Air Combination

AC20-D to AC60-D Model AC20-D AC30-D AC40-D AC40-06-D AC50-D AC60-D Air filter [AF] AF20-D AF30-D AF40-D AF40-06-D AF50-D AF60-D Component Regulator [AR] AR20-D AR30-D AR40-D AR40-06-D AR50-D AR60-D Lubricator [AL] AL20-D AL30-D AL40-D AL40-06-D AL50-D AL60-D Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size Note 1) 1/8 [AR] Fluid Air Ambient and fluid temperature

HRX-OM-R026

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRSH Series 3.3Installation 3-25 HRX-OM-R026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

1

35 + 25 (n 2) (n = 2, 3, 4, 5) CJ2 D-A9lV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) CM2 Band mounting CG1 D-H7l/H7lW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) MB D-C7l D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) CA2 D-H7C D-C73C D-C80C 10 15 65 15 + 50(n 2)

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

AIR COMBINATION

AC30*-B AR30-B AFM30-A AL30-A AR30-B AFM30-A AL30-A AR30-B AF40-A AF40-A AW40-B AF40-A AW40-B AC40*-B AR40-B AFM40-A AL40-A AR40-B AFM40-A AL40-A AR40-B AF40-06-A AF40-06-A AW40-06-B AF40-06-A AW40-06-B AC40*-06-B AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AFM40-06-A AL40-06-A AR40-06-B AF50-A AW60-B AF50-A AC50*-B AR50-B AL50-A AR50-B AL50-A AF60-A AF60-A AC55*-B AR50

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

LUBRICATOR

SPECIFICATIONS Model AL10-A AL20-A AL30-A AL40-A AL40-06-A AL50-A AL60-A Port size M5 1/81/4 1/43/8 1/43/81/2 3/4 3/41 1 Air Fluid 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure Ambient and fluid temperature -5 60 (Should be no freezing) 1/430 3/840 1/250 15 Min. operating flow Note1) L/min(ANR) 50 1/430 3/840 4 190 220 Bowl capacity cm3 7 25 55 135 Class 1 turbine oil (ISO VG32)

AC20-A to AC40-A

Standard Specifications AC20-A AC25-A AC30-A AC40-A AC40-06-A Model AF40-06-A AR40-06-A AL40-06-A AF40-A AR40-A AL40-A AF30-A AR30-A AL30-A AF30-A AR25-A AL30-A AF20-A AR20-A AL20-A Air filter Regulator Lubricator Component Port size Pressure gauge port size Fluid 3/4 1/8, 1/4 1/4, 3/8 1/8 1/4, 3/8 1/4, 3/8, 1/2 Air 5 to 60C (with no freezing) 1.5 MPa 1.0 MPa 0.05 to 0.7 MPa 5 m Class 1

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

AW

Modular Type Filter Regulators Series AW Filter Regulator Series AW Model Port size Options AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 AW60 3/4, 1 Pages 366 through to 377 Filter Regulator with Backflow Function Series AWK AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket AW40K-06 3/4 Float type auto drain AW60K 3/4, 1 Square embedded type pressure gauge

Modular Type Regulators Series AR

Ambient and fluid temperature (C) 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25 AR40 AR40-06 AR50 1/4, 3/8 AR30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AR60 Model AR20 AR40 AR40-06 AR50 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AR60 Port size 1 Port size 1 30 AR X430 03 BG 30 AR X425 03 BG For high/low temperature Option/Semi-standard: Select one each

HRX-OM-Y120

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers.

DOC1003626

Message frame . 3-7 3.9 Function code . 3-9 3.10 Checksum calculation method . 3-9 3.10.1 LRC(ASCII) . 3-9 3.10.2 CRC(RTU) .3-10 3.11 Explanation of function codes . 3-12 3.11.1 Function code: 04 Reading multiple registers .3-12 3.11.2 Function code: 06 Writing registers.3-13 3.11.3 Function code: 16 Writing multiple registers .3-15 3.12 Negative response . 3-16 3.13 Register map . 3-18

HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

Lubricator Series AL10 to 60

AL Standard Specifications AL30 AL40 AL60 AL10 AL20 AL40-06 AL50 Model 1/4, 3/8 Port size 1/4, 3/8, 1/2 1 M5 x 0.8 1/8, 1/4 3/4 3/4, 1 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa 1/4: 30 3/8: 40 1/2: 50 135 Note) 1/4: 30 3/8: 40 Minimum dripping flow rate (/min (ANR)) 220 4 15 50 190 Oil capacity (cm3) 55 135 7 25 135 135 Recommended lubricant Class 1 turbine oil (

Standard Combinations

Standard Combinations Components Regulator with Built-in Pressure Gauge ARG Filter Regulator with Built-in Pressure Gauge AWG Combination Model Port size Air filter AF Lubricator AL Mist separator AFM AF + ARG + AL ACG20 ARG20 AF20 AL20 1/8, 1/4 ACG30 ARG30 AF30 AL30 1/4, 3/8 ACG40 ARG40 AF40 AL40 1/4, 3/8, 1/2 AWG + AL ACG20A AWG20 AL20 1/8, 1/4 AWG30 ACG30A AL30 1/4, 3/8 AWG40 ACG40A AL40

DOC1001322

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-27 DOC1001322 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Case: [Resin] Polycarbonate Case, Drain Exhaust: -, Case Guard: -, Specification: Applicable part number: AL20-A, AL30-A, AL40-A, AL40-06-A, AL50-A, AL60-A, Type: Sight dome assembly