Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

Table of Contents

Wide range of interchangeability (D-sub connector (25P) conforming to MIL standard) Quick wiring permits easier installation. 01F VV5FR5 1 D 06 04 Series VFR5000 Manifold Thread type Nil Rc Plug-in type with D-sub connector G F U side N NPT Connector mounting direction Stations NPTF T 02 2 stations Symbol Port size D side mounting U side mounting D U A, B P , EA, EB Symbol 04 06 08 Passage

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK Direct exhaust with silencer box [-S ] For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D D U D U See pages 31 through 44 for detailed dimensions of each option.

HRX-OM-W032

1 pc. (4) Barrel nipple 25A 1 pc.

3 Port Solenoid Valve/

254.2 AW30-03G-A Y300T-A E300-03-A VP744-5DZ1-04-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

VQ7-6/7-8

FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

VXR21/22/23

terminal DIN terminal Q N 59 60 60 Port size P Rc H F E A N Q L K J B C D M 74 (81) 88 (98) 90 (100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59

2/3 Port Valve

Main port Rc(PT) Model E F G L M N P Q D U C T B S A H I J K R 3 8 1 2 3 4 1 VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 52 26 4.5 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 14 55 28 34 42 25 63 124 2.3 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 17.5 20 84 100 92 108 135.5 137 153 154 170 62 72 31 36 5.5 6.5 60.5 73 35 40 43 49 50 60 30 35 80 90 2.3 2.3 151.5 10A, 15A, 20A, 25A Port size Vacuum pilot

PF-OMN0009_C

20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

70pvvna

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

V100

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

VEX1

DIN connector 3 8 3 8 DO DIN connector (Without connector) 04 1 2 1 2 AN 04 5 06 1 2 3 4 1 2 3 4 1 Body ported G Grommet (300mm lead wire) AMC 10 1 1 1 H Grommet (600mm lead wire) E Grommet terminal 10 7 12 14 9 20 2 Wihout subplate 1 4 1 T Conduit terminal D DIN connector 1 4 1 2 1 2 G Grommet (300mm lead wire) Grommet (600mm lead wire) DIN connector DIN connector(Without connector) 2 01

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

Vacuum

lhe body D-97 Contact Protection Box a D-9 type switches have no internal conlact proteclion cicuit.

VQ5000

U D U D Kit/Electrical entry/Cable length F L Cylinder port kit (D-sub connector) kit (Lead wire cable) 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Note)In case of mixed specification, indicate on the manifold specification sheet. .

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)