Flow ranges (lpm): 10-100, 30-250; Port sizes: 25A (32mm) or 30A (38mm) (flow range dependent); Temperature rating: 0-70°C; Output options: NPN/PNP, 1-5V, 4-20mA; Accuracy: ±3% F.S.; Repeatability: ±2% F.S.

Flow ranges (lpm): 10-100, 30-250; Port sizes: 25A (32mm) or 30A (38mm) (flow range dependent); Temperature rating: 0-70°C; Output options: 1-5V, 4-20mA; Accuracy: ±3% F.S. ; Repeatability: ±2% F.S.

Bore Size: 6mm, Symmetric Type: Standard, Stroke: 30mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: L (3m)

Bore Size: 6mm, Symmetric Type: Standard, Stroke: 30mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Function: Standard, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, 0.5M, Lead Wire or Prewired Connector: 3m, Number: -

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 30mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 30mm, Adjuster: A (Both Sides Adjusters/Rubber Stoppers), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 30mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 6mm, Port Thread: M Thread: 6 to 15 Bore; Rc: 20 to 63 Bore, Symmetric Type: Standard, Stroke: 30mm, Adjuster: Both Sides Adjusters/Rubber Stoppers, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Specification: Clean Series, Vacuum Suction Type, Special Treatment on Guide, Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 30mm, Adjuster: Rubber Stopper, Both Ends, Functional Option: Standard Type, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: -

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 6mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 30mm, Adjuster: A (Rubber Stopper, Both Ends), Functional Option: Standard Type, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m)

A

F U N C T I O N A L O P T I O N S ACCESSORIES SHOCK ABSORBER SERIES MXQ -l Standard F With Buffer R* With End Lock P Axial Piping FR* With Buffer and End Lock FP With Buffer and Axial Piping T Y P E O F A U T O S W I T C H E S Without *With Auto Switch, see Accessories Section Type Model RB0805 MXQ8 RB0806 MXQ12 * Not Available for MXQ6 RB1007 MXQ16 RB1411 MXQ20 RB1412 MXQ25 ACCESSORIES

CATALOG

F U N C T I O N A L O P T I O N S ACCESSORIES SHOCK ABSORBER SERIES MXQ -l Standard F With Buffer R* With End Lock P Axial Piping FR* With Buffer and End Lock FP With Buffer and Axial Piping T Y P E O F A U T O S W I T C H E S Without *With Auto Switch, see Accessories Section Type Model RB0805 MXQ8 RB0806 MXQ12 * Not Available for MXQ6 RB1007 MXQ16 RB1411 MXQ20 RB1412 FOR MORE TECHNICAL

Air Slide Table Series MXQ

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

Air Slide Table/Reversible Type Series MXQR

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

01-mxqr-e

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

Table of Contents

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !