Pilot Operated

/N.O. 1/2 to 2 N.C. 1/4 to 1/2 2 Port for Dust Collector (Solenoid type, Air Operated type) Air Operated 2/3 Port VXF21/22, VXFA21/22 VXA21/22, VXA31/32 For Air For Air, Vacuum, Water, Oil The VX series has been renewed as the new VX series, with a new construction Valve type Port size Orifice size mm Orifice size mm 3 to 10 1.5 to 4 Valve type Model Port size VXA21/22 VXA31/32 N.C.

Model Selection 1

Manifold Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit VVX21/22/23 17-3-25 N.C./N.O. Manifold 17-2-74 VDW200/300 C.O. 3 port Single unit Pilot operated Diaphragm operation VXD21/22/23 17-3-33 N.C./N.O. Single unit Pilot operated Disk operation VXP21/22/23 17-3-43 N.C./N.O. Single unit 2 port Pilot operated (Water hammer relief type) VXR21/22/23 17-3-53 N.C./N.O.

60

E E Strainer O-ring Plug M Variations Direct Operated: Series VXK21/22/23 Valve Normally closed (N.C.) Normally Closed (N.C.) Normally open (N.O.)

New

14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium

Direct Operated

/N.O. 1/2 to 2 20 to 50 N.C. 1/4 to 1/2 10 2 Port for Dust Collector (Solenoid type, Air Operated type) Air Operated 2/3 Port VXF21/22, VXFA21/22 VXA21/22, VXA31/32 For Air For Air, Vacuum, Water, Oil The VX series has been renewed as the new VX series, with a new construction.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

JSXZ Series JSXM Series Option Replacement Parts IN IN 8 8 25 2 x Rc, NPT1/8 1(IN), 2(OUT) port 22 2 x Rc, NPT1/8 1(IN), 2(OUT) port 25 22 15 15 2 x M3 x 5 2 x M3 x 5 G thread type * The dimensions other than those below are the same as those of the Rc type.

7

VX3 Tightening