.: 5 × 0.8, Option: None, Types of Screw: M, Applicable Tube O.D. mm(mm): 6, Applicable Tube O.D. inch size(inch): -, Body Size: M5 Standard, Made-to-order specifications: None

AS: AS, Body Size: 1 (M5 Basis), Style: 3 (Universal), Control Method: 1 (Meter-in), Thread: Metric Thread (M5)/R(PT), Port Size: M5X0.8, Applicable Tube OD: Ø6, Option: None, Lock Nut: J (Round)

.: 5 × 0.8, Option: None, Types of Screw: M, Applicable Tube O.D. mm(mm): 6, Applicable Tube O.D. inch size(inch): -, Body Size: M5 Standard, Made-to-order specifications: None

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Table of Contents

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

Table of Contents

(mm) 4 L Weight (g) Application Model D1 D2 KQ2C-04 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 2.9 10.1 5.2 Applicable tubing 4 KQ2C-04A8.5 5 2.2 0.1 KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04B9.7 5 2.2 0.1 KQ2C-06 0.1 6 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 2.2 6 KQ2C-06A10.5 7 0.1 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 6 KQ2C-06B12.0

ZP

D 02 1.2 M4 x 0.7 4 04 1.6 06 08 2.5 28.4 N S U F GN GS B4 M5 x 0.8 19.5 04 06 ZP R U 02 1.2 M5 x 0.8 5 04 1.6 06 08 2.5 B5 A2 Dimensions Per Vacuum Inlet Construction p. 115 Model Adapter Assembly p. 122 D E F Fitting part min. hole size Vacuum inlet direction q Pad dia.

AS

7 12.7 12.3 28.6 25.8 25 22.2 9.6 8 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 3.2 9.3 22.1 17.3 8.4 22.1 17.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 M5 x 0.8 M5 x 0.8 3/16" 4 7 16.5 7 8 11.4 21.3 26.1 9.3 22.2 9.6 25 25.8 28.6 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 10-32UNF 3/16" 10-32UNF 11.7 28.6 25.8 25 22.2 9.6 8 AS121F-M5

CATALOG

N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

ZP

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Vacuum Pad

Suffix of how to order () U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 Pad diameter: 4 to 8 Model Pad unit part no. Adapter part no. ZP3-Y(04/06/08)UM;-B5-@ ZP3-Y(04/06/08)B;-B5-@ ZP3-(04/06/08)UM; ZP3-(04/06/08)B; Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

KJ

(mm) 4 L Weight (g) Application Model D1 D2 KQ2C-04 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 2.9 10.1 5.2 Applicable tubing 4 KQ2C-04A8.5 5 2.2 0.1 KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04B9.7 5 2.2 0.1 KQ2C-06 0.1 6 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 2.2 6 KQ2C-06A10.5 7 0.1 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 6 KQ2C-06B12.0

AC

00 M5 01 00 01 02 00 02 03 04 Without sub-plate D M5 Without sub-plate B M5 1 8 Base mounted style Without sub-plate 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol M5 01 02 02 03 04 04 06 10 10 12 14 20 A M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 3 Body ported style 5 1 1 1 1 4 7 1 4 1 1 2 1 9 2 2 1.15-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 0 1 VY140 02 03 04 0 1 VY150 04 06

Table of Contents

-06 (6) 02 03 04 E300E100-M5 E20002 03 04 E30001 02 03 E60006 10 E60006 10 E60006 10 Piping adapter 02 03 04 06 IS1000E-40 (6) Pressure switch with piping adapter IS1000E-20 02 03 04 IS1000E-30 01 02 03 02 03 04 IS1000E-30 (6) Y14-M5 Y2401 02 Y3401 02 Y3402 03 Y4403 04 Y5401 02 Cross interface Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

ZP3

adapter 4 to 8 w q ZP3 Y N B5 B5 04 B r Vacuum inlet Connection thread (Female thread) e B5 M5 x 0.8 Female thread 02 2 One-touch fitting 04 4 U2 For 2 polyurethane tubing Barb fitting U4 For 4 soft tubing 8 B5 M5 x 0.8 8 Model M5 x 0.8 8 0 0.1 M5 x 0.8 Effective thread depth 4 Vacuum inlet direction q Pad dia.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

B port size: M5, C4, C6, N3, N7.

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.