53

Conditions DC inverter Inverter fan pump Low High Motor rotation rate (For air-cooled type) Inverter pump Power reducing effect of the inverter pump Inverter pump Current model HRSH090 35 L/min 55 L/min Inverter Power consumption (Pump only) Power consumption (Pump only) pump 0.6 kW 1.1 kW Tank Tank 55 L/min 35 L/min 35 L/min 0.3 MPa 35 L/min 0.3 MPa Users equipment Users equipment The motor

Proposals for Energy Saving

D L1 56 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Nozzles for Blowing Series KN Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Connection size L1 A 1 1.5 2 1.5 2 2 2.5 2.5 3 6 6 6 8 8 10 10 12 12 35 35 35 39 39 43 43 45.5 45.5 18 18 18 20.5 20.5 22 22 24 24 KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

VQ5000

Note2) See page 35 for details on external pilot specifications.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

136.5 50 20 85 103 52.3 11 14.5 12.5 5.4 40.3 53.3 30.8 29 M5 x 0.8 6.5 40 to 100 67.5 105 to 120 161.5 125 to 200 84.5 205 to 300 102 Motorless 25 LAT 20 to 35 156 55 25 101 123 63.8 12 18.5 16.5 5.4 50.3 68.3 38.3 30 M6 x 1.0 8.5 40 to 100 68 105 to 120 186 125 to 200 85 205 to 300 102 LZ 32 LC3F2 Size Stroke range [mm] OA OB P Q S T U V WA WB WC X XA XB YD Z 15 to 35 35 26 70 54 4 5 47

HRX-OM-W032

1 pc. (4) Barrel nipple 25A 1 pc.

Process Valve

Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U VNB2-10A VNB2-15A VNB3-20A VNB4-25A 3 8 1 2 3 4 1 144.5 55 125.5 52 26 4.5 24.3 2.3 25 34 63 42 28 14 72.5 80.5 75 80 84.5 124 60.5 73 135.5 151.5 137 153 156 172 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 80 90 50 60 35 44 17.5 22 84 100 92 108 84 90 89 95 93.5 99.5 Port size: 10A, 15A, 20A, 25A Vacuum pilot K L N

Table of Contents

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

VNB

indicator light: DL) Main port Rc A B C D E F G H I J K L M N P Q R S T U V W Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 75 87 97 114 126.5 170.5 173.5 180.5 52 26 4.5 24.3 2.3 25 34 55 80 90 50 60 35 40 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 141.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 17-

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note2) See page 35 for details on external pilot specifications.

VQ7-6/7-8

) 35 32 (35) 6-Rc1/2, 3/4 35 L: Dimensions Formula L n 10 9 8 7 6 5 4 3 1 2 Port P, R1, R2 n: stations L1 = 56n + 64 L2 = 56n + 80 n: stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 120 232 176 Rc1/2 L2 640 584 528 472 416 360 304 136 248 192 L1 650 594 538 482 426 370 314 146 258 202 Rc3/4 L2 666 610 554 498 442 386 330 274 162 218 Dimensions inside ( ) are for Rc3/4

VQ7-6/7-8

) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344 288 232 120 176 1/2 L2 640 584 528 472 416 360 304 248 136 192 L1 650 594 538 482 426 370 314 258 146 202 3/4 L2 666 610 554 498 442 386 330 274 162 218 ( ): 3/4 Dimensions inside are for rubber seals. 3-10-

SFOD-OMT0009CN

-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 15 No.SFOD-OMT0009CN-B Execute (Apply) 3.6 (2) 16 No.SFOD-OMT0009CN-B (2) 7. 512 2048 / 0 1 0 1 1 4 1 4 11 () 12 () 1 2 1 11 [] 14096 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 2 3 800 2.5mm 12 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 17 No.SFOD-OMT0009CN-B download 18 No.SFOD-OMT0009CN-B

Pulse Valve

), 1 1/2 (40A) 3/4 (20A), 1 (25A), 1 1/2 (40A) 1 (25A) Dedicated Controller for Operation VXFC Series p. 14 The valve controller can turn the many valves for the dust controller ON/OFF .

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Coolant Valve

refer to table below A 63 63 80 90 B 42 42 50 60 K L 52 52 62 72 C 29 29 35 40 M 26 26 31 36 D 14.5 14.5 17.5 20 N 4.5 4.5 5.5 6.5 E 72.5 72.5 84 100 P 24.3 24.3 28.3 33.3 F 80.5 80.5 92 108 Q 2.3 2.3 2.3 2.3 H 95.3 95.3 100.3 101.3 R 25 25 30 35 J Note) S 34 34 43 49 Model Main port 1, 2 VNC2-10A VNC2-15A VNC3-20A VNC4-25A 3 8 1 2 3 4 1 162.5 (164.5) 162.5 (164.5) 174 (176) 190 (192) 55

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

VNH

A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid pressure Fluid Operation Operating fluid temperature 0 to 3.5 MPa Coolant External pilot solenoid/Air operated 5 to 60C /5 to 60C (NBR seal) 5 to 60C /5 to 99C (FKM seal) 0 to 7.0 MPa VNH A 1 3 1 3 VNH B Pressure Temperature Lubrication

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

VQ4000

(Noise reduction of 35 dB or more) Note 1) Exhaust cleaner AMC610-10 is not attached. (Order it separately.) Note 2) Mount so that the exhaust cleaner is at the lower side. Note 3) For details about the exhaust cleaner, refer to Best Pneumatics vol.5.