Soft Start-up Valve

needle at low speed air supply D D 2 x W 4 x W Y V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24 63 AV4000-m04-1 to 6D/Y(Z)m-A 1/2 1/2 1/2 98 107 56 39.5 52 106 49 Width

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

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SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J A Z 2 2 x K T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) X R S W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M Z VHS2510 VHS3510 VHS4510 VHS4510-06 VHS5510 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9

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Dimensions and the most sensitive positions are same as the conventional types. s D-M9N (s-vvire, NPN output) M-F9N -^ D-W9P *8 c-"*t"*r D-FQB 17 D-MgN D-MgP Nwtypes D-MgB nil;'Y,r dCl D-MgP (3-wke, PNP output) D-MgB (2-wire) Range of load 5 t o wire:4 timesrn" New types tr{lur$ D-FgB 5 to 40mA D.M9B 2.5 to 40mn lead wire is available as siandard. 41ime6 more bl f e x b e Indicator Light:

Silencer Series AN

Temperature 5~60C / 40~140F H O W T O O R D E R SERIES NAN SILENCER Model Port Size* NPT Effective Orifice mm2 (Cv) D I M E N S I O N S SERIES NAN SILENCER NAN200-N02 14 35 (1.9) NAN300-N03 38 60 (3.3) Dimensions (mm) Model NAN400-N04 12 90 (5.0) A B D NAN500-N06 34 160 (8.8 NAN200-N02 63 22 19 NAN600-N10 1 270 (15) NAN300-N03 84 25 22 NAN700-N12 114 440 (24) NAN400-N04 92 30 27 NAN800-N14

20

KNH-R02-100 KNH-R02-150 KNH-R02-200 1 1.5 2 R1/4 14 52 46 D H1 A L1 Reference dimensions after R thread installation Low noise nozzle with male thread: KNS (mm) thread L1 A Width across flats H1 D Connection Nozzle size Part no.

VM

D.

Soft Start-up Valve AV2000/3000/4000/5000 1

D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4

smcmaintenancepartslist

extension type) 12 MGP12-Z-PS MGP12-Z-XC8-PS 16 MGP16-Z-PS MGP16-Z-XC8-PS 20 MGP20-Z-PS MGP20-Z-PS MGP20-Z-XC8-PS 25 MGP25-Z-PS MGP25-Z-PS MGP25-Z-XC8-PS 32 MGP32-Z-PS MGP32-Z-PS MGP32-Z-XC8-PS 40 MGP40-Z-PS MGP40-Z-PS MGP40-Z-XC8-PS 50 MGP50-Z-XC4-PS MGP50-Z-XC6-PS MGP50-Z-XC8-PS 63 MGP63-Z-XC4-PS MGP63-Z-XC6-PS MGP63-Z-XC8-PS 80 MGP80-Z-XC4-PS MGP80-Z-XC6-PS MGP80-Z-XC8-PS 100 MGP100

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

AW

J C 2 A E EE D DD With Auto Drain PANEL FITTING IN OUT Z CC AA K L V U X W T S Y Q F H Bracket and Mounting Nut (Optional) IN OUT J C 2 A E D DD 7 Series AR20~40 Regulator How To Order AR 20 N 02 B Y Z X48 Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Handle Orientation Symbol Nil Y Description

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

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(metric) spaEleyonamanr'od Manifold D-sub Connector .

Table of Contents

C D E F Dimensions Part no.

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

F

E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Pressure Relief 3 Port Valve With Locking Holes

VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(

Tamper Proof and Flat Head Screw

M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 01 02 03 04 U10/32 N01 N02 N03 N04 SMC Pneumatics, Inc. 17 Series ASIII1F-T Dimensions (mm) 1in=25.4mm L5 D3 Elbow type H (width across flats) Applicable tubing O.D. d A L4 D1 L3 M1 D2 T L1 L2 Metric sizes Inch sizes A d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 Model d D1 Model T H D2 D3 L1 L2