Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

AW

Model Optional specifications AW10(K) AW20P-270AS AR20P-260S AW20(K) AW30(K) AR40P-270AS AR40P-260S AW40(K) AW40(K)-06 AW60(K) AW60P-270AS Note 6) Bracket assembly Note 1) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AR30P-270AS AR30P-260S Note 7) Set nut G36-10-01 G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L Round type Note 2) Standard 0.02 to 0.2 MPa

rep-modular-e

Nominal AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR60(K) 21 12 14 AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR60(K) Wrap seal tape leaving 1.5 to 2 threads 2) Wrap the pressure gauge thread with the seal tape leaving 1.5 to 2 threads from the end. Assembly Spanner Nominal AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR60(K) 3) Mount the pressure gauge.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Nominal AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR60(K) 21 12 14 AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR60(K) Wrap seal tape leaving 1.5 to 2 threads 2) Wrap the pressure gauge thread with the seal tape leaving 1.5 to 2 threads from the end. Assembly Spanner Nominal AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR50(K) AR60(K) 3) Mount the pressure gauge.

AWM20 to AWM40

D-DN This catalog is printed on recycled paper with concern for the global environment.

AWM20 to AWM40

D-DN This catalog is printed on recycled paper with concern for the global environment.

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Note 3) Assembly of a bracket and set nuts (10-/21-AR20(K)-B to AR40(K)-B) Including 2 mounting screws for the 10-/21-AR50(K)-B, AR60(K)-B Note 4) The only difference from the standard specifications is the adjusting spring for the regulator. It does not restrict the setting of 0.2 MPa or more. When the pressure gauge is attached, a 0.2 MPa pressure gauge will be fitted.

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

Specifications Model ISE35 Rated pressure range 0 to 1 MPa Display/setting pressure range 0.1 to 1 MPa ZSE20 ISE20 Withstand pressure 1.5 MPa ZSE30 ISE30 Minimum display/setting unit 0.01 MPa Applicable fluid Air, Non-corrosive gas, Non-flammable gas ZSE40 ISE40 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) Power supply voltage ZSE10 ISE10 Current consumption

Regulator AR30 to 60

Applicable model AR30 AR40 AR40-06 AR50 AR60 Option Note 4) Note 4) Note 1) AR30P-270AS AR40P-270AS AR40P-270AS AR50P-270AS AR50P-270AS Bracket assembly Note 5) Note 5) AR30P-260S AR40P-260S AR40P-260S Set nut G46-10-02 G36-10-01 G46-10-02 G46-10-02 G46-10-02 Round Square embedded type Round Square embedded type 1MPa Note 2) Note 3) Pressure gauge GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3

Knob Cover

AR20(K)-D,AR20M(K)-D AW20(K)-D,AWM20-D,AWD20-D AR30(K)-D,AR30M(K)-D AW30(K)-D,AWM30-D,AWD30-D AR40(K)-D,AR40M(K)-D,AR40(K)-06-D AW40(K)-D,AWM40-D,AWD40-D,AW40(K)-06-D AR50(K)-D AR60(K)-D,AW60(K)-D AR24P-580AS 0.02kg AR34P-580AS 0.04kg 0.05kg -5oC to 60oC AR44P-580AS AR54P-580AS 0.10kg 4Structural Drawing Lock Cover Knob Cover (Two parts) -6- 5How to attach (1) Press in the regulator handle

Table of Contents

E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

7

Port size Size Orifice diameter Body material Model One-touch fitting Flange Thread 1/4 3/8 3/4 1 32A 40A 50A 1/2 10 3/8" 12 Aluminum 8A 10A 15A Resin VXD2 3 A 10 mm C37 Stainless steel C37 10A 15A VXD2 4 B 15 mm Stainless steel C37 VXD2 5 C 20A 20 mm Stainless steel C37 VXD2 6 D 25A 25 mm Stainless steel VXD2 7 E VXD2 8 F VXD2 9 G 32A 35 mm CAC408 40A 40 mm 50A 50 mm 114 INDEX Pilot Operated

Process Valve Series VNA

G (Grommet terminal: E) H (Conduit terminal: T) I (DIN terminal: D) In the case of EZ or TZ, the length is longer by 10 mm.

Air Slide Table

10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke

Environment

LAT LEJS40 LEJS63 Applicable auto switches D-M9N(V)-900, D-M9P(V)-900, D-M9B(V)-900 D-M9NW(V)-900, D-M9PW(V)-900, D-M9BW(V)-900 LZ *4 Please consult with SMC for non-standard strokes as they are produced as special orders. LC3F2 * Specifications and dimensions for the 25A-series are the same as standard products.

Pilot Operated

COM. 2 to 10 10 to 25 1.5 to 4 N.C./N.O. 1/8 to 1/2 N.C.

2/3 Port Valve

C.O. 4 220V AC 50/60Hz 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 10 5 24V DC 6 12V DC 7 240V AC 50/60Hz 15 2 9 Other 20 3 Option 25 4 1 1 1 2 Valve size 5 to 7 32 5 1 4 1 2 40 6 50 7 Note) Only air operated type.

2/3 Port Valve

C Stainless steel 10A to 25A (3) High temp. water(D, E, N, P) Temperature Power Water (Standard) Air (Standard) Oil (Standard) (3) High temp. oil (D, N) Body q 32A to 50A 99 (4) 100 (4) 10A to 25A Stainless steel 60 40 _ _ _ _ 40 60 80 60 10 AC DC AC/DC 60 40 1 Bonnet Max. w 32A to 50A O ring 10 (1) 5 (2) Min.

New

C37 20A 3/4 20 D 200 VAC N.O. Stainless steel E 230 VAC 6 D K L N.C. C37 25A 1 25 F 24 VDC Stainless steel N.O.

Battery-less

R1 1.5 RA 10*10 R3 3 RB 15*10 R5 5 RC 20*10 Symbol Type Motor mounting position Parallel In-line Nil Ends tapped/ Body bottom tapped*6 V V L Foot V F Rod flange*6 V*8 V G Head flange*6 V*9 D Double clevis*7 V 61 a Battery-less Absolute Encoder Type Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) !