F

Flat Head Screw Driver Adjustment Type B O D Y S I Z E 1 M3, M5 2 18, 14 3 38 4 12 A B C D E F G Port Size Model O P T I O N D I R E C T C O N N E C T I O N T Y P E 9 28.3 25.5 10.3 9 10 8 M5x0.8 (N)AS1200-M5 Nil S Sealant 14.6 36.4 31.4 14.1 14.3 18 12 1/8 (N)AS2200-01 P O R T T H R E A D 19.5 40.8 35.8 18 18 27.2 17 1/4 (N)AS2200-02 R(PT) N NPT 24.3 46.9 41.9 20.8 22.6 30 19 3/8 (N)AS3200

AS-X785

Flow Rate and Sonic Conductance Model AS2200-m01m-X785 AS2201-m01-Fmm-X785 AS2200-m02m-X785 AS2201-m02-Fmm-X785 AS3200-m03m-X785 AS3201-m03-Fmm-X785 AS4200-m04m-X785 AS4201-m04-Fmm-X785 Port size on the valve side 6, 8, 1/8 6, 8 10, 1/4 8 10, 3/8 10 12, 1/2 Sonic conductance [dm3/(sbar)] 0.8 1.3 1.4 3.1 3.2 5.1 5.8 Critical pressure ratio 0.25 0.25 0.25 0.25 0.25 0.25 0.25 How to Order 2

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS2200-01 AS1200-M5 Made to Order Refer to page 647 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option Type J Hexagon lock nut Round lock nut Nil AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

2-Color Display Digital Flow Switch Series PFM

DIN Rail Mounting Bracket (Order Separately) ZS 33 R Stations 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations DIN rail (supplied by customers) Port size F02: G1/4 cannot be mounted on the DIN rail. 919 Series PFM5 Specifications Model PFM510 PFM525 PFM550 PFM511 Dry air, N2, Ar, CO2 (Air quality grade is JIS B8392.1-1, 1.2 to 1.6.2 and ISO8573.1-1, 1.2 to 1.6.2.)

0.01

C08 C10 C12 02 N02 F02 C04 C06 C08 02 N02 F02 C08 C10 C12 02 N02 F02 C04 C06 C08 02 N02 F02 IN port size IN port size Construction The construction and materials are the same as the standard product. Refer to Construction on page 323. The symbol stands for unavailable combination. The symbol stands for unavailable combination.

PFxx-OMJ0005CN

LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1) OUT1 ON (OUT2) OUT2 ON (SET) INOUT LED (OUT1)/ (UP) ON/OFF (DOWN) ON/OFF DIN -13No.PF-OMJ0005CN-I BAA B BAC 13.2 mm (71) C A A B -14No.PF-OMJ0005CN-I 0.50.05 Nm (ZS-33-M) (ZS-33-MS) M34 1.2 mm (71) DINZS-33-R DIN DIN0.40.05 Nm DIN DIN F02(G1/4)DIN DIN -15No.PF-OMJ0005CN-I () () Rc(NPT)1/8 79 Nm Rc(NPT)1/4 1214

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

2-Color Display Digital Pressure Switch Series ISE70/75/75H

1 Brown DC (+) 46 60 (31) (38.7) 3.5 35 OUT2 (NPN or PNP) 2 White 3 Blue DC () 24 OUT1 (NPN or PNP) 4 Black Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 6 726 Series ISE70/75/75H Specific Product Precautions 1 Be sure to read before handling.

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

DIN rail is not suitable for port size F02 (G1/4).

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

C01 A2 B2 2 49.6 (N02: 50.1) M5 x 0.8 thread depth 5 30 26.2 20 8.45 20 30 Width across flats 17 10 2 x M3 x 0.5 thread depth 4 Piping port 02: R1/4 N02: NPT1/4 3.5 8.8 Atmospheric vent port 2.6 14.7 25.1 46.2 2 12.4 26.2 10.1 8.45 22 14.5 Piping port Rc1/8 Piping port G1/4 -F02: G1/4 -C01: Rc1/8 27.7 21.7 8.45 8.45 Piping port TSJ1/4 Piping port URJ1/4 -B2: TSJ1/4 -A2: URJ1/4 736 Series

PSxx-OMM0002CN

) * (14 ) FG (49 N () () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02

Digital Flow Switch (Remote type sensor unit)

(at 500 VDC) between terminals and case Standards CE/UKCA marked, UL (CSA) -21No.PF-OMJ0016-J Specifications of piping port Model 01 02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 6 1/4 (5/32") (5/16") Thread type (Port size) Rc Rc NPT NPT G G OneOneOneOne1/8 1/4 1/8 1/4 1/8 1/4 touch fitting touch fitting touch fitting touch fitting Straight without flow adjustment valve 95 g 125 g 55 g Bottom entry

Digital Pressure Switch

VDC by megameter) Between wires and case Temperature characteristic 3% F.S. (25 C Ambient temperature range)) Oil resistant vinyl cabtyre cable 3 cores (N.P) 3.5, 2 m 4 cores (A.B) Sectional area of conductor: 0.15 mm2 (AWG26) 5 cores (R.T.S.V) Outside diameter of insulator: 0.95 mm Lead wire Standard CE marked (EMC directive/RoHS directive), UL/CSA Piping specifications Model No. 02 N02 F02

MU

Bore size (mm) 25 32 40 50 63 Mounting bracket MU-L02 MU-F02 MU-L03 MU-F03 MU-L04 MU-F04 MU-L05 MU-F05 MU-L06 MU-F06 (1) Foot Flange Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Body mounting bolts are attached with the foot style and flange style. Auto Switch Mounting Bracket Part No. Note Mounting bracket part no.

Plate Cylinder

Size Mounting bracket 25 32 40 50 63 Foot Note 1) MU-L02 MU-L03 MU-L04 MU-L05 MU-L06 Rod flange MU-F02 MU-F03 MU-F04 MU-F05 MU-F06 Note 1) When ordering foot bracket, order 2 pieces per cylinder. Note 2) Body mounting bolts are attached to the foot and rod flange. Note 3) The tightening torque for body mounting bolts is shown in the below table.

MU

Size Bracket 25 32 40 50 63 Foot (1) MU-L02 MU-F02 MU-L03 MU-F03 MU-L04 MU-F04 MU-L05 MU-F05 MU-L06 MU-F06 Flange Note 1) When ordering foot brackets, 2pcs. should be ordered for each cylinder. Note 2) Body mounting bolts are packed with the foot style and flange style. Precautions Be sure to read before handling.

PFM7

DIN Rail Mounting Bracket (Order Separately) ZS 33 R Stations 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations DIN rail (supplied by customers) Port size F02: G1/4 cannot be mounted on the DIN rail. 907

Digital Flow Switch (Integrated display type)

100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006-J Dimensions PFM7-(N)01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L/F01L -60No.PF-OMJ0006-J PFM7S-(N)01/(N)02/F01 -61No.PF-OMJ0006-J PFM7S-(N)01L/(N)02L/F01L -62No.PF-OMJ0006-J PFM7-F02