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(mm) Effective area (mm2) Nylon Urethane 6.4 13.4 25.6 Note) Weight (g) Model D M2 L Q M1 b D a b KQ2T06-04 KQ2T08-06 KQ2T10-08 6 8 10 4 6 8 10 15 25 4.4 10.6 17.7 12.8 15.2 18.5 16 17 18.5 20 23 26.5 5.3 6 7.5 17 18.5 21 M2 D 12 KQ2T12-10 20.9 28.5 7.5 22 40 28.4 29 10 21 D Note) D: Max. diameter Applicable tubing 8 4.2 M1 Applicable tubing a M1 Cross: KQ2TW Effective area (mm2) Nylon 6.4

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Pitch = 21 Individual vacuum supply port Individual vacuum supply port PV Adapter D Adapter D M5 x 0.8 (or M6) Vacuum pad connection port (V port) M5 x 0.8 (or M6) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) Adsorption nozzle piping port 13-2-57 57 Series ZX Vacuum pad connection V port Vacuum pad connection V port Vacuum Pump System Manifold: Type K1 Common EXH Common

V

(Except for 110VAC) C O I L V O LTA G E With indicator light and surge voltage suppressor. } 3 110VAC 5 24VDC 6 12VDC VVQ0-P-4-C4 I N D I V I D U A L SUP S P A C E R VVQ0-57A-4 DIN R A I L M O U N T E D B R A C K E T [-D] VVQ0-R-4-C4 I N D I V I D U A L EXH S P A C E R ACCESSORIES MANIFOLD OPTIONS 23 04 06 08 01 03 B U I LT I N S I L E N C E R, D I R E C T E X H A U S T [-S] 1 N A M E P L

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-04 SY9140-04 Tubing bore x Length Speed controller Silencer 102 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal Closed center

Speed Controller with Indicator

V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS2ll1FSl-G02 1/4 VNote 4) V V V V AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Compact Hydraulic Cylinder

For details, refer to pages 365 and 367. 207 Series CHmKG How to Mount and Move the Auto Switch Solid state D-M9N(V), D-M9P(V), D-M9B(V) D-M9NW(V), D-M9PW(V), D-M9BW(V) D-M9NA(V)L, D-M9PA(V)L, D-M9BA(V)L Reed D-A90(V), D-A93(V), D-A96(V) Solid state D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) D-Y7BAL Reed D-Z73, D-Z76, D-Z80

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-03 AMD150-03 1.5 0.2 HAA7-06 HAW2-04 AT6C-04 AFF2B-03 IDF2D-1 AM150-03 AMD150-03 2.2 0.3 HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350

Hydraulic Filters

PEND Water-glycol, Emulsion For 2 1/2B, 3B CW-6H-W Phosphoric ester CW-6H-V Petroleum D-73H For 1/2B to 1B Water-glycol, Emulsion D-73H-W Phosphoric ester D-73H-V Petroleum D-74H For 1 1/4B to 2B Cap Water-glycol, Emulsion D-74H-W Phosphoric ester D-74H-V Petroleum D-75H Water-glycol, Emulsion For 2 1/2B, 3B D-75H-W Phosphoric ester D-75H-V 10 Suction Guard Series FHG How to Order FH G 9

A

<28 V DC 50 mA 10-28V DC 0.4V max ON: Red LED Fixing bolt maximum torque NPN 16 & 20 D-F9PL 3 wire Solid State <28 V DC 50mA 10-28V DC 1.5V max ON: Red LED Part Number Torque N:m PNP 25 100 D-Z73L Reed 24 V DC 5-40mA 2.4V max ON: Red LED MY-J16 1.5 MY-J20 1.5 100 V AC 5-20mA 25 100 D-Z80L Reed 24V AC/DC 50mA None MY-J25 3 MY-J32 5 100 V AC/DC 20mA 25 100 D-Y7NWL 3 wire Solid State <28 V DC

AC

AW+AL+V AF+AR+V AF+AFM+AR+V AW+AFM+V AC2001 to AC4001 AC2011 to AC4011 Residual pressure exhaust 3 port valve V AC2021 to AC4021 AC2031 to AC4031 Port size AC2041 to AC4041 01 02 03 04 1/8 1/4 3/8 1/2 Note 5) If indicating more than one symbol, place the desired symbols in alphabetical order.

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

V100

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

Refrigerated Air Dryers Series IDF/IDU

AM150C-02 2.2 18 10.6 AMH250C-03 AMD250C-03 AME250C-03 AMF250C-03 AT6C-04 IDFB4E HAA7-06 AFF4C-03 HAW7-06 AM250C-03 3.7 30 17.7 AMH250C-03 AMD250C-03 AME250C-03 AMF250C-03 AT6C-04 IDFB6E HAA7-06 AFF4C-04 HAW7-06 AM250C-03 5.5 42 24.7 AMH350C-04 AMD350C-04 AME350C-04 AMF350C-04 AT11C-06 IDFB8E HAA15-10 AFF8C-04 HAW22-14 AM350C-04 7.5 60 35.3 AMH350C-04 AMD350C-04 AME350C-04 AMF350C-04 AT11C

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D U D side mounting U side mounting Port size 2 2 stations Symbol 04 06 M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.

Proposals for Energy Saving

suppressor 8 Body ported 5 Body type 5 TS Directional Control Equipment Valve option TZ General Vacuum/Low pressure V Nil V DL DS Port size (IN/OUT port) DZ Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol VP3145 VP3165 VP3185 Optional 03 04 06 10 12 14 20 (10A) 3/8 (15A) 1/2 (20A) 3/4 (25A) 1 03 04 Rated coil voltage 06 10 12 14 20 1 2 3 1 100VAC, 50/60Hz 200VAC, 50/60Hz 110VAC,

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

Fieldbus system EtherCAT compatible SI Unit

mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V +0.00 to +10.19 V +0.05 to +10.24 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V +0.00 to +5.09 V +0.03 to +5.12 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.09 V +0.78 to +5.12 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA +0.00 to +20.90 mA +0.10 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA +3.00 to

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

type> (Lead wire length) 75.4 [82.4] Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 73.6 34.5 15.5 17.5 29.5 29.5 44.5 [1(P), 5(EA), 3(EB) port] 3/8, 1/2 96.5 L plug connector (L): M plug connector (M): DIN terminal (D, Y): 10-SY9140(R)-WO03 04 M8 connector (WO): D Y 10-SY9140(R)10-SY9140(R)-M10-SY9140(R)-L03 04 03 04 03 04