NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

CG5-S

(mm) Connection threads Universal type Elbow type Meter-out Meter-in Meter-out Meter-in M5 x 0.8 R 1/8 M5 x 0.8 R 1/8 R 1/4 M5 x 0.8 R 1/8 AS1201FG-M5-23 AS2201FG-01-23 AS1201FG-M5-04 AS2201FG-01-04 -02-04 AS1201FG-M5-06 AS2201FG-01-06 -02-06 AS3201FG-02-06 -03-06 AS2201FG-01-08 -02-08 AS3201FG-02-08 -03-08 AS2201FG-01-10 -02-10 AS3201FG-02-10 -03-10 AS4201FG-04-10 AS3201FG-02-12 -03-12 AS4201FG

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

PFxx-OMJ0005CN

NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () 2 ZS-33-MS () 3 ZS-33-R DIN 1 2 3 4 5

Vacuum

I J , J -0.97 50 1.97 -6.67 -0.193 1 0 0.394 1 .333 -0.00193 0.10 0.00394 -0.01333 -0.000193 0.01 0.000394 -0.000133 Vacuum System Specif ication In the vacuum circuit, vacuum pressure and adsorption response time are affected by piping conditions (tubes, fitting joints, pads, etc.) and the characteristics of the workpiece.

Vacuum

I J , J -0.97 50 1.97 -6.67 -0.193 1 0 0.394 1 .333 -0.00193 0.10 0.00394 -0.01333 -0.000193 0.01 0.000394 -0.000133 Vacuum System Specif ication In the vacuum circuit, vacuum pressure and adsorption response time are affected by piping conditions (tubes, fitting joints, pads, etc.) and the characteristics of the workpiece.

AS-FG

Example) AS2201FG-G01-06A Control type Note) 0 Meter-out 1 Meter-in Note) Meter-out and meter-in types can be visually identified by color of the knob. Meter-out: Gray Meter-in: Light blue Applicable tubing O.D.

Body Size: 3 (1/8 Basis), Port Size: N01 [Cylinder Side (NPT 1/8) Pilot Port (10-32UNF)], Applicable Tube OD: 09 (Ø5/16"), Lock Nut: J (Round)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 8 3/16" 36.1 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15

AS-FG/ASD-FG

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 14.3 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 27.5 11.6 6 5/32" R(PT) 1/8 14.3 14.2 31.1 36.1 12 32.1 27.1 17 NPT 1/8 12.7 23.1 30.2 AS221FG-01-08 AS221FG-N01-05 19 18.5 25.3 32.4 15.2 8 3/16" 11.4 36.1 31.1 32.1 27.1 16.5 14.2 23.9 31 15 AS221FG-01-10 AS221FG-N01-07 21 21 33.1 40.2 18.5 10 13.2 1/4" 18.5 19 15 25.3 32.4 AS221FG-02-04 AS221FG-N01

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01-07 23.9 31 15 21 21 33.1 40.2 18.5 13.2 10 1/4" 18.5 19 AS221FG-02-04 AS221FG-N01-09 15

Dual Speed Controller with One-touch Fitting Series ASD

Inch size Metric size 04 06 08 10 12 01 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 03 05 07 09 11 With One-touch fitting AS M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 ASP 01 02 03 04 ASN U10/32 N01 N02 N03 N04 AQ ASV AK ASS ASR Needle Valve/Flow Characteristics ASF ASD230F ASD330F ASD430F 100 200 400 1.5 3 6 Effective area (mm2) Effective area

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 22.1 12.3 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Tamper Proof and Flat Head Screw

-01ST 20.4 27.5 1/8" 8.4 4 9.3 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-N01-03ST AS221F-01-06ST 14.2 7 35.6 11.6 R 1/8 12 1.5 13.5 6 32 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-N01-05ST AS221F-01-08ST NPT1/8 12.7 14.2 7 35.6 1.5 32 15.2 25.3 18.5 32.4 8 AS221F-N01-07ST AS221F-01-10ST 15 1/4" 13.2 23.9 31 18.5 18.5 21 33.1 40.2 10 AS221F-N01-09ST AS221F-02-04ST 5/16" 15.2 25.3 32.4 15 21 10.4 16

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-01ST AS221F-01-04ST 1/8" 8.4 4 20.4 27.5 9.3 5/32" 9.3 20.4 27.5 12.7 14.3 AS221F-N01-03ST AS221F-01-06ST 13.5 12 R 1/8 14.2 7 35.6 1.5 31.6 6 11.6 3/16" 11.4 23.1 30.2 14.3 16.5 AS221F-N01-05ST AS221F-01-08ST NPT 1/8 12.7 14.2 7 35.6 1.5 31.6 18.5 25.3 32.4 8 15.2 AS221F-N01-07ST AS221F-01-10ST 1/4" 13.2 23.9 31 18.5 15 21 33.1 40.2 10 18.5 AS221F-N01-09ST AS221F-02-04ST 15 5/16" 15.2 25.3

Stainless Steel 316 Fittings

(inch) H (Width across flat) 12 17 12 17 12 17 19 14 17 19 17 19 24 21 24 Connection thread NPT Note 1) D M Weight (g) L1 L2 Model KQG2F01-N01 KQG2F01-N02 KQG2F03-N01 KQG2F03-N02 KQG2F07-N01 KQG2F07-N02 KQG2F07-N03 KQG2F09-N01 KQG2F09-N02 KQG2F09-N03 KQG2F11-N02 KQG2F11-N03 KQG2F11-N04 KQG2F13-N03 KQG2F13-N04 24.1 29.1 24.6 29.6 25 30 31.2 27.2 32.2 33.4 32.1 33.3 38.6 34.6 39.9 1/8 1/4 1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 12.7 12.3 22.1 17.3 7 9.6 30.1 28.8 25.1 8 33.8 10-32 UNF 16.5 13.5 26.1 23.1

Series AS-FM/AS-M/ASD-FM

Max. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 8.4 9.3 11.4 12 AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 12.7 9.6 22.1 12.3 17.3 8 7 30.1 25.1 28.8 33.8 10-32UNF 16.5 13.5 26.1