 10.8 AS131F-U10/32-04 AS131F-U10/32-03 5/32" 10-32UNF 10-32UNF AS131F-M5-06 AS131F-M5-05 ASR ASQ 3/16" M5 x 0.8 M5 x 0.8 13.5 11.4 21.3 23.3 34.5 16.5 31.8 21.4 20.6 6 11.6 AS131F-U10/32-06 AS131F-U10/32-05 3/16" 10-32UNF 10-32UNF

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

CATALOG

D I M E N S I O N S S E R I E S NARJ 04 4mm 06 6mm Japanese N North American M5 M5X0.8 Panel Mount Dimension Model A B C D E F G H J NARJ1020F-M5-04 21 10.4 4 M5X0.8 6 10.6 3.5 15.5 50 NARJ1020F-M5-06 22 12.8 6 Courtesy of Steven Engineering, Inc. !

KJ

(mm) 4 L Weight (g) Application Model D1 D2 KQ2C-04 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 2.9 10.1 5.2 Applicable tubing 4 KQ2C-04A8.5 5 2.2 0.1 KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04B9.7 5 2.2 0.1 KQ2C-06 0.1 6 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 2.2 6 KQ2C-06A10.5 7 0.1 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 6 KQ2C-06B12.0

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Modular F.R.L. Unit

AC55 1 AF60 AR60 AL60 AC60 1 AW + AL AL10 AW10 AC10A M5 x 0.8 AL20 AW20 AC20A 1/8, 1/4 AL30 AW30 AC30A 1/4, 3/8 AL40 AW40 AC40A 1/4, 3/8, 1/2 AL40-06 AW40-06 AC40A-06 3/4 AF + AR AF10 AR10 AC10B M5 x 0.8 AF20 AR20 AC20B 1/8, 1/4 AF30 AR25 AC25B 1/4, 3/8 AF30 AR30 AC30B 1/4, 3/8 AF40 AR40 AC40B 1/4, 3/8, 1/2 AF40-06 AR40-06 AC40B-06 3/4 AF50 AR50 AC50B 3/4, 1 AF60 AR50 AC55B 1 AF60 AR60 AC60B