Table of Contents

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution

VFR

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution

IR1000/2000/3000

min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 1.2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 10, 11, 12 Effective

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS-F TMH ASD AS Number of needle rotations Number of needle rotations Number of needle rotations AS3001F AS4001F AS-FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) KE AS-FG

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FG, AS4211FG AS3201FG, AS3211FG Inlet pressure 0.5 MPa Inlet pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle

FILTER REGULATOR

G46-10-01-L Rc G36-4-01-L G46-4-01-L 1 0.2MPa setting Round type pressure gauge (with colour zone) G36-10-N01-L G46-10-N01-L G36-4-N01-L NPT G46-4-N01-L 1 0.2MPa setting G36-10-01-L G46-10-01-L G G36-4-01-L G46-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Pressure gauge adaptor assembly Aluminium die ARP20P-310AS-N01 G cast ARP20P-310AS-F01 NPT ARP20P-320AS-01 Rc Plug assembly

FILTER REGULATOR

G46-10-01-L G36-4-01-L G46-4-01-L 1 0.2MPa setting Round type pressure gauge (with colour zone) NPT G36-10-N01-L G46-10-N01-L G36-4-N01-L G46-4-N01-L 1 0.2MPa setting G G36-10-01-L G46-10-01-L G36-4-01-L G46-4-01-L 1 0.2MPa setting ARP20P-310AS-01 Rc Aluminium die Pressure gauge adaptor assembly ARP20P-310AS-N01 G cast ARP20P-310AS-F01 NPT ARP20P-320AS-01 Rc Plug assembly ARP20P

PFM7

Port size Instruction manual Symbol Description Flow rate range 10 With instruction manual (Leaflet: Japanese and English) None Nil N 25 50 11 01 02 N01 N02 F01 F02 C4 C6 C8 N7 Rc1/8 Rc1/4 NPT1/8 NPT1/4 G1/8 G1/4 Unit specification With unit switching function M Nil Fixed SI unit Note) Note) Fixed unit: Real-time flow rate: l/min Accumulated flow: l 4 (5/32") one-touch fitting 6 one-touch

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)

1

0 MGP CY CX CK1 C(L)K CDJZ2B10/16-Z-B C(L)KU CKQ Component Parts CKZ2N No.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

PFxx-OMA1007

4200 L/min 60 to 2100 L/min 30 to 1050 L/min 15 to 525 L/min (Displays 0 when the value is below 120 L/min) (Displays 0 when the value is below 60 L/min) (Displays 0 when the value is below 30 L/min) (Displays 0 when the value is below 15 L/min) 3.0 0 to 3%F.S. 160 to 4200 L/min 80 to 2100 L/min 40 to 1050 L/min 20 to 525 L/min (Displays 0 when the value is below 160 L/min) (Displays 0 when

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

"":'0 'v' L-4-L-,j-i) . ., :2 ~ Interface ~ ~ i!i regulator .:;,.~ E ... ~ .. SUP gallery block disc: AXT634-10A EXH gallery block disc: AXT634-11A Cb"''lC ~~E i~ ~ L . .

E-ITV-STD-RF-A

W hen t he gai n i s changed t o m ore l arger, t he response becom e qui ckl y, but t here i s a possi bi l i t y t hat st abi l i t y i s l ost . N o Key operat i on LED D i spl ay U nl ock keys ( ref er t o P8) Press Skey f or 2 seconds or m ore, t hen go t o det ai l set t i ng m ode. To "F01" by usi ng t he and keys. ( di spl ayed al t ernat el y) Press Skey.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...