PSxx-OMM0002CN

Mpa A 0.8[V]3.2[mA] -51No.PS-OMM0002CN-F Z/ISE80(F)-02/N02/F02/C01/A2/B2/-* 5 4 5 -C01Rc1/8 -F02G1/4 -B2TSJ1/4 -A2URJ1/4 -52No.PS-OMM0002CN-F Z/ISE80(F)-02L/N02L/C01L/A2L/B2L/-* 4 5 5 -C01LRc1/8 -A2LURJ1/4 -B2LTSJ1/4 -53No.PS-OMM0002CN-F () ZS-24-A A () ZS-24-D A -54No.PS-OMM0002CN-F () ZS-35-A -55No.PS-OMM0002CN-F ZS-35-C 36 x n +4 x (n -1) -56No.PS-OMM0002CN-F ZS-35-B 36

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t a o l F n o i t p i r c s e D 2 ~ 1 0 1 4 S I y t i c a p a C W 5 1 : C D , A V 5 1 : C A

PSxx-OMU0008CN

TSJ Tube Swage Joint Swagelok URJ Union Ring Joint VCR ONOFF () (35 ) ON OFF 35 76 76 ON OFF Hysteresis / () () 25[]ON-OFF () -12No.PS-OMU0008CN-D NPN () () ()()() () ON ON 0 (1k1MA/D 5 V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005 V ) 35 ON-OFF ON () (P1LP1H)ON (35 ) () digit () 0 -13No.PS-OMU0008CN-D () SI ONOFF ON-OFF / ON/OFF 90% () () () () ON -14No.PS-OMU0008CN-D

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

(With NPN output) ZSE80 ISE80 Residual voltage 1 V or less (With load current of 80 mA) PS Response time 1 s (0.25, 0.5, 2, 3s selections) Short circuit protection Yes ISA3 1% F.S.

VM

D.

PSxx-OMV0008CN

(Er1,2) () ( ) (Er1,2) (Er0,4,6,7,8,9) DC1230 V DC1230 V (Er0,4,6,7,8,9) 6 HHH (HHH) LLL (Er3) (LLL) (Er3) 7 F.S.(3.5F.S.) DC1230 V DC1230 V DC(+) DC(-) 7 -80No.PS-OMV0008CN-E No.

PSxx-OMV0003CN

(Er1,2) () ( ) (Er1,2) (Er0,4,6,7,8,9) DC1230 V DC1230 V (Er0,4,6,7,8,9 ) 6 "HHH" (HHH) "LLL" (Er3) (LLL) (Er3) 7 F.S.(3.5F.S.) DC1230 V DC1230 V DC(+) DC(-) 7 -76No.PS-OMV0003CN-G No.

PFxx-OMJ0005CN

NPN(1 )(15 V) PFM7--CNPN(1 )(420 mA) PFM7--DDC(+) OUT1 DC(-) Max.28 V80 mA 1 V C15 V 1 k D420 mA 600 50 NPN(1 ) PFM7--GDC(+) OUT1 DC(-) Max.28 V80 mA 1 V ()30 ms -18No.PF-OMJ0005CN-I PNP(2 ) PFM7--BDC(+) OUT1 OUT2 DC(-) Max.80 mA 1.5 V PNP(1 )(15 V) PFM7--EPNP(1 )(420 mA) PFM7--FDC(+) OUT1 DC(-) Max.80 mA 1.5 V E15 V 1 k F420 mA 600 50 PNP(1 ) PFM7--HDC(+) OUT1 DC(-) Max.80 mA

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

Secondary Batteries

*Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900, D-Y7BW(V)L-900, D-Y7BW(V)SDPC-900 and D-Z80L-900. *The auto switch is shipped together but not assembled.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .

Vacuum System Peripherals:

Port size Rc Model M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V M V VX2110 VX2112 N.C. N.O. VX2120 VX2122 N.C. N.O. VX2220 VX2 N.C. N.O. VX2320 VX2322 N.C. N.O. VX2130 VX2132 N.C. N.O. VX2230 VX2232 N.C. N.O. VX2330 VX2332 N.C. N.O. VX2240 VX2242 N.C. N.O. VX2340 VX2342 N.C. N.C.

•

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

F

E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

ITV

x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit.

Compact and Lightweight

ZA A B t 2 x D ZX C ZM ZL ZH ZH ZH ZH -X267 ZH13 to 20DA 2 x D B ZHP A F E C ZU VQD-V Long clamping screw set for 1 station required for assembly needs to be ordered separately.

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

ISE70/75/75H

Maximum 30 V (NPN only), 80 mA, Residual voltage 1 V or less See the operation manual for information on how to set and on handling precautions. Output -43 Output -65 DC (+) DC (+) (Brown) (Brown) N.C.

Process Pump

D-DN