Model: DP Lube Single Unit, Size: 9 (2B), Thread: Rc(PT), Port Size: 14 (1+1/2), Accessory: B (Bracket), Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: Rc(PT), Port Size: 20 (2), Accessory: B (Bracket), Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: Rc(PT), Port Size: 20 (2), Accessory: P (Panel), Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: Rc(PT), Port Size: 14 (1+1/2), Accessory: None, Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: N (NPT), Port Size: 14 (1+1/2), Accessory: None, Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: N (NPT), Port Size: 14 (1+1/2), Accessory: B (Bracket), Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: N (NPT), Port Size: 12 (1+1/4), Accessory: None, Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: N (NPT), Port Size: 20 (2), Accessory: B (Bracket), Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: N (NPT), Port Size: 12 (1+1/4), Accessory: B (Bracket), Option: S1 [1b (w/o Oil ON)]

Model: DP Lube Single Unit, Size: 9 (2B), Thread: N (NPT), Port Size: 20 (2), Accessory: None, Option: S1 [1b (w/o Oil ON)]

NCQ2/CQ2

Example) In the case of CDQ2WB4018DZ, stroke S1 is 20 mm and stroke S2 is 18 mm.

Compact Cylinder

Example) In the case of CDQ2WB4018DZ, stroke S1 is 20 mm and stroke S2 is 18 mm.

JXCx-OMT0023

50 20 50 7 20 8.

Made to Order

CQS series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) (mm) Bore size (mm) Stroke Both of S1, S2 A B L 12 3.5 41 (51) 17 (22) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) -X -X 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Vacuum Module Series ZX

VJ10-20-4A-6 2 pcs. ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Metal Seal/Rubber Seal Series VQ Body Ported

Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-69.

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

1

Series CQS Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2) Stroke Both of S1, S2 Bore size (mm) A B L 12 17 (22) 3.5 41 (51) 5 to 30 16 17 (22) 3.5 41 (51) 20 19.5 (29.5) 4.5 48 (68) 5 to 50 25 22.5 (32.5) 5 55 (75) Note 1) ( ): Denotes the dimensions with auto switch.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Stainless steel is used for size 10 only. 97 Series CRBU2WU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type CRBU2WU10, 15, 20, 30-S 2 x S2 2 x S1 2 x S1 2 x S1 Free mounting rotary actuator A port B port 2 x R Angle adjuster Cap Figures above show actuators for 90 and 180 when B port is pressurized,and they show size 20 actuators.