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C3 One Touch Fittings for 3.2 C4 One Touch Fittings for 4 C6 One Touch Fittings for 6 M5 M5 (10-32Nom) N1 One Touch Fittings 1/8 N3 One Touch Fittings 5/32 N7 One Touch Fittings 1/4 * Mixed Ports Available N o t e 4 ) Combination of ejector option J and nameplate N is not possible. N o t e 1 ) Insert code L (upward) or B (downward) for elbow type fittings for all manifold stations.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N03 NPT 3/8 AS431FG-N04 AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS321FG-N03 NPT 3/8 AS431FG-N04 AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Compact Manifold Regulator Series ARM5

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

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0 5 10 ~ ~ , j .J; 2 0 ' o w 5 10 Needle revolutIOns (Revolutions) Needle revolutions (RevolutIOnS) 2 Series ASP Dimensions I tube outside dla, od Millimeter size l2 d Hl H2 11 R(PT}1/8 M5)(, 0.8 12 8 I h 12 19 12 24 17 ~ Rei erence dimenSions for A(PT) th readS aNal In stallation.

NARM Series

Description No. 2 Common IN Individual IN Common IN Individual IN Bonnet Polyacetal Regulator NARM2500-A-N02 NARM2500-B-N02 NARM3000-A-N03 NARM3000-B-N03 9 Regulator 1 Component Parts 10 End plate R 1 No.

Pulse Valve

K (C) Port size: Size 14 A ( 52) (20) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) H Exhaust port 3/8 2 x P Port size (F) L M (G) (E) (B) J K 20 (C) Dimension in ( ) shows the dimension after tightening.

Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 03 (3/8), Option: N (Nickel Plated), Lock Nut: J (Round)

Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 03 (3/8), Option: SN (Sealant + Nickel Plated), Lock Nut: J (Round)

Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 03 (3/8), Option: S (Sealant), Lock Nut: J (Round)

Type: Speed Controller, Body Material: Zinc Alloy, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected flat elbow type, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Standard, Lock Nut Option: Round Shape Lock Nut, Joint Type: Male thread + female thread, Connection Dia.: 3/8, Option: With Seal, Types

Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: NPT, Port Size: 3/8, Option: Nickel Plated, Lock Nut: J (Round)

Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: NPT, Port Size: 3/8, Option: Sealant + Nickel Plated, Lock Nut: J (Round)

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45 Mounting position U side D side J Symbol U D Ejector/Valve total stations 02 Stations Symbol Number of ejectors 1 to 10 stations A, B port size (Valve only) 2 SUP/EXH block assembly specifications ... ...

Table of Contents

Pin description 1 DC (+) 2 Analog output Accumulated pulse output wiring examples 3 DC () 4 OUT1 4-I thread with depth J 40 Max. 30V 80 mA or less OUT1 Black Load H 0V Blue 50 msec PF2A7H--28 29(-M) A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80 mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc 2, NPT 2, G

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-J 1000 2000 3000 * P ease v sil our SMC homepage illpj,\i/rvw.smcwo d.com lor lhe atesl dela ls on our CE compl anl products.

tTV2000/3000

. : j 1w301 Minimum supply pressure Set pressure + 0.1MPa Maximum supply pressure 0.2MPa 1.0MPa Regulating pressure rang 0 005 to 0.1 MPa 0.005 to 0.5MPa | 0.005 to 0.9MPa Voltage 24YDC !

Body Size: 5 (3/8 Basis), Port Size: N03 [Cylinder Side (NPT 3/8) Pilot Port (NPT 1/8)], Applicable Tube OD: 11 (Ø3/8"), Lock Nut: J (Round)

Body Size: 5 (3/8 Basis), Port Size: N03 [Cylinder Side (NPT 3/8) Pilot Port (NPT 1/8)], Applicable Tube OD: 09 (Ø5/16"), Lock Nut: J (Round)

Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: N (NPT), Port Size: 03 (3/8)