Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Rotary Actuator

Please refer below for calculation of kinetic energy. 2 I 2 1 E E : Kinetic energy J I: Inertia moment kg/m2 : Angular speed rad/s Allowable kinetic energy for the rotary actuator is limited. The limit of rotation time is obtained by calculating inertia moment. Please refer following for obtaining inertia moment.

Compact Rotary Actuator

Table 4 Recommended equipment Size Solenoid valve Speed controller Tube 10 VZ1000 seriesM5,Cv=0.05 VJ3000 seriesM5,Cv=0.2 AS1000 series(M5) 42.5 15 20 VZ3000 seriesRc1/8,Cv=0.2 VF1000 seriesRc1/8,Cv=0.15 AS2000 series(Rc1/8) 64 30 40 Solenoid valve is selected by elastic seal method -21- Mounting 4-1 Restriction of the load to axis Table of load below shows the allowable load when no moving

Table of Contents

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

F

O N S S E R I E S (N)AS4000 D I M E N S I O N S S E R I E S (N)AS1000-M3 1.5MPa / 220PSI Proof Pressure 1MPa / 145PSI Max Operating Pressure 0.05MPa / 8PSI Min Operating Pressure 5 ~ 60OC / 40 ~ 140F Ambient and Fluid Temperature 8 ~ 10Turns No Of Needle Rotations AS1000 Not Applicable Panel Cut Out Dimensions AS2000 16.5 AS3000 16.5 AS4000 25 D I M E N S I O N S S E R I E S (N)AS1000-M5

MHS

M40.7 2.1 MHS4-16D M30.5 0.88 MHSH(J)3-50DA MHSH(J)3-50DB M50.8 4.3 20D M30.5 0.88 MHSH(J)3-63DA MHSH(J)3-63DB M61 7.3 25D M30.5 0.88 32D M40.7 2.1 MHSH(J)3-80DA MHSH(J)3-80DB M61 7.3 40D M50.8 4.3 50D M50.8 4.3 ) MHSJ3MHSHJ3 63D M50.8 4.3 11 1 . 2 . 12 3 . 4 . <> .AS1200M3M5 AS220001 AS1000 AS1001FAS2051F 3-4 1. 1 5m 2 3 5 13 3-5 1 2 1.52 3-6 1 2 3 4 5 6 3-7 1 ISO

Flow Control Equipment

M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure

MHF2

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

CYP_EN

Recommended speed controlling restrictor/ dual speed controller for CYP cylinder Model Series Restrictor CYP15 CYP32 Elbow type 10-AS1200-M5-X216 10-AS2200-01-X214 Metal body piping type In-line type 10-AS1000-M5-X214 10-AS2000-01-X209 10-AS1201F-M5-04-X214 10-AS2201F-01-04-X214 Elbow type 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 (Restrictor) 10-AS2201F-01-06-X214 10-AS1301F-M5-04-X214

Parallel Type Air Gripper

Air gripper mounted type: AS1211F-M3, AS1201F-M5, etc. Piping type: AS1000 series, AS1002F, etc. 10 - 2-4. Air supply Warning 1. Please consult with SMC when using the product in applications other than compressed air. 2. Compressed air containing a large amount of condensate can cause malfunction of pneumatic equipment.

Parallel Type Air Gripper

Air gripper mounted type: AS1211F-M3, AS1201F-M5, etc. Piping type: AS1000 series, AS1002F, etc. 11 - 3-4. Air supply Warning 1. Please contact SMC when using the product in applications other than with compressed air. 2. Compressed air containing a large amount of condensate can cause malfunction of pneumatic equipment.

MHF2-E

Air gripper mounted type: AS1211F-M3, AS1201F-M5, etc. Piping type: AS1000 series, AS1002F, etc. 2-4. Air Supply Warning 1. Please contact SMC when using the product in applications other than with compressed air. 2. Compressed air containing a large amount of condensate can cause malfunction of pneumatic A equipment.

Ozone Resistant

120-M3 (U10, 32) 120-M5-F 220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CTRL, M5(NOM 10/32), AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .06847 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CTL, CLEAN-ROOM, AIRLINE EQUIPMENT, AS FLOW CONTROL, A5, AS M5 CLEAN-ROOM, .06305 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight (g) Flow

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CTRL, W/FITTING,, AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .08818 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight

MHx-OMU0057

AS1000 AS1002F 2-4. 1. 2. 3. 4. 9 - 1.( ) 2. 5 3. 4. oC 5 2-5. 1.

(g) Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS1000-M3M3 x 0.5200.3200.32.5, 4, 64.7