smcmaintenancepartslist

table Model Level difference t mm Model Level difference t mm MXS6 MXQ6 MXS8 MXQ8 0.5 0.3 MXS12 MXQ12 MXS16 MXQ16 0.3 MXS20 MXQ20 0.5 0.5 MXS25 MXQ25 323 Series MXF Replacement Procedure of Seal 1 Caution 1-2.

JXCx-OMU0026

Example) When LEFSH25RH-300 isordered, input LEFS25RH-300 (c) When a Clean type (11-) or Secondary battery type (25A-) is ordered. Search without inputting 11or 25A-, and find the actuator to which 11or 25Ais applicable.

MXQ

-30 MXQ12-30 MXQ12-20 MXQ12-20 MXQ12-10 MXQ12-10 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 MXQ12-30 MXQ12-20 MXQ12-10 MXQ12-100 MXQ12-100 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.020 MXQ12-30 MXQ12-30 MXQ12-100 MXQ12-100 MXQ12-30 MXQ12-100 0.04 MXQ12-100 MXQ12-100 MXQ12-75 MXQ12-75 MXQ12-50 MXQ12-50 MXQ12-40 MXQ12-40 0.08 MXQ12-50 MXQ12

Air Slide Table Series MXQ

-30 MXQ12-20 MXQ12-10 MXQ12-100 0.10 0.020 MXQ12-100 0.04 MXQ12-30 MXQ12-50 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 Table displacement mm Table displacement mm Table displacement mm 0.08 0.016 MXQ12-50 MXQ12-75 MXQ12-30 MXQ12-40 0.03 MXQ12-75 MXQ12-40 0.06 0.012 MXQ12-20 0.02 0.04 0.008 MXQ12-20 MXQ12-10 0.01 MXQ12-10 0.02 0.004 0 0 160 40 80 120 0 20 40 60 80 100 20 40 60 80 100 Load N (1N

MX-OMP0051

)MXQ6B MXQ6(C) Nm MXQ6(A) RJ0603 0.85 MXQ8(A,C) MXQ6B RJ0603 0.85 MXQ12(A,C) MXQ8B RJ0805 1.67 MXQ16(A) MXQ12B RJ1006 3.14 MXQ20(A) MXQ16B RJ1007H 3.14 MXQ25(A) MXQ20B RH1410 10.8 12 2-8 kg RJ MXQ6(A) 0.6 0.6 0.6 MXQ8(A,C) 1 1 1 1 MXQ12(A,C) 2 2 2 1 MXQ16(A) 4 4 4 2.5 MXQ20(A) 6 6 6 5 MXQ25(A) 9 9 9 5.5 2 45 3 , , 13 OFF MXQ6(A) 2.85 5.65 MXQ8(A,C) 2.4 5.6 MXQ12(A,C) 4 5.5 MXQ16(A) 5

AIR SLIDE TABLE

Description Material Note Chromate treatment 40 Bushing Aluminum alloy (MXQ6,MXQ8(C),MXQ12(C) only) 41 O-ring NBR (MXQ6,MXQ8(C),MXQ12(C) only) 42 Parallel pin Stainless steel (MXQ6,MXQ8(C),MXQ12(C) only) 43 Steel ball High carbon chromium bearing steel 20 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Slide Tables MX Series

Shock absorber RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 4.Follow the table for tightening torque of shock absorber lock nuts.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-100 Note) Note) 1322Note) Refer to the bottom view of MXQ12-40. 809 MXQ 1322Air Slide Table Dimensions: MXQ12 1322Axial piping (12): MXQ12-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

Electric Actuators

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

LX

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

LX

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

Electric Actuator

(Except cable specifications and actuator options) Example: Enter LEFS16B-100 for the LEFS16B-100B-R1AN1D. 5 When controller equipped type is selected when ordering the LE series, you do not need to order this driver. The driver is sold as single unit after the compatible actuator is set. Confirm that the combination of the driver and the actuator is correct.

Table of Contents

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot B dimension T-slot A dimension T-slot B 27.5 4H9 D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Cross section C-C LXSH2BD-50B LXSH2BD-75B LXSH2BD-100B LXSH2BD-125B LXSH2BD-150B Refer to page 301 for mounting.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Example: LEFS16B-100B-S1) * For the SpeedWork Load graph of the actuator, refer to the LECPA section on the model selection page of the electric actuators Web Catalog. Specifications For the setting of functions and operation methods, refer to the operation manual on the SMC website.

2 Phase Stepper Motor/Without Motor Brake Series LXP

micro sensor wire (300mm) Brake wire (300mm) 4.5 4H9 +0.030 0 Brake electrical circuit +24V Brown [Yellow] 4H9 +0.030 0 3 6 0V 49 38 White [Yellow] Section C detail (Scale: 2/1) Stroke + 104 (Stroke: 50 to 100mm) Stroke + 121 (Stroke: 125 to 200mm) 4H9 +0.030 0 depth 6 E Note) A contact protection circuit is required when connecting a brake. 12 D E Model LXPB5BC-50B LXPB5BC-75B LXPB5BC-100B

SI Unit for Vacuum Manifold

DetailedDeviceStatus EventQualifier (byte 0) Event Sub index Size Content Code (byte 1-2) Value MODE TYPE SOURCE INSTANCE bit 6-7 bit 4-5 bit 3 bit 0-2 1 Device hardware failure 0x5000 2 Non volatile memory failure 0x5011 3 Valve short circuit 0x1800 4 Pressure sensor short circuit 0x1801 11b 11b 100b 5 Pressure sensor failure/disconnection 0x1802 (3) 0 0xF4 (3) (4) (Event (Device) (Error

Air Slide Table Series MXQ

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.

Air Slide Table/Reversible Type Series MXQR

MXQ6-PS MXQ8-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Set of left nos. !8, !9, @0 Piston seal Rod seal NBR MXQ12-PS O-ring MXQ20-PS MXQ16-PS MXQ25-PS Seal kit includes these seals to provide as a set. Order the seal kit, based on each bore size. Replacement Parts: Grease Pack Grease pack part no.

01-mxq-e

MXQ6-PS 6 8 12 16 20 25 MXQ6-PS MXQ8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS !8 !9 @0 Piston seal MXQ8-PS Rod seal NBR MXQ12-PS Set of left nos. !8, !9, @0 O-ring MXQ16-PS With end lock MXQ20-PS MXQ25-PS #3 #4 #5 #6 Piston seal Rod seal Replacement Parts: Seal Kit for with End Lock Kit no.