Controller Mounting: DIN Rail Mouting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: (None 75 dB), Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: V124-5LU-M5

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: ANB1-01, 55 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: (None), Exhaust Solenoid Valve: V124-5LU-M5

3

Symbol Temperature Instantaneous flow rate Accumulated flow M G oC oC oF oF L/min L Rated flow range Pipe O.D. Symbol Port gal gal gal/min gal/min size 11 21 F J 25 30 $ 25A 30A 32 mm 38 mm L/min L $ JIS K6742 equivalent Under the New Measurement Law, units other than SI (symbol M) cannot be used in Japan.

5-Port Solenoid Valve

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted y Pilot valve option !

Bracket mounting inserts found on the standard ISE20A are omitted as well. 25A-ISE20A is UL/CSA, CE and RoHS compliant with an IP40 enclosure rating.

Bracket mounting inserts found on the standard ISE20A are omitted as well. 25A-ISE20A is UL/CSA, CE and RoHS compliant with an IP40 enclosure rating.

2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

Process Valve Series VNA

2 x 2 x A B A B A B A B 60 80 100 115 235 (221) 264.5 (250.5) 300 (286) 319 (305) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 95.5 111 119 1 8 VNC 1 4 1 4 VNH Note) ( ): CE compliant product (-Q) VND Model J K L M N O P Q R S T U V VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth

HRX-OM-R026

/Japanese 1pc.) 3 Y strainer (40meshes) 25A 1pc. 4 Barrel nipple 25A 1pc. 5 Anchor brackets The anchor bolts are not attached 2pc.

240

200 200 LEJ 160 160 L7 [mm] L7 [mm] 120 120 LEL Y L7 80 80 LEM 40 40 Me LEY 0 0.1 0.2 0.3 0.4 0.5 0 0.0 0.3 0.6 0.9 1.2 1.5 0 m Vertical Work load [kg] Work load [kg] LES 200 200 LEPY LEPS LEPY LEPS 160 160 L8 [mm] L8 [mm] 120 120 LER Z 80 80 L8 LEH 40 40 0 0.1 0.2 0.3 0.4 0.5 0 0.0 0.3 0.6 0.9 1.2 1.5 0 Me LEY -X5 m Work load [kg] Work load [kg] 11LEFS 11LEJS 25ALEC LEC S LEC SS-T LEC Y

energy saving effect

/Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

Pilot Operated

K Approx. 300 C M F (P.C.D) D B IN OUT 8-18 L E H A DIN terminal: D Conduit: C Approx. 280 N (N) J J (44) G 1/2 M M G 1/2 Cable 6 to 12 (Q) Conduit terminal: T J (N) 32 25 G 1/2 M (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (AC/Class B coil) Model M 93 N 33 36 36 M 88 N 51.5 54 54 M 89 N 68.5 71 71 Q 56.5 59 59 M 88 N 103.5 Q 72.5 75 75 Normally closed VXD2272 VXD2382

53

Rc1 Flow direction Barrel nipple 25A Y-strainer (Accessory) Y-strainer (40 mesh) 25A Barrel nipple (25A) (Accessory) 141 HRSH090 Series Inverter Type Recommended External Piping Flow External piping circuit is recommended as shown below. 6 Thermo-chiller 1 Facility water outlet (Water-cooled refrigeration) 6 1 Facility water equipment Facility water inlet (Water-cooled refrigeration) 1 7

JXCx-OMU0026

Yaxis [Axis speed calculation] Composite travel distance = Target position 1 2 Z Z Y Y X X 2 2 2 Composite speed 1 2 1 2 (X2, Y2, Z2) Xaxis speed = ( 1 2 X X / Composite travel distance) Composite speed Y axis speed = ( 1 2 Y Y / Composite travel distance) Composite speed Z axis speed = ( 1 2 Z Z / Composite travel distance) X axis Composite speed Current position (X1, Y1, Z1) Z

SFOD-OMT0010

K J K J K Lead [mm] 12 8 12 8 12 7.5 Max. speed [mm/s] 420 280 420 280 420 280 Min. speed [mm/s] 30 20 30 20 30 20 (Independent and interpolation) Min. speed [mm/s] 38 25 38 25 38 25 (Speed tuning control) Supplement 1.7 Initial setting of LEH series Model LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 Lead symbol K Lead [mm] 251/73 249/77 246/53 243/48 242/39 254/43 (3.438) (3.234

JXCx-OMT0002

M M ... Axis 1 ... Axis 2 0mm 0mm 50mm 60mm 100mm End position 50mm 60mm 100mm Origin position Origin position End position Actuator Load Actuator Load Motor Motor ... ... M M ... Axis 3 ... Axis 4 0mm 50mm 60mm 100mm End position 0mm 50mm 60mm 100mm End position Origin position Origin position -58No. JXC-OMT0002-C Flow chart (Reference) (1) Select Step No.1. (Turn IN0 ON.

SFOD-OMT0009CN

M M ... 1 ... 2 0mm 50mm 60mm 100mm 0mm 50mm 60mm 100mm ... ...

JXCx-OMT0001CN

M M 1 2 ... ... 0mm 50mm 60mm 100mm 0mm 50mm 60mm 100mm ... ...

1

M: 3 mm or more 7 mm or less XA1 XA11 SR5 mm or more 20 20 SR5 mm only M: 8 mm or less M: 4 mm or more 8 mm or less SR6 mm or more 25 25 SR6 mm only M: 10 mm or less M: 4 mm or more 10 mm or less H: M5 or more, X: 20 mm or less H: M5 or less For 12 For 12 J: 3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more