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AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

2/3 Port Valve

C Stainless steel 10A to 25A (3) High temp. water(D, E, N, P) Temperature Power Water (Standard) Air (Standard) Oil (Standard) (3) High temp. oil (D, N) Body q 32A to 50A 99 (4) 100 (4) 10A to 25A Stainless steel 60 40 _ _ _ _ 40 60 80 60 10 AC DC AC/DC 60 40 1 Bonnet Max. w 32A to 50A O ring 10 (1) 5 (2) Min.

Process Pump

D-DN

42

position Stations D D side mounting U U side mounting 02 2 stations Cylinder port 12 12 stations 03 3/8 04 1/2 B Bottom ported 1/2 CM Mixed Thread type Note) One station is used for mounting the terminal block box.

Proposals for Energy Saving

Air Preparation Equipment 35 D H2 H1 8.5 A L1 High efficiency nozzle/KNH (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 KNH-R02-100 KNH-R02-150 KNH-R02-200 D H1 A L1 Low noise nozzle with self-align fitting/KNS (mm) Model Nozzle size D Connection size L1 L2 Width across flats H1 H2 L2 D 0.75

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

VQ5000

03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK Direct exhaust with silencer box [-S ] For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D D U D U See pages 31 through 44 for detailed dimensions of each option.

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

7

(1/2) (With bracket) M B 2 x P Port size I F L K J (D) e d 1.6 f IN OUT a b 18 f Conduit terminal e d 2 x P Port size E (U2) (V2) 34 32 T 3 A VXD2 C F 25 3 A Note) Only the VXD2 with port size of 04 (1/2) has threads on the bottom of the body.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

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Wide range of interchangeability (D-sub connector (25P) conforming to MIL standard) Quick wiring permits easier installation. 01F VV5FR5 1 D 06 04 Series VFR5000 Manifold Thread type Nil Rc Plug-in type with D-sub connector G F U side N NPT Connector mounting direction Stations NPTF T 02 2 stations Symbol Port size D side mounting U side mounting D U A, B P , EA, EB Symbol 04 06 08 Passage

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK Direct exhaust with silencer box [-S ] For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D D U D U See pages 31 through 44 for detailed dimensions of each option.

HRX-OM-W032

1 pc. (4) Barrel nipple 25A 1 pc.

3 Port Solenoid Valve/

254.2 AW30-03G-A Y300T-A E300-03-A VP744-5DZ1-04-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

VQ7-6/7-8

FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Filter Regulator AW30, 40

04 06 1 4 3 8 Note 2) 1 2 3 4 Note 1) Bracket assembly is not mounted at the time of shipment, but rather packaged together with the filter regulator for shipment.

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(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08