Air Slide Table

J I Pilot port 2 x M5 x 0.8 5.5 +0.025 0 3H9 ( ) depth 1.5 +0.025 0 3H9 ( ) depth 1.5 4.1 (Maximum screw-in depth) 3.5 23 18.9 2.1 (Minimum screw-in depth) B 14 34 3 21 32 17 B N x M3 x 0.512 F 15 2 x M3 x 0.5 thread depth 5 Cross-sectional view B-B N 2 1 x F 11 20 16 18 M 0.5 Pilot port 2 x M5 x 0.8 (Plug: Width across flats 7) I J 5.5 Bottom view of MXQ6A-30Z Z ZZ (NN 1) x H G H 8.3 5.8

Modular Design with Uniform Body Style

N F A A J M N F S 2 x P1 (Port size) 2 x P1 (Port size) J M R R V2 V1 Q1 Q1 B C C B V2 V1 Q2 Q1 Q1 K K OUT OUT IN IN U U P2 G Clearance for maintenance (Pressure gauge port size) Drain P2 E G Clearance for maintenance (Pressure gauge port size) Drain AC40-D to AC40-06-D A N F S M J R V1 V2 Q2 Q1 Q1 B C OUT IN 2 x P1 (Port size) U P2 E G Clearance for maintenance (Pressure gauge port size)

Table of Contents

CX E A B C D D(mm) -X Model Applicable bore size A B C 12 15 25 D E F G H J M4 x 0.7 M4 x 0.7 M5 x 0.8 A B A B A B MY-S10 MY-S16 MY-S20 43.6 53.6 65.6 75 84 105 131 158 200 236 MY1B10 MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B50 MY1B63 MY1B80 MY1B100 35 43 53 61 70 87 113 136 170 206 21 26 38 3.6 4.9 6.4 3.4 3.4 4.5 6.5 6.5 8 1.8 3 4 20Data A B MY-S25 50 8 5.5 35 M6 x 1 9.5 5 A B MY-S32 64

CRB2/CRBU2/CRB1

CRB1 80 W B S 90 Standard 90 W B S R73 CDRB1 80 With auto switch Number of auto switches S Nil 1 pc.

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

CV/MVGQ

MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data

CV/MVGQ

MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data

Table of Contents

S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

Rotary Actuator/Vane Type

hole to through-hole W, S, J, K, T, Y XC3 Change the screw position W, S, J, K, T, Y XC4 Change the rotation range W, S, J, K, T, Y XC5 Change rotation range between 0 to 200 W, S, J, K, T, Y XC6 Change rotation range between 0 to 110 W, S, J, K, T, Y XC7 Reversed shaft W, J XC30 Fluorine grease W, S, J, K, T, Y X5 For M5 port (90/180) W, S, J, K, T, Y Rotation time adjustment range s/90

Vacuum Pad

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

REA/REB

1 Sine Rodless Cylinder Series REA/REB (Maximum speed: 300 mm/s) (Maximum speed: 600 mm/s) RE A B REC CX CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 Series REA CE2 Series REB ML2B C J G5-S CV MVGQ CC RB J Series

REA/REB

1 Sine Rodless Cylinder Series REA/REB (Maximum speed: 300 mm/s) (Maximum speed: 600 mm/s) RE A B REC CX CY MQQ M RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 Series REA CE2 Series REB ML2B C J G5-S CV MVGQ CC RB J Series REA (300 mm/s) Series REB (600 mm/s) DGuide type Model Page Guide type Model Page -X Direct mount type REBR 10-2-63 Basic type REA 10-2-6 20High precision guide type (Single

Hydraulic

MM FY BB D E e Air release Width across flats G K F MA l C f Air release 10 NA FT A SS NB B SS+ Q + l + Stroke S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod M10 x 1.25 32 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 21.5 15 52 25 to 1400

Made to Order

52 88 14.6 243 319 100 52 88 14.6 243 319 NA S + Stroke (A + B) ZZ + Stroke (A + B) CA2 series GB Stroke B Stroke A (mm) Bore size GB Q S ZZ 40 29 53 168 230 50 33 59 180 249 63 33 61 196 268 80 41 73 232 320 100 41 79 252 341 Q S + Stroke (A + B) ZZ + Stroke (A + B) CNA2 series Stroke A Stroke B GE (mm) Bore size GE S ZZ 40 29 237 299 50 33 258 327 63 33 280 352 80 41 334 422 100 41 372

Table of Contents

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

Table of Contents

G S B + Stroke A + Stroke E For bore sizes 12 and 16, M5 x 0.8 is only available.

Battery-less

With motor cover: LEY16DmE -mC U 35 T S EH A + Stroke B + Stroke L Y X2 Cable length 250 A B C Cable length 350 With lock/motor cover: LEY16DmE -mW X2 Cable length 250 Motor Cover Direction J J D1 D2 J J J J J J 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 30.3 22.2 22.2 30.3 CV Dimensions (Size 16) 30.3 22.2 Motor cover direction CV D1 35.5 D2 35.5 D3 48.3 D4 40.2 22.2

Electric Actuators

(B contact) S N.C. (B contact) Lead screw lead N.C. (B contact) A B 6mm 12mm N.C. (B contact) N.O. (A contact) N.O. (A contact) Stroke N.O. (A contact) 50 75 100 125 150 50mm 75mm 100mm 125mm 150mm Use a driver with CE marking. N.O.

ISO Cylinder

Lubricant Not required (Non-lube) Stroke length tolerance +1.0 0 mm +1.4 0 mm Piston speed 50 to 1500 mm/s Cushion Rubber bumper Allowable kinetic energy 0.02 J 0.03 J 0.04 J 0.09 J 0.27 J 0.4 J Standard Strokes Bore size [mm] Standard stroke [mm]*1 Max. stroke*2 [mm] 8 10, 25, 40, 50, 80, 100 200 10 400 12 400 16 20 1000 25 10, 25, 40, 50, 80, 100, 125, 160 *1 Other strokes are available