Actuation: 2 (2 Position Double), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: W [Dust-tight, Water-jet-proof (IP65)], Sub-plate: None, Thread: Rc (or NIL in the Case of No Sub-plate), CE Compliant: Q (CE Compliant)

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Normally Open, Applicable Cylinder Diameter(Ø): -, Pressure Rating(MPa): 0.1 to 0.7, Driving Type: Pilot Type

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Normally Open, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: NPTF, Port Size: 1/4, Pressure Rating(MPa): 1, Driving Type: Pilot Type Spool, Pilot

Actuation: 2 (2 Position Double), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: W [Dust-tight, Water-jet-proof (IP65)], Sub-plate: 02 (1/4 Port Size), Thread: T (NPTF)

Actuation: 2 (2 Position Double), Seal: 1 (Rubber Seal), Function: Standard (0.4W DC, AC), Coil Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Enclosure: W [Dust-tight, Water-jet-proof (IP65)], Sub-plate: 02 (1/4 Port Size), Thread: N (NPT)

Table of Contents

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

53

Rc1 Flow direction Barrel nipple 25A Y-strainer (Accessory) Y-strainer (40 mesh) 25A Barrel nipple (25A) (Accessory) 141 HRSH090 Series Inverter Type Recommended External Piping Flow External piping circuit is recommended as shown below. 6 Thermo-chiller 1 Facility water outlet (Water-cooled refrigeration) 6 1 Facility water equipment Facility water inlet (Water-cooled refrigeration) 1 7

VQ5000

Operate in a range such that the cylinder pressure is less than two times the supply pressure. 00 51 Applicable solenoid valve 1 2 VQ54 VQ5 VVQ5000-25A-1 (plug-in type) VVQ5000-25A-5 (plug lead type) Can hold an intermediate cylinder position for an extended time When combined with a double check spacer with built-in double check valve, it is unaffected by air leakage between the spool valves

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

VXP21/22/23

Description Size Standard Brass BC6 Brass BC6 NBR Option Stainless steel Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless

Lightweight and Compact

Y-strainer (Accessory) Y-strainer (40 mesh) 25A Barrel nipple (25A) (Accessory) 79 HRS090 Series Standard Type Operation Display Panel List of Function The basic operation of this unit is controlled through the operation display panel on the front of the product.

VQ7-6/7-8

03 C10 02 03 C12 Enter only when using for a 2 position single or double.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Operate in a range such that the cylinder pressure is less than two times the supply pressure. 00 51 Applicable solenoid valve 1 2 VQ54 VQ5 VVQ5000-25A-1 (plug-in type) VVQ5000-25A-5 (plug lead type) Can hold an intermediate cylinder position for an extended time When combined with a double check spacer with built-in double check valve, it is unaffected by air leakage between the spool valves

VQ7-6/7-8

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

HRX-OM-W032

1 pc. (4) Barrel nipple 25A 1 pc.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 ARJ 0.204 0.5 0.2 AR425 to 935 Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 ARX 0.3 0.200 AMR 0.1 0.2 0.198 ARM 0.05 0.1 0.196 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0

VQC

spacer with residual pressure release valve VVQ4000-25A-1 Interface regulator (A regulator) ARBQ4000-00-A-1 Interface regulator (B regulator) ARBQ4000-00-B-1 Interface regulator (P regulator) ARBQ4000-00-P-1 P R1 R2 SUP/EXH block plate VVQ4000-16A 02 Rc 1/4 Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM). 03 Rc 3/8 C8 (N7) C10 (N9) With 8 (1/4") One-touch fitting With 10 (

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Series: VQ2000, Actuation: 3 Position Closed Center, Body: -, Seal Type: Rubber Seal, Function: VQ2: Standard, 0.4 W; VQ5: Standard, 0.95 W), Coil Voltage: 24VDC, Electrical Entry: None, Light/Surge Suppressor: Yes, Manual Override: Non-locking Push Type, Tool Required), Enclosure: Dust-tight/Water-jet-proof Type, IP65, Porting: Side Ported, Port Size: Rc1/4, CE Compliant: -