Model: DP Lube Single Unit, Size: 6 (1B), Thread: N (NPT), Port Size: 10 (1), Accessory: None, Option: S1 [1b (w/o Oil ON)]

NCQ2/CQ2

Stroke S1 170.5 (180.5) + Stroke S1 186.5 (196.5) + Stroke S1 189 (199) + Stroke S1 196 (206) + Stroke S1 214.5 (224.5) + Stroke S1 235.5 (245.5) + Stroke S1 32 230.5 108 133 115.5 140.5 55 to 100 255.5 280.5 7 5 to 100 40 296.5 271.5 114.5 139.5 125 150 55 to 100 246.5 7 5 to 100 Mounting and Auto Switches Made to Order 50 115.5 140.5 125.5 150.5 55 to 100 249 299 274 8 10 to 100 63 127

Compact Cylinder

186.5 (196.5) + Stroke S1 189 (199) + Stroke S1 196 (206) + Stroke S1 214.5 (224.5) + Stroke S1 235.5 (245.5) + Stroke S1 32 230.5 108 133 115.5 140.5 55 to 100 255.5 280.5 7 5 to 100 40 246.5 114.5 139.5 125 150 55 to 100 271.5 296.5 7 5 to 100 50 249 115.5 140.5 125.5 150.5 55 to 100 274 299 8 10 to 100 63 256 121 146 127 152 55 to 100 281 306 8 10 to 100 80 274.5 128.5 153.5 136 161 55

High Vacuum Angle Valve

Seal material FKM EPDM Barrel Perfluoro Symbol Nil N1 P1 Q1 R1 R2 R3 S1 T1 U1 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 XVD 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation. Note 2) Refer to parts number of Construction on page 418 for changed part. Number indicates parts number of Construction accordingly.

JXCx-OMT0023

] CMX CDV = 0 10 S = 0 10 1/n Pb = 10 10-3 10 1/2 10 = 20 1 Hence, set 20 to CMX and 1 to CDV.

Made to Order

10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22 24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16

Aluminum High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Vacuum Module Series ZX

Vacuum switch (E) (D) E P F D Nil Model ZX1 K3 Adsorption confirmation switch (P) Vacuum switch (ZSE2) ZX1-K3-E (Release to atmospheric pressure) Pressure sensor Spacer 1 (ZX1-S1) (For side mounting) 99.6 Port exhaust Rc 1/8 EXH port (EXH.) 29.2 Filter unit (F) 22.7 1 SMC SMC SMC SMC 21.6 10 20 41 51 Without switch and filter 2 x R1.8 (Mounting hole) 1 10 3.6 41.6 19 17.6 (Mounting hole

Metal Seal/Rubber Seal Series VQ Body Ported

Purchasing order is available in units of 10 pieces. 2-4-111 2-4-112

1

13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 58 64 83 93 112 120

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Stainless steel is used for size 10 only. 97 Series CRBU2WU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type CRBU2WU10, 15, 20, 30-S 2 x S2 2 x S1 2 x S1 2 x S1 Free mounting rotary actuator A port B port 2 x R Angle adjuster Cap Figures above show actuators for 90 and 180 when B port is pressurized,and they show size 20 actuators.

Electric Actuator

Special cap bolt Double Clevis CD hole H10 axis d9 [mm] Stroke range (mm) A CL CD CT size 10 to 100 160.5 150.5 25 10 5 101 to 200 185.5 175.5 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX 10 to 100 180.5 170.5 32 10 6 0.1 0.3 CZ 101 to 200 210.5 200.5 Stroke range (mm) CW CX CZ L RR CU size 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 Material:

LEC-OM071xx

List of Parameters.10-2 10.1 List of Parameters.10-2 10.1.1 Utility Functions.10-2 10.1.2 Parameters.10-3 10.1.3 MECHATROLINK-III Common Parameters.10-37 10.2 Parameter Recording Table.10-45 1.

SV

SS5V2-10 SS5V3-10 SS5V4-10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-10 3 pcs.

Electric Actuator

to 500 10 LEFS16 100 to 400 10 4 5 to 250 5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (

CRBU

Model A C B D E(g6) F(h9) G J R S1 K S2 L T M N P U H Q1 V W X M5 X 0.8 M3 X 0.5 10.5 10.5 11 10 11.5 11 14 13 12 13 15.5 14 CRBUW15-lD CRBUW15-lDE CRBUW20-lD CRBUW20-lDE CRBUW30-lD CRBUW30-lDE -0.004 -0.012 0 -0.043 34 9 25 18 15.5 M3 X 0.5 6 3.5 10 M3 X 0.5 0.5 21 1.5 29 3 29 36 48 5 12 -0.004 -0.012 0 -0.043 6 14 34.5 42 10 20 17 M4 X 0.7 M5 X 0.8 7 4.5 10 M4 X 0.7 0.5 26 1.5 36 4 36 44

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

Series SV

General purpose Each T unit has 32 control points. 16 outputs 24VDC 10% External power supply A, B, D, E, F1, G, J1, J2, K, R1, R2, H, U, V Current consumption (Inside unit) 0.1A 0.3A C, Q SI manifold solenoid valve T unit OB unit SI unit SI unit Master unit Remote I/O unit Remote I/O unit S1 S2 SG S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG SDA SDB RDA RDB SG FG

Electric Actuator

50 60 70 80 10 20 Work load [kg] Work load [kg] LEJS63/Ball Screw Drive: Vertical LEJS63;A LEJS63;B 20 Duty ratio: 50% 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 15000 15000 10 10 Duty ratio: 75% Duty ratio: 75% 5000 5000 0 0 0 10 2.5 5 7.5 0 20 15 5 10 Work load [kg] Work load [kg] LEJB40/Belt Drive: Horizontal LEJB63/Belt Drive: Horizontal 20