Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 2,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 3/4, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 3/4, Drain Exhaust: Float switch, Flow Direction: [Right] From Left to Right, Size of Body: 1B, Accessory: Bracket

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 2,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: Float switch, Flow Direction: [Right] From Left to Right, Size of Body: 1B, Accessory: None, Float

Pressure Control Equipment

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 1 32 Auto feed tank ALT-5/-9 With inlet pressure insulation function Float switch 5,000 9,000 14-13-6 AIR OIL 8 3 32 to 2 DP lube ALD600/900 DP lube unit ALDU600/900 4 3 2,000 5,000 14-13-11 Centralized multiple lubrication Bracket Bracket panel (ALDU

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 1 32 Auto feed tank ALT-5/-9 With inlet pressure insulation function Float switch 5,000 9,000 14-13-6 AIR OIL 8 3 32 to 2 DP lube ALD600/900 DP lube unit ALDU600/900 4 3 2,000 5,000 14-13-11 Centralized multiple lubrication Bracket Bracket panel (ALDU

This is a legacy product, and replaced byAMC610-N10B

This is a legacy product, and replaced byAR60-N10B-Z-B

This is a legacy product, and replaced byVHS50-N10B-Z, VALVE, 3 PORT LOCK OUT, VALVE, VHS HAND VALVE, 1A, VHS, 1.68909 lb

This is a legacy product, and replaced byVHS50-N10B-RZ, VALVE, LOCK-OUT *LQA, VALVE, VHS, 1.76369 lb

This is a legacy product, and replaced byVHS50-N10B-Z

This is a legacy product, and replaced byVHS50-N10B-KZ VHS HAND VALVE. VALVE, 3 PORT LOCK OUT. VALVE. VHS. 1.80779 lb. 1A.

Model: DP Lube Single Unit, Size: 1B, Port Size: 1, Accessory: Bracket, Option: S1 [1b (w/o Oil ON)]

Model: U (DP Lube Unit), Size: 6 (1B), Thread: N (NPT), Port Size: 10 (1), Accessory: B (Bracket), Option: S1 [1b (w/o Oil ON)]

Min. Dripping Flow Rate(l/min): 102, Oil Storage Capacity(cm³): 2,000, Case: [Resin] Glass Fiber Epoxy Resin, Polycarbonate, Inlet Side Connection Type: NPT, Inlet Side Plumbing Thread Nominal: 1, Outlet Side Connection Type: NPT, Outlet Side Plumbing Thread Nominal: 1, Drain Exhaust: Float switch, Flow Direction: [Right] From Left to Right, Size of Body: 1B, Accessory: Bracket

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Table of Contents

S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light