CC

Conditions: Operating pressure 0.5 MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1 m AS500-06 AS420-02/03/04 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load Load ratio Load ratio Bore size (mm) Bore size (mm) AS2000-01/02 AS600-10 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

Description Note Material AS3000 AS2000 Valve NBR/Brass o Valve NBR 14283 Spring Stainless steel 143022 i !0 Spring Stainless steel 14282 O-ring NBR 143023 o !1 Stainless steel M4 x 0.7 x 8 Cross-recessed head cap screw Cross-recessed head cap screw Steel wire M4 x 0.7 x 8 M3 x 0.5 x 6 !0 !2 NBR 14284 O-ring 143021 !1 15-9-41 Dimensions AS2000E/3000E 2-port size L7 Max. Min.

Air-hydro Unit

Instead, use an individual CC valve unit or a speed controller (AS2000, AS3000, AS4000, etc.) through a pipe connection.

CC

Instead, use an individual CC valve unit or a speed controller (AS2000, AS3000, AS4000, etc.) through a pipe connection. 5 to 50C Ambient and fluid temperature Turbine oil (40 to 100 mm2/s) Fluid 40 mm Nominal size Converter Standard Effective Oil Level Stroke/Effective Volume Standard effective oil level stroke (mm) 50 100 150 200 300 Effective volume (cm3) 60 120 180 250 370 Limited flow

2-Color Display Digital Flow Switch Series PFM

DIN Rail Mounting Bracket (Order Separately) ZS 33 R Stations 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations DIN rail (supplied by customers) Port size F02: G1/4 cannot be mounted on the DIN rail. 919 Series PFM5 Specifications Model PFM510 PFM525 PFM550 PFM511 Dry air, N2, Ar, CO2 (Air quality grade is JIS B8392.1-1, 1.2 to 1.6.2 and ISO8573.1-1, 1.2 to 1.6.2.)

0.01

C08 C10 C12 02 N02 F02 C04 C06 C08 02 N02 F02 C08 C10 C12 02 N02 F02 C04 C06 C08 02 N02 F02 IN port size IN port size Construction The construction and materials are the same as the standard product. Refer to Construction on page 323. The symbol stands for unavailable combination. The symbol stands for unavailable combination.

PFxx-OMJ0005CN

LED UP) (DOWN) (OUT2) (OUT1) SET) (OUT ) (IN ) (OUT1) OUT1 ON (OUT2) OUT2 ON (SET) INOUT LED (OUT1)/ (UP) ON/OFF (DOWN) ON/OFF DIN -13No.PF-OMJ0005CN-I BAA B BAC 13.2 mm (71) C A A B -14No.PF-OMJ0005CN-I 0.50.05 Nm (ZS-33-M) (ZS-33-MS) M34 1.2 mm (71) DINZS-33-R DIN DIN0.40.05 Nm DIN DIN F02(G1/4)DIN DIN -15No.PF-OMJ0005CN-I () () Rc(NPT)1/8 79 Nm Rc(NPT)1/4 1214

Tamper Proof and Flat Head Screw

40.7 18 1.5 36.7 AS22 0-N02-ST NPT 1/4 17.5 NPT 1/4 AS32 0-02-ST Rc 1/4 19 22.5 R 1/4 AS32 0-F02-ST PF 1/4 24.3 9.5 30 55.3 22.4 1.5 49.3 AS32 0-N02-ST NPT 1/4 NPT 1/4 AS32 0-03-ST Rc 3/8 19 22.5 R 3/8 AS32 0-F03-ST PF 3/8 24.3 9.5 30 53.7 20.8 1.5 47.7 AS32 0-N03-ST NPT 3/8 NPT 3/8 AS42 0-04-ST Rc 1/2 24 27.5 R 1/2 AS42 0-F04-ST PF 1/2 28.5 12 38.5 63.8 26.7 1.5 55.8 AS42 0-N04-ST NPT 1

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

Table of Contents

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

2-Color Display Digital Pressure Switch Series ISE70/75/75H

1 Brown DC (+) 46 60 (31) (38.7) 3.5 35 OUT2 (NPN or PNP) 2 White 3 Blue DC () 24 OUT1 (NPN or PNP) 4 Black Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 6 726 Series ISE70/75/75H Specific Product Precautions 1 Be sure to read before handling.

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

DIN rail is not suitable for port size F02 (G1/4).

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

C01 A2 B2 2 49.6 (N02: 50.1) M5 x 0.8 thread depth 5 30 26.2 20 8.45 20 30 Width across flats 17 10 2 x M3 x 0.5 thread depth 4 Piping port 02: R1/4 N02: NPT1/4 3.5 8.8 Atmospheric vent port 2.6 14.7 25.1 46.2 2 12.4 26.2 10.1 8.45 22 14.5 Piping port Rc1/8 Piping port G1/4 -F02: G1/4 -C01: Rc1/8 27.7 21.7 8.45 8.45 Piping port TSJ1/4 Piping port URJ1/4 -B2: TSJ1/4 -A2: URJ1/4 736 Series

PSxx-OMM0002CN

) * (14 ) FG (49 N () () TSJSwagelok(Swagelok URJ Swagelok(VCR)/GroundGround Swagelok,VCRSwagelok Company -6No.PS-OMM0002CN-F * 6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02

Rotary Actuator

Table (6) Recommended Devices Model Solenoid Valve(CV value) * Speed Controller Tube 30 VZ1000 Series VF1000 Series AS1000 Series 4/2.5 50 VZ3000 Series VF3000 Series AS2000 Series 6/4 63 80 VZ5000 Series VF3000 Series AS3000 Series 8/6 100 VF3000 Series 10/7.5 *The selected solenoid valves are flexible seal types. 21 - Mounting Restriction of the load Provided that a dynamic load is not

Compact Rotary Actuator

Table 4 Recommended equipment Size Solenoid valve Speed controller Tube 10 VZ1000 seriesM5,Cv=0.05 VJ3000 seriesM5,Cv=0.2 AS1000 series(M5) 42.5 15 20 VZ3000 seriesRc1/8,Cv=0.2 VF1000 seriesRc1/8,Cv=0.15 AS2000 series(Rc1/8) 64 30 40 Solenoid valve is selected by elastic seal method -21- Mounting 4-1 Restriction of the load to axis Table of load below shows the allowable load when no moving

Rotary Table

Recommended models Size Solenoid valve (CV value) Speed controller Tubing 1 0.3 AS2000 series 4 / 6 2 3 7 21 - Mounting Load restrictions Set the load and moment to be applied to the table within the allowable values shown in the table below. (Values exceeding the allowable range will cause excessive play, reduce accuracy, and shorten service life.) Table 4.