AIR COMBINATION

*-A AR30-A AFM30-A AL30-A AR30-A AFM30-A AL30-A AR30-A AF40-A AF40-A AW40-A AF40-A AW40-A AC40*-A AR40-A AFM40-A AL40-A AR40-A AFM40-A AL40-A AR40-A AF40-06-A AF40-06-A AW40-06-A AF40-06-A AW40-06-A AC40*-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A 10 Option / Semi-standard : Select one each for a to m.

modular-press-e

AD27-6C C4SF-6J C2SF-6J C3SF-6J C3SF-6W C4SF-6W C2SF-6CJ C4SF-2 C1SF-2 C2SF-2 C3SF-2 AD47-2 AD17-2 AD27-2 AD37-2 Metal AD48-2 AD38-2 C4SF-2J C2SF-2J C3SF-2J C4LF-8 C3LF-8 Metal bowl with level gauge AD47-8 AD37-8 AD48-8 AD38-8 C4LF-8J C3LF-8J Note 6) Assembly of a bracket and 2 mounting screws Note 7) Please consult SMC regarding the set nuts for the AW60(K).

Modular F.R.L. Pressure Control Equipment

AD27-6C C4SF-6J C2SF-6J C3SF-6J C3SF-6W C4SF-6W C2SF-6CJ C4SF-2 C1SF-2 C2SF-2 C3SF-2 AD47-2 AD17-2 AD27-2 AD37-2 Metal AD48-2 AD38-2 C4SF-2J C2SF-2J C3SF-2J C4LF-8 C3LF-8 Metal bowl with level gauge AD47-8 AD37-8 AD48-8 AD38-8 C4LF-8J C3LF-8J Note 6) Assembly of a bracket and 2 mounting screws Note 7) Please consult SMC regarding the set nuts for the AW60(K).

HRX-OM-S004

. 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100/150-W-20/40/46. 8-11 8.4 Cooling capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity

HRX-OM-R026

. 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Drain of the circulating fluid . 8-7 8.4.2 Drain of the facility water . 8-9 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRSH090-A-20. 9-1 9.1.2 HRSH090-A-40. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2 Outline dimensions . 9-7 9.2.1 HRSH090

HRX-OM-T002

7 8.3 Consumables . 8-7 8.4 Operation Stop for an Extended Period of Time . 8-8 8.4.1 Discharge of the circulating fluid . 8-8 8.4.2 Discharge of the facility water (Water-cooled type) . 8-10 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRS090-A-20. 9-1 9.1.2 HRS090-A-40. 9-2 9.1.3 HRS090-A-46. 9-3 9.1.4 HRS090-W-20. 9-4 9.1.5 HRS090-W-40. 9-5 9.1.6 HRS090-W-46. 9-6 9.1.7 Refrigerant

HRX-OM-W032

Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRS200-A-46-S . 8-1 8.1.2 Refrigerant with GWP reference . 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.3 Flow Diagram . 8-4 8.4 Cooling Capacity . 8-5 8.5 Pump Capacity . 8-5 8.6 Types of Hazard Labels . 8-6 8.6.1 Positions of danger warning label . 8-7 8.7 Standards . 8-8 8.8 Sample DoC. . 8-9 8.9 Daily Check Sheet .

HRX-OM-Q026

GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250/300-A-20-, HRSH250/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40

Air Combination

Part name Main material AC50(A,B)-D AC20(A,B,C,D)-D AC30(A,B,C,D)-D AC40(A,B,C,D)-D AC40(A,B,C,D)-06-D AC60(A,B)-D (1) Seal HNBR Y220P-050S Y320P-050S Y420P-050S Y520P-050S Y620P-050S Note 1) The number in the table and structural drawing is consistent with the number in [8. How to Replace the Products] (P23) and [9. Disassembly Drawing] (P24).

rep-modular-e

8 !0 #7 !6 e !2 #3 i #0 !7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 !0 #7 !6 e !2 #3 i #0 !7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Air Cylinder Series MB

8 !4 !1 !6 !3 r !5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !

