AIR COMBINATION

*-A AR30-A AFM30-A AL30-A AR30-A AFM30-A AL30-A AR30-A AF40-A AF40-A AW40-A AF40-A AW40-A AC40*-A AR40-A AFM40-A AL40-A AR40-A AFM40-A AL40-A AR40-A AF40-06-A AF40-06-A AW40-06-A AF40-06-A AW40-06-A AC40*-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A AFM40-06-A AL40-06-A AR40-06-A 10 Option / Semi-standard : Select one each for a to m.

modular-press-e

AD27-6C C4SF-6J C2SF-6J C3SF-6J C3SF-6W C4SF-6W C2SF-6CJ C4SF-2 C1SF-2 C2SF-2 C3SF-2 AD47-2 AD17-2 AD27-2 AD37-2 Metal AD48-2 AD38-2 C4SF-2J C2SF-2J C3SF-2J C4LF-8 C3LF-8 Metal bowl with level gauge AD47-8 AD37-8 AD48-8 AD38-8 C4LF-8J C3LF-8J Note 6) Assembly of a bracket and 2 mounting screws Note 7) Please consult SMC regarding the set nuts for the AW60(K).

Modular F.R.L. Pressure Control Equipment

AD27-6C C4SF-6J C2SF-6J C3SF-6J C3SF-6W C4SF-6W C2SF-6CJ C4SF-2 C1SF-2 C2SF-2 C3SF-2 AD47-2 AD17-2 AD27-2 AD37-2 Metal AD48-2 AD38-2 C4SF-2J C2SF-2J C3SF-2J C4LF-8 C3LF-8 Metal bowl with level gauge AD47-8 AD37-8 AD48-8 AD38-8 C4LF-8J C3LF-8J Note 6) Assembly of a bracket and 2 mounting screws Note 7) Please consult SMC regarding the set nuts for the AW60(K).

HRX-OM-S004

. 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100/150-W-20/40/46. 8-11 8.4 Cooling capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity

HRX-OM-R026

. 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Drain of the circulating fluid . 8-7 8.4.2 Drain of the facility water . 8-9 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRSH090-A-20. 9-1 9.1.2 HRSH090-A-40. 9-2 9.1.3 HRSH090-W-20. 9-3 9.1.4 HRSH090-W-40. 9-4 9.1.5 Refrigerant with GWP reference . 9-5 9.1.6 Communication specification . 9-6 9.2 Outline dimensions . 9-7 9.2.1 HRSH090

HRX-OM-T002

7 8.3 Consumables . 8-7 8.4 Operation Stop for an Extended Period of Time . 8-8 8.4.1 Discharge of the circulating fluid . 8-8 8.4.2 Discharge of the facility water (Water-cooled type) . 8-10 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRS090-A-20. 9-1 9.1.2 HRS090-A-40. 9-2 9.1.3 HRS090-A-46. 9-3 9.1.4 HRS090-W-20. 9-4 9.1.5 HRS090-W-40. 9-5 9.1.6 HRS090-W-46. 9-6 9.1.7 Refrigerant

HRX-OM-W032

Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRS200-A-46-S . 8-1 8.1.2 Refrigerant with GWP reference . 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.3 Flow Diagram . 8-4 8.4 Cooling Capacity . 8-5 8.5 Pump Capacity . 8-5 8.6 Types of Hazard Labels . 8-6 8.6.1 Positions of danger warning label . 8-7 8.7 Standards . 8-8 8.8 Sample DoC. . 8-9 8.9 Daily Check Sheet .

HRX-OM-Q026

GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250/300-A-20-, HRSH250/300-A-40. 8-9 8.2.4 HRSH100/150/200/250-W-20/40. 8-10 8.3 Flow Diagram . 8-11 8.3.1 HRSH-A-20/40. 8-11 8.3.2 HRSH-W-20/40. 8-12 8.4 Cooling Capacity . 8-13 8.4.1 HRSH100-A-20/40. 8-13 8.4.2 HRSH150-A-20/40

Air Combination

Part name Main material AC50(A,B)-D AC20(A,B,C,D)-D AC30(A,B,C,D)-D AC40(A,B,C,D)-D AC40(A,B,C,D)-06-D AC60(A,B)-D (1) Seal HNBR Y220P-050S Y320P-050S Y420P-050S Y520P-050S Y620P-050S Note 1) The number in the table and structural drawing is consistent with the number in [8. How to Replace the Products] (P23) and [9. Disassembly Drawing] (P24).

rep-modular-e

8 !0 #7 !6 e !2 #3 i #0 !7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 !0 #7 !6 e !2 #3 i #0 !7 @7 w !9 q @5 @4 #8 @1 @3 @2 !1 @0 t !3 o @9 @9 @6 #1 !4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ZP

31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-

ZP

31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model ZP2-R3507WK ZP2-R4010WK ZP2-R5010WK ZP2-R6010WK ZP2-R4030WK ZP2-R5030WK ZP2-R6030WK ZP2-R8030WK ZP2-R4020WK ZP2-R5020WK ZP2-

ZP

Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:

Vacuum Pad

Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:

Vacuum Pad

Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:

Vacuum Pad

Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:

AIR COMBINATION

AC30*-B AR30-B AFM30-A AL30-A AR30-B AFM30-A AL30-A AR30-B AF40-A AF40-A AW40-B AF40-A AW40-B AC40*-B AR40-B AFM40-A AL40-A AR40-B AFM40-A AL40-A AR40-B AF40-06-A AF40-06-A AW40-06-B AF40-06-A AW40-06-B AC40*-06-B AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AF50-A AW60-B AF50-A AC50*-B AR50-B AL50-A AR50-B AL50-A AF60-A AF60-A AC55*-B AR50

Standard Combinations

Standard Combinations Components Regulator with Built-in Pressure Gauge ARG Filter Regulator with Built-in Pressure Gauge AWG Combination Model Port size Air filter AF Lubricator AL Mist separator AFM AF + ARG + AL ACG20 ARG20 AF20 AL20 1/8, 1/4 ACG30 ARG30 AF30 AL30 1/4, 3/8 ACG40 ARG40 AF40 AL40 1/4, 3/8, 1/2 AWG + AL ACG20A AWG20 AL20 1/8, 1/4 AWG30 ACG30A AL30 1/4, 3/8 AWG40 ACG40A AL40

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications (Pitch) 24 P=24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E) port