5

Installed state Shortened installation width Reduced width for short pitch mounting (mm) Compact foot type width A (mm) Current foot type width B (mm) Bore size (mm) 1 unit 2 units 3 units 12 16 20 25 32 40 50 63 80 100 25 44 19 38 57 29 48 19 38 57 36 62 26 52 78 40 66 26 52 78 A 45 71 26 52 78 Current model 52 78 26 52 78 64 95 31 62 93 77 113 36 72 108 98 140 42 84 126 117 162 45 90 135

1

121 5 147 21 48 8 58 3 138 6 NCA 170 26 59 9 66 3 158 8 170 26 9 3 72 66 158 10 DOther dimensions are the same as double acting, single rod, standard type.

Vacuum Pad

Dimensions: Pad Unit ZP3-015U;[Weight: 0.1 g] ZP3-02U;[Weight: 0.1 g] ZP3-035U;[Weight: 0.1 g] Flat 3 3 2 3 2 2 1.5 1.5 1.5 0.5 1 1 0.5 1 0.5 3 3 3 0.8 0.8 0.8 0.3 0.3 0.3 2 1.5 3.5 2 4 2.5 ZP3-04UM;[Weight: 0.3 g] ZP3-06UM;[Weight: 0.3 g] ZP3-08UM;[Weight: 0.3 g] Flat with groove 7 7 7 5 5 5 3 3 3 2 1.5 2 1.5 2 1.5 6 6 6 1.2 2 2 0.8 0.8 0.5 4 8 6 6.5 8.5 4.5 1 Pad Unit Series ZP3 Dimensions

Table of Contents

IFW520 125 VAC 10 to 20 25 1.5 or less 5 5 1.5 0.7 4 4 2.5 1.3 IFW550 250 VAC 20 to 50 60 3 or less 5 5 1 0.5 4 4 1.5 0.8 Note) Hysteresis is the flow rate that is necessary for moving the microswitch from the operation position (ON signal) to the return position (OFF signal). 8 VDC 7 5 3 3 5 4 3 3 5 5 3 3 4 4 3 3 14 VDC 30 VDC 5 5 3 3 4 4 3 3 125 VDC 0.4 0.4 0.1 0.1 0.4 0.4 0.1 0.1 250 VDC

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

Applicable Auto Switch Model

D-J7 11 50 11 55 3 wire 2 wire 13 57 9 49 D-Z7 D-Z8 Solid state switch D-F7 4 wire 3 wire 13 56 10 55 2 wire 1 D-J79C 13 52 9 50 3 wire color 10 53 D-Yl 2 wire 2 11 54 3 wire color 11 54 2 wire 14 53 D-M5 Solid state switch 3 wire 16 60 D-Y7BA 54 1 2 wire 6 31 color 3 wire 7 37 D-F9l 2 2 wire 7 32 color 3 wire 7 34 D-F9BA 37 5.3-75

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Hs Hw 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 4.5 (1.5) 4.5 (1.5) 9 (5) 12 (7.5) 14 (10) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 3 (0) 3 (0) 7.5 (3.5) 10.5 (6) 12.5 (8.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 5 (2) 5 (2) 9.5 (5.5) 12.5 (8) 14.5 7.5 8.5 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5

EXxx-OMU0020CN

SI 2 2.5mm) = 0.6 Nm O . 3-2 IP65O 3.1.2. SI 1 x 2 x ( 2.5mm = 1.3 Nm) . 3-3 IP65 14 No.EX-OMU0020CN 3.2.

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa)

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: -, External Scale Plate: -, LCD Window: -, Connection, Air - Electric: -, ATEX Temperature: -

CY1F

Refer to page 30 and 31 for detailed selection procedures. 3 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 2 CY1F/M2 1 CY1F/M1 3 CY1F/M3 30 30 30 CY1F25 20 20 20 CY1F25 CY1F25 10 10 10 5 5 5 Moment Nm Moment Nm Moment Nm 4 4 4 CY1F15 3 3 3 CY1F10 2 2 2 CY1F15 CY1F15 CY1F10 CY1F10 1 1 1 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston

Solid State Auto Switches

pin 4 pin 1 pin 2 pin 3 pin 4 pin OUT () DC 2-wire type Brown OUT (+) Blue OUT () OUT ( ) DC 2-wire, Non-polar type Blue Brown Diagnostic output OUT DC 3-wire type Brown Black DC (+) Blue DC () OUT DC 4-wire type Brown Black DC (+) Blue Orange DC () Connector Specifications M8-3 pin Connector model M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 1 2 Pin arrangement 3 4 4 3 3 JIS C 4524, JIS C 4525

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: None (Standard), External Scale Plate: None, LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: D (Fork Lever-type Fitting S), External Scale Plate: H (w/External Scale Plate), LCD Window: W (Body w/LCD Window), Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: 101 (Smart Rotary Type), Pressure Gauge: 3 (1.0 MPa), Accessories: C (Fork Lever-type Fitting M), External Scale Plate: H (w/External Scale Plate), LCD Window: None, Connection, Air - Electric: 3 (NPT1/4 - NPT1/2)

Type: Smart Rotary Type, Pressure Gauge: 1.0 MPa, Accessories: Fork Lever-type Fitting M, External Scale Plate: w/External Scale Plate, LCD Window: None, Connection, Air - Electric: NPT1/4 - NPT1/2, ATEX Temperature: -

Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: S, Lever unit: N/A, External scale plate: Available, Body cover with window for LCD: Available, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: ATEX

Type: Relay Device, Type: Smart rotary type, Specification: With Intrinsically safe explosion-proof (ATEX) + Output function + HART communication function, Pressure(MPa): 1.0, Fork lever type fitting: N/A, Lever unit: N/A, External scale plate: N/A, Body cover with window for LCD: Available, Air connection port: 1/4NPT, Conduit connection port: 1/2NPT, Explosion-proof structure: ATEX Directive