CV/MVGQ

3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

CNA

8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to

CNA

8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to

CNA

One) ZZ (Both) Bore (mm) Stroke range (mm) 40 50 63 80 100 Bore (mm) 40 50 63 80 100 MXU K KA M MM N P Q H S T V W ZZ d e f h l 6 7 7 11 11 14 18 18 22 26 11 11 14 17 17 M14 X 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 37 to 39.5 51 58 58 71 72 153 168 182 218 246 37.5 44 52.5 59.5 69.5 9 11 12 15 15 8 0 0 0 0 255 284 298 360 390 52 58 58 80 80 43 52 52 65 65 15 15 17.5 21.5 21.5 59 66 66 80

Cylinder with Lock

40 50 63 80 100 Bore size (mm) Stroke range (mm) 40 50 63 80 100 d l J K KA M MM N P S T V ZZ e f h ZZ 52 6 14 11 M14 x 1.5 27 1/4 153 37.5 9 215 20 to 800 43 15 59 1/4 stroke 223 M8 x 1.25 58 7 18 11 M18 x 1.5 30 3/8 168 44 11 237 20 to 1000 52 15 66 1/4 stroke 245 M8 x 1.25 58 7 18 14 M18 x 1.5 31 3/8 182 52.5 12 254 20 to 1000 52 17.5 66 1/4 stroke 262 M10 x 1.25 10 22 17 M22 x 1.5 37

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PL PW S FV FD FT FX FY FZ Without rod boot With rod boot H ZZ d* e* f h l ZZ 40 11 M14 x 1.5 27 1/4 42 11 20 45 153 60 9 12 80 42 100 51 215 52 43 15 59 1/4 stroke 223 50 11 M18 x 1.5 30 3/8 46 10 21 50 168 70 9 12 90 50 110 58 237 58 52 15 66 1/4 stroke 245 63 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 86 11.5 15 105 59 130 58 254 58 52 17.5 66 1/4 stroke 262 80 17 M22 x 1.5 37 1/2 55 15 23

Table of Contents

0 @1 -X #4 #1 20@7 #2 Data @3 #3 #7 #6 @6 !

Magnetically Coupled Rodless Cylinder

40 2 3.

Brake mechanism added

4 3 2 1 699

Basic type / Direct mount type Series CY3B/CY3R

3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa)

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: -, External Scale Plate: -, LCD Window: -, Connection, Air - Electric: -, ATEX Temperature: -

7ND9071en

[6 mm or 1/4" (x)] 1.2* 2.1* 2C 1.08 66 3/8 10 mm or 3/8" 2.4 3.0 3C 2.18 133 3/8 10 mm or 3/8" 4.8 5.2 4C 4.34 265 3/8 10 mm or 3/8" 3.2 3.7 5C 8.7 531 3/8 10 mm or 3/8" 7.5 11.0 6C 17.5 1068 3/4 10 mm or 3/8" 12.0 20.0 Air supply piping 10 mm or 3/8" for all actuators.

Air Cylinder

H ZZ d e f h L ZZ (mm) (mm) 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 51 58 58 71 72 146 159 170 204 215 52 58 58 80 80 43 52 52 65 65 15 15 59 66 66 80 81 154 167 178 213 224 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 17.5 21.5 21.5 116 126 100 Long

Smooth Cylinder/Low Speed Cylinder

Installed state New Shortened installation width Reduced width for short pitch mounting (mm) Compact foot type width A (mm) New New Existing foot type width B (mm) Bore size (mm) 1 unit 2 units 3 units 12 16 20 25 32 40 50 63 80 100 19 38 57 25 44 19 38 57 29 48 26 52 78 36 62 26 52 78 40 66 26 52 78 45 71 Existing model 26 52 78 52 78 31 62 93 64 95 36 72 108 77 113 42 84 126 98 140 45 90

5

Installed state Shortened installation width Reduced width for short pitch mounting (mm) Compact foot type width A (mm) Current foot type width B (mm) Bore size (mm) 1 unit 2 units 3 units 12 16 20 25 32 40 50 63 80 100 25 44 19 38 57 29 48 19 38 57 36 62 26 52 78 40 66 26 52 78 A 45 71 26 52 78 Current model 52 78 26 52 78 64 95 31 62 93 77 113 36 72 108 98 140 42 84 126 117 162 45 90 135

1

121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.

CV/MVGQ

3 !4 !5 !6 !7 !8 !

CV/MVGQ

MQQ M RHC 3.

AC Servo Motor Driver (Pulse input type/Positioning type ）

time function . 3-49 3.7.3 Vertical axis freefall prevention function . 3-50 3.7.4 Residual risks of the forced stop function (EM2) . 3-50 3.8 Alarm occurrence timing chart . 3-51 3.8.1 When you use the forced stop deceleration function . 3-51 3.8.2 When you do not use the forced stop deceleration function . 3-52 3.9 Interfaces . 3-53 3.9.1 Internal connection diagram . 3-53 1 - 3.9.2 Detailed