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D 01F VV5FS4 1 06 03 Thread type Stations Series VFS4000 Manifold Port size Nil N Rc NPT NPTF G 02 2 stations Symbol 03 04 A, B P, R1, R2 Plug-in type with D-sub connector T U side 3 8 Rc Rc Rc M Mixed 08 8 stations F 1 2 1 2 Max. 8 stations Connector mounting direction Option Symbol D side For bottom ported, Rc is only available. 3 8 Porting specifications (A, B) Passage D side mounting

04 03 04 Throttle valve spacer VVQ5000-20A-1 SUP stop valve spacer VVQ5000-37A-1 SUP blocking plate VVQ5000-16A-1 Double check spacer with residual pressure release valve VVQ5000-25A-1 PUSH LOCK Direct exhaust with silencer box [-S ] For exhaust cleaner mounting [-C ] Release valve spacer VVQ5000-24A-1D D U D U See pages 31 through 44 for detailed dimensions of each option.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing March, 1999 D-SMC.L.A. P-77.5 (YG)

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

Cylinder port U D U D C8 C10 C12 02 03 B CM With One-touch fitting for 8 With One-touch fitting for 10 With One-touch fitting for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed Refer to page 2-5-2 (Grommet type) for wiring specifications.

Main port Rc(PT) Model E F G L M N P Q D U C T B S A H I J K R 3 8 1 2 3 4 1 VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 52 26 4.5 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 14 55 28 34 42 25 63 124 2.3 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 17.5 20 84 100 92 108 135.5 137 153 154 170 62 72 31 36 5.5 6.5 60.5 73 35 40 43 49 50 60 30 35 80 90 2.3 2.3 151.5 10A, 15A, 20A, 25A Port size Vacuum pilot

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

), 1 1/2 (40A) 3/4 (20A), 1 (25A), 1 1/2 (40A) 1 (25A) Dedicated Controller for Operation VXFC Series p. 14 The valve controller can turn the many valves for the dust controller ON/OFF .

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing June, 2001 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Auto switch model Bore size [mm] 32 40 50 63 80 100 125 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV D-A9l/A9lV BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 CJ1 D-A3l/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BS1-125 CJP D-F5l/J59 D-F5lW/J59W D-F59F/F5BA D-F5NT D-A5l/A6l/A59W CJ2 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 JCM D-P3DWA BA10-032S BA10-040S BA10-

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

H (Conduit terminal: T) VXA I (DIN terminal: D) VN Main port Rc A H I J K L M R B F G N S C P T D Q U E Model LVC VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 52 2.3 42 26 25 28 4.5 34 14 72.5 80.5 74.5 79.5 82.5 124 125.5 142.5 24.3 55 LVA 60.5 73 1 80 90 84 100 92 108 62 72 2.3 2.3 50 60 31 36 30 35 35 40 5.5 6.5 43 49 17.5 20 83.5 89.5 88.5 94.5 91.5 97.5 135.5 151.5 137 153 154

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000

Common exhaust: VV3P5-41Stations 1-03 (G) (E) (T) (D, Y) (X port) (M5 x 0.8) N.C.

Example: VEX1300-03 G36-4-01 (Constructive symbol) 5.1-1 VEX1 How to Order 1 03 D 3 1 0 B VEX Regulator valve B Bracket Option F Foot (Only VEX110) G Gauge When specifying more than one option, combine symbols in alphabetical order. 0 Air operated Operating style 1 External pilot solenoid None Indicator light and surge voltage suppressor S Surge voltage suppressor Z Indicator light and