AIR COMBINATION

AC30*-B AR30-B AFM30-A AL30-A AR30-B AFM30-A AL30-A AR30-B AF40-A AF40-A AW40-B AF40-A AW40-B AC40*-B AR40-B AFM40-A AL40-A AR40-B AFM40-A AL40-A AR40-B AF40-06-A AF40-06-A AW40-06-B AF40-06-A AW40-06-B AC40*-06-B AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AF50-A AW60-B AF50-A AC50*-B AR50-B AL50-A AR50-B AL50-A AF60-A AF60-A AC55*-B AR50

Standard Combinations

Standard Combinations Components Regulator with Built-in Pressure Gauge ARG Filter Regulator with Built-in Pressure Gauge AWG Combination Model Port size Air filter AF Lubricator AL Mist separator AFM AF + ARG + AL ACG20 ARG20 AF20 AL20 1/8, 1/4 ACG30 ARG30 AF30 AL30 1/4, 3/8 ACG40 ARG40 AF40 AL40 1/4, 3/8, 1/2 AWG + AL ACG20A AWG20 AL20 1/8, 1/4 AWG30 ACG30A AL30 1/4, 3/8 AWG40 ACG40A AL40

10

B A B A B A B A B A B A B A B A B A B 32 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 5.5 3.5 3.5 1 40 10.5 8 6.5 4 7 4.5 12 9.5 0.5 0 4.5 2 0.5 0 4 1.5 6 3.5 3.5 1 50 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 63 11 8.5 7 4.5 7.5 5 12.5 10 1 0 5 2.5 1 0 4.5 2 6.5 4 4 1.5 80 14 12.5 10 8.5 10.5 9 15.5 14 4 2.5 8 6.5 4 2.5 7.5 6 9.5 8 7 5.5 100 14 12.5 10 8.5 10.5 9 15.5

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

HRX-OM-Y098

-20 . 8-6 8.4 Cooling Capacity . 8-7 8.4.1 HRL100-A-20 CH1 . 8-7 8.4.2 HRL200-A-20 CH1 . 8-7 8.4.3 HRL300-A-20 CH1 . 8-8 8.4.4 HRL100/200/300-A-20 CH2 . 8-8 8.5 Pump Capacity . 8-9 8.5.1 HRL100-A-20 CH1 . 8-9 8.5.2 HRL200-A-20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13

HRX-OM-W060

7.4.1 Replacing Particle Filters . 7-8 7.4.2 Replacing the DI filter . 7-8 7.4.3 Consumables . 7-10 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRL100/200/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A

HRX-OM-X037

HRL100-A-40 . 9-6 9.2.2 HRL200-A-40 . 9-7 9.2.3 HRL300-A-40 . 9-8 9.2.4 HRL100/200-W-40 . 9-9 9.3 Flow Diagram . 9-10 9.3.1 HRL-A-40. 9-10 9.3.1 HRL-W-40. 9-11 9.4 Cooling Capacity . 9-12 9.4.1 HRL100A40 CH1 . 9-12 9.4.2 HRL200A40 CH1 . 9-12 9.4.3 HRL300-A-40 CH1 . 9-13 9.4.4 HRL100/200/300-A-40 CH2 . 9-13 9.4.5 HRL100-A-40-T2 CH1 . 9-14 9.4.6 HRL200-A-40-T2 CH2 . 9-14 9.4.7 HRL300-A-40-

DOC1001322

Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRS400-A-46. 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.3 Flow Diagram . 8-4 8.4 Cooling Capacity . 8-5 8.5 Pump Capacity . 8-5 8.6 Types of Hazard Labels . 8-6 8.6.1 Positions of danger warning label . 8-7 8.7 Standards . 8-8 8.8 Daily Check Sheet . 8-9 Chapter 9 Product Warranty