5-Port Solenoid Valve

2 1.5 m 3 3 m (L2l) *1 The SY5000 manifold base is used for the bottom-ported SY3000.

240

Only 1.5 m cables usable with open collector. 3 For the LECPMJ, only Nil, S and T are selectable since I/O cable is not included.

SFOD-OMT0010

[mm] 30 20 10 Stroke [mm] 1200 1000 1100 1200 1000 1100 1200 Max. speed [mm/s] 500 500 410 340 250 200 170 Min. speed [mm/s] 30 20 10 (Independent and interpolation) Min. speed [mm/s] 49 33 17 (Speed tuning control) Supplement 1.3 Initial setting of LES(H) series Model LES(H)8 LES(H)16 LES(H)25 Lead symbol J K J K J K Lead [mm] 8 4 10 5 16 8 Max. speed [mm/s] 400 200 400 200 400 200 Min.

JXCx-OMT0002

280 420 280 Min. speed [mm/s] (Independent and interpolation) 30 20 30 20 30 20 Min. speed [mm/s] (Speed tuning control) 38 25 38 25 38 25 Supplement 1.7 Initial setting of LEH series Model LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 Lead symbol K Lead [mm] 251/73 249/77 246/53 243/48 242/39 (6.205) 254/43 (5.907) (3.438) (3.234) (4.642) (5.063) Max. speed [mm/s] 80 80 100 100

JXCx-OMU0026

48 Min. speed [mm/s] (Speed tuning control) 78 Supplement 1.6 Initial setting of LER series Model LER10 LER30 LER50 Lead symbol J K J K J K Lead [mm] 12 8 12 8 12 7.5 Max. speed [mm/s] 420 280 420 280 420 280 Min. speed [mm/s] (Independent and interpolation) 30 20 30 20 30 20 Min. speed [mm/s] (Speed tuning control) 38 25 38 25 38 25 -113No.

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

53

Page 145 137 B Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type (400 V type only) (Option S only) (UL Standards) (Option S only) RoHS HRSH090 Series How to Order A HRSH090 20 Cooling capacity 090 9.5 kW Option Nil None B Note 1) With earth leakage breaker J With automatic fluid fill function M Applicable to deionized water piping S Note 2) Conforming to CE/UL standards Cooling method

SFOD-OMT0009CN

150 350 250 200 [mm/s] 20 10 20 10 () [mm/s] 25 13 27 14 () 109 No.SFOD-OMT0009CN-B 1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 [mm/s] 1100 1400 1500 [mm/s] 48 () [mm/s] 78 () 1.6 LER LER10 LER30 LER50 J K J K J K [mm] 12 8 12 8 12 7.5 [mm/s] 420 280 420 280 420 280 [mm/s] 30 20 30 20 30 20 () [mm/s] 38 25 38 25 38 25 () 1.7 LEH LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40

JXCx-OMT0001CN

1.5 LEFB LEFB16 LEFB25 LEFB32 T [mm] 48 mm/s 1100 1400 1500 [mm/s] () 48 [mm/s] () 78 1.6 LER LER10 LER30 LER50 J K J K J K [mm] 12 8 12 8 12 7.5 mm/s 420 280 420 280 420 280 [mm/s] () 30 20 30 20 30 20 [mm/s] () 38 25 38 25 38 25 1.7 LEH LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 K [mm] 251/73 249/77 246/53 243/48 242/39 254/43 (3.438) (3.234) (4.642) (5.063) (6.205

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

1

M: 3 mm or more 7 mm or less XA1 XA11 SR5 mm or more 20 20 SR5 mm only M: 8 mm or less M: 4 mm or more 8 mm or less SR6 mm or more 25 25 SR6 mm only M: 10 mm or less M: 4 mm or more 10 mm or less H: M5 or more, X: 20 mm or less H: M5 or less For 12 For 12 J: 3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more

smcmaintenancepartslist

100 125, 140, 160 P.343 Construction 40 to 100 @5 C A D B 125 to 160 @7 L F E E K H J J M G The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CL1.

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

Compact 5-Port Solenoid Valve

2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Environment

LEL M PA LEM M U D LEY K Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25 15 to 100 130.5 116 13 20 44 45.5

VEX1

plug L plug connector (L) M plug connector (M) Sub-plate M5 x 0.8 (P2) Silencer (P2) AN120-M5 (Option: N) (Except VEX3420) Plug (1/8) Refer to Table (1).

Cylinder

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

1.1

The unit used is [S/m], incorporating [S] (Siemens), the opposite of [] (resistance). At 25C, the electrical conductivity of theoretically 100% deionized water is 0.055 [S/m].