Microspeed Cylinder

In-line Type Flow rate and effective area AS2001FM Model AS1001FM AS2051FM 8 3.2, 4, 6 6 6 4 Metric sizes Tubing O.D. 1/8", 5/32", 3/16" 1/4" 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" Inch sizes Flow rate 12 (0.42) 7 (0.25) l/min (ANR) (CFM) 38 (1.33) Controlled flow 0.2 (0.01) 0.1 (0.006) 0.6 (0.03) Effective area mm (cv) Flow rate l/min (ANR) (CFM) 100 (3.5) 460 (16.1) 230 (8.1) 290 (10.2) 130

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 7 12 Air flow (l/min (ANR)) 38 Controlled flow CX 0.1 0.2 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM

Free Mount Cylinder Series CU

6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390 Free flow 3.5 2.7 7 1.5 Effective area (mm2) 4 6 Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type Air Flow/Effective Area AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .06160 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

In-line Type Flow rate and effective area AS2001FM Model AS1001FM AS2051FM 8 6 3.2, 4, 6 4 6 Metric sizes Tubing O.D.

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .02200 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .02645 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .04069 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .03359 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .11023 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .11023 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .03527 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, 1B, AS***F OTHER SIZE RATING (PT), .03527 lb, ModelTubing O.D.Controlled flowFree flowMetric sizeInch sizeAir flow (l/min (ANR))Effective area (mm2)Flow rate (l/min (ANR))AS2001FM

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 7 12 Air flow (l/min (ANR)) 38 Controlled flow CX 0.1 0.2 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM

CJ2X/CUX/CQSX/CQ2X/CM2X

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM Model AS1001FM AS2051FM RS Q G Metric size 8 3.2, 4, 6 6 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" Inch size 1/4", 5/16" 3/16", 1/4" 3/16" 5/32" RS H A Air flow (l/min (ANR)) 12 7 38 Controlled flow

Body Size: 200 (1/8 Basis), Applicable Tube OD: 03 (Ø5/32")

Body Size: 200 (1/8 Basis), Applicable Tube OD: 05 (Ø3/16")

Body Size: 200 (1/8 Basis), Applicable Tube OD: Ø6

Body Size: 200 (1/8 Basis), Applicable Tube OD: 07 (Ø1/4")

Type: Speed Controller, Body Material: [Resin] PBT, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: One-touch coupling one both sides, Applicable Tube O.D. mm(mm): -, Applicable Tube O.D. inch size(inch): 5/32, Body Size: 1/8 Standard