SMC Corporation of America
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) byte11 Reserved Wireless master module byte12 Reserved byte13 Reserved byte14 AXA (Unit 1) byte15 byte16 byte17 Wireless slave module (Wireless channel 001) byte18 DXD (Unit 2) byte19 byte20 Reserved byte21 Reserved byte22 DXD (Unit 1) byte23 Wireless slave module (Wireless channel 002) byte24 DXB (Unit 2) byte25 Reserved Total 26 byte 12 byte -77No.EX-OMV0017-B 6.3.

) byte11 Reserved Wireless master module byte12 Reserved byte13 Reserved byte14 DX#D (Unit 1) byte15 byte16 AXA (Unit 2) byte17 Wireless slave module (Wireless channel 001) byte18 byte19 byte20 Reserved byte21 Reserved byte22 DX#D (Unit 1) byte23 Wireless slave module (Wireless channel 002) byte24 DX#B (Unit 2) byte25 Reserved Total 26 byte 12 byte -77No.EX-OMV0017 6.3.

) byte11 Reserved Wireless master module byte12 Reserved byte13 Reserved byte14 AXA (Unit 1) byte15 byte16 byte17 Wireless slave module (Wireless channel 001) byte18 DXD (Unit 2) byte19 byte20 Reserved byte21 Reserved byte22 DXD (Unit 1) byte23 Wireless slave module (Wireless channel 002) byte24 DXB (Unit 2) byte25 Reserved Total 26 byte 12 byte -77No.EX-OMV0017-A 6.3.

ZP2A-002 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm 04 06 4 6 ZP2A-003 Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Note 3) in the table indicates the vacuum inlet.

ZP2A-002 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm 04 06 4 6 ZP2A-003 Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Note 3) in the table indicates the vacuum inlet.

ZP2A-002 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm 04 06 4 6 ZP2A-003 Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Note 3) in the table indicates the vacuum inlet.

ZP2A-002 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm 04 06 4 6 ZP2A-003 Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Note 3) in the table indicates the vacuum inlet.

Pump capacity at 60 Hz indicates the maximum capacity of the HRW002-H1S (pump inverter type). 111 Thermo-chiller Series HRW Clear/DeionizedWater Type SEMI How to Order 002 H 2 HRW Clear/DeionizedWater Type Option Cooling capacity Cooling capacity Option Symbol Symbol 002 008 015 030 Nil C D N Y Z None 2 kW Analog communication 8 kW DeviceNet communication 15 kW NPT fitting 30 kW DI control

(Made-to-Order products of the AW series on page 161) How to Order 1301 002 Accessories Filter regulator Nil None B With bracket G With pressure gauge Set pressure 002 0.02 to 0.2 MPa 1202 0.02 to 0.29 MPa 2502 0.02 to 0.49 MPa 902* 0.02 to 0.2 MPa * External main parts are made of stainless steel. For details, refer to page 159.

How to Order Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO 2 Element size symbol Filtration accuracy (Filtration efficiency 99%) 701 801 901 For FGH100 For FGH200 For FGH300 002 004 006 013 2 m 4 m 6 m 13 m 70 HEPO 2 Element for FGH Series EJ Series Construction EJ701S, 801S, 901S FGD FGE FGG Reinforcement material FGA FGC FGF FGH FGH Filter media FQ1 FN EB ES

ZP2A-002 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm 04 06 4 6 ZP2A-003 Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Note 3) in the table indicates the vacuum inlet.

ZP2A-002 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm 04 06 4 6 ZP2A-003 Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Note 3) in the table indicates the vacuum inlet.

ZP2A-002 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm 04 06 4 6 ZP2A-003 Note 1) in the table indicates the pad material. Note 2) in the table indicates the buffer stroke. Note 3) in the table indicates the vacuum inlet.

SMC Pneumatics, Inc. 13 Tamper Proof Speed Controller Standard Type Series AS20-T Metal Elbow Type Specifications AS12 0-M5 AS12 0-U10/32 Specifications Model AS22 001 AS32 003 AS32 002 AS22 002 AS42 004 1/4 10-32UNF Port size M5 x 0.8 1/8 1/4 3/8 1/2 32, 40, 50, 63 80, 100 20, 25, 32, 40 6, 10, 16, 20, 25 Applicable cylinder bore size (mm) 1.5MPa (218psi) Proof pressure 1MPa (145psi) Maximum

W Water-cooled Radiating method 10 5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank size Communication A B RS-485 RS-232C Liquid tank W HEB C H 10 002 C Round Shape of bath Option Nil N Rc1/4 NPT1/4 002 140 W Cooling capacity The option should be specified when ordering.

W Water-cooled Radiating method 10 5.1 in (130 mm) x H7.1 in (180 mm) Liquid tank size Communication A B RS-485 RS-232C Liquid tank W HEB C H 10 002 C Round Shape of bath Option Nil N Rc1/4 NPT1/4 002 140 W Cooling capacity The option should be specified when ordering.

(LEC-MR-RB-032) 0(+ Counter motors side) 0(+ Counter motors side) 0(+ Counter motors side) 1(+ 1(+ 1(+ Rotation direction selection PA14 0 Counter Counter Counter motors motors motors side) side) side) Adaptive tuning mode PB01 000 002 000 Load to motor inertia moment ratio PB06 7 50 Machine resonance suppression filter 1 PB13 4500 400 4500 Notch shape selection 1 PB14 000 030 000 Parameter

.: SFB100-02X8 002 Part No.: SFB200-02-S -X40 V Specifications Fluid Air Nominal filtration Operating pressure Max. 0.99 MPa Nominal filtration m Note 1) Rated flow rate L/min (ANR) Note 2) Symbol 001 002 005 010 020 040 070 100 Max. operating temperature 80C O-ring 1 2 5 10 20 40 70 100 5 10 15 30 50 80 130 250 Element proof differential pressure Symbol N V T Material NBR FKM PTFE Max. 0.5

5 A Cooling capacity Option 002 200 W 004 400 W 006 510 W 008 800 W 010 1 kW Nil None E With feet and no rack mounting brackets F With flow switch P High-pressure pump mounted When multiple options are combined, indicate symbols in alphabetical order.

[F 3] Selection of response time completed : If [.002] is selected during flow indication, actual response time is 3 ms. -30No.PF-OMN0005-E [F 4] External input This function is available when the product includes the external input function : When using a product without external input function, [---] is displayed and this function cannot be set.