x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 556 Series CXSJ Dual Rod Cylinder Compact Type Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) A H E F (Through) N N (I ) (L) (Z) (G) C CX2 NN CXW A B ZZ C D E M F G H I J K L N 2 x M4 x 0.7 with thread depth 6 2 x M4 x 0.7 with thread depth 6 2 x M5 x 0.8 with thread depth 7.5
(Z) TT QQ (G) D-X T Q 20U R UU (Piping port) (Opposite side: Same) Data N (I) (L) (Z) W C (mm) A B C D E F G H I J K L M N OO NN P Model 2-5.5 through 2-M4 x 0.7 thread depth 6 2-M5 x 0.8 thread depth 7.5 2-M5 x 0.8 thread depth 8 CXS20 64 25 62 23 50 28 6 12 12 30 10 M6 x 1.0 x 18.5l 53 11.5 2-M5 x 0.8 2-9.5 counterbore depth 5.3 2-6.9 through CXS25 80 30 78 28 60 35 6 12 12 30 12 M6 x
A B L1 L2 L2 L1 B A PA A B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position
L1 L2 L2 L1 B A PA A B B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position) 55 155 (3 position) 77.5 Bottom ported drawing 165.5 153.5 121 PA 14 PB 12 5 1 R 3 65 54 4-1/8 P 39 (Pilot pressure EXH port) 21 MC R2 R1 (P , R port) 6-3/8 17 17 26.5 26.5 L
2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2
U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22
Qty. 1 2 3 4 PVC pipe Seal Body Sensor PVC pipe (25A) PVC pipe (30A) 1 1 CPVC ZS-40-U25 ZS-40-U30 1 FKM PPS PPS 25A retaining plate (M5 x 80 with two hexagonal socket head cap screws) ZS-40-U25-A 1 5 30A retaining plate (M5 x 65 with two hexagonal socket head cap screws) PF3W ZS-40-U30-A 1 Replacing the PVC pipe may cause accuracy to fluctuate by 1 to 2%. 3-Color Display Digital Flow Monitor
Interface regulator model SY30M-m-m-m SY50M-m-m SY70M-m-m Applicable valve model*1 SY3m0 3m(R) SY5m0 3m(R) SY7m0 3m(R) Regulating port 1(P), 4(A), 2(B) Set pressure range 0.1 to 0.7 MPa Maximum operating pressure 1.0 MPa Fluid Air Ambient and fluid temperatures 10 to 50C (No freezing) 5 7 0 1 Weight [g]*2 With pressure gauge 33 (35)*3 75 93 Without pressure gauge 27 (29)*3 69 87 (A)4 2(B)
U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) A 4 B 2 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22
Output type Current consumption PF3W721--A(-M) NPN open collector output 50 mA or less Flow switch SMC PF3W721--B(-M) PNP open collector output 50 mA or less 3.3 Installation HRSH Series 3-22 HRX-OM-Q026 Chapter 3 Transport and Setting Up 1. Prepare the flow switch described in the Table 3-9 (sold separately). 2.
(305) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 8 VNC 1 4 1 4 VNH Note) ( ): CE compliant product (-Q) VND Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 202.5 232 267 286.5 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5
2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam
pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A
B IN OUT 8-18 L E H A DIN terminal: D Conduit: C Approx. 280 N (N) J J (44) G 1/2 M M G 1/2 Cable 6 to 12 (Q) Conduit terminal: T J (N) 32 25 G 1/2 M (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (AC/Class B coil) Model M 93 N 33 36 36 M 88 N 51.5 54 54 M 89 N 68.5 71 71 Q 56.5 59 59 M 88 N 103.5 Q 72.5 75 75 Normally closed VXD2272 VXD2382 VXD2392 Normally open VXD2270
2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P)
Individual EXH spacer VVQ2000-R-1-C8 EXH shutoff position: Specify 2 positions. SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).
B-B Anchor bolt fixing position C Accessory: Y-strainer mounting view 760 (Dimension of anchor bolt fixing bracket) Circulating fluid return port Rc1 138 8 x 12 410 (715) (Thermo-chiller dimension) 627 43 Barrel nipple 25A 130 Y-strainer (40 mesh) 25A 617 Barrel nipple (25A) (Accessory) (687) (Thermo-chiller dimension) 19 Y-strainer (Accessory) 724 View C-C 173 HRSH Series Inverter Type
Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right
Terminal LE CP B Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 Yellow 5 B A-2 8 8mNote) Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 A 10mNote) (c) Shield B 15mNote) Cable colour Terminal number Brown 12 Vcc B-4 C 20mNote) Black 13 GND A-4 Red 7 A B-5 Note) Produced upon receipt Black 6 A A-5 Orange 9 B B-6 of order Black 8 B A-6 (Only "Robotic
cable Orange 9 B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A-3