Electric Actuator

22 30 Basic Compact 4 6 10 14 Basic Compact 4 6 8 12 10 16 20 25 32 40 10 16 20 25 10 20 32 40 10 20 32 40 5.5 22 90 130 6 8 6 8 7 28 120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 17 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

CRBU

Port locations: Axial direction CRBUWl-lSE (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 (Depth) Q2 R S1 S2 T U V W X Model 10.5 8.5 10.5 11 11.5 14 12 15.5 10.5 9.5 10.5 10 11 13 13 14 CRBUW10-lS CRBUW10-lSE CRBUW15-lS CRBUW15-lSE CRBUW20-lS CRBUW20-lSE CRBUW30-lS CRBUW30-lSE M3 (4) M5 X 0.8 M3 X 0.5 M5 X 0.8 M3 X 0.5 4 -0.004 -0.012 9 0 -0.043 29 22 14 8 3 25 31 41 15.5 M3 X 0.5 5 24 3.5

Series SV

S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

Table of Contents

Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

2

(mm) Connection thread Rc Model T (M) Weight (g) NylonUrethane 3.2 1/4 KQ2E23-02l M12 x 1 17 14 28.7 14.3 13 13.3 3.4 2.9 2.5 31.2 Applicable tubing Mounting plate thickness 7 mm or less 4 1/8 KQ2E04-01l M12 x 1 14 14 24.4 10 13 13.3 5.6 4 3 21.2 1/4 KQ2E04-02l M12 x 1 17 14 29 14.6 13 13.3 5.6 4 3 30.9 H1 H2 T 6 1/8 KQ2E06-01l M14 x 1 17 17 23.6 9.2 15 13.3 13.1 10.4 4.5 28.9 1/4 KQ2E06-

Electric Actuator

Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Caution 0.5 8 8 7 Precautions 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Electric Actuator/Slider Type

120 160 14 2 4 105 to 500 63 50 to 200 146 4 32.2 60 98.5 138.5 12.5 (13.5)138.5 178.5 12.5 (13.5) 4 8 205 to 500 505 to 800 L lead Motor left side parallel type: LEY L 25 32 63 Motor right side parallel type: LEY R 25 32 63 U S1 U S1 [mm] Size S1 T2 U 25 47 91 1 32 61 117 1 63 84 142 4 T2 T2 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch

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4-16 Side entry Top entry Side entry U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

PC Wiring System Series PCW

8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

Programless Controller Series LECP1

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Step Motor Controller

A Controller type Motor type Power supply voltage Symbol Type AC servo motor (S2) Capacity Encoder LECSA1-S1 LECSA1-S3 LECSA2-S1 LECSA2-S3 LECSA2-S4 LECSB1-S5 LECSB1-S7 LECSB2-S5 LECSB2-S7 LECSB2-S8 AC servo motor (S2) 100 to 120 VAC 50/60 Hz S1 S3 S4 S5 S7 S8 100 W B Pulse input type (For absolute encoder) AC servo motor (S3) Pulse input type (For incremental encoder) Incremental AC servo

Vacuum Module Series ZX

(For replacement) Philips screw (M2.5 x 39) Plate A Philips screw M2.5 x 14 How to order (3) Ejector assembly How to order (1) Valve unit (Supply valve: N.C.)

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

Environment

1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

14.

CRB2/CRBU2/CRB1

E (g6) F (h9) G A B C D H J K L M N P Q1 R S1 S2 T U V W X Model M5 x 0.8 M3 x 0.5 CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE 10.5 10.5 11 10 11.5 11 14 13 12 13 15.5 14 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0 0.043 0.004 0.012 6 14 34.5 42 10 20 M5 x 0.8 17 M4 x 0.7 1.5 7 10 0.5 36 4.5 M4 x 0.7 26 4 36 44 59 0 0.043 0.004 0.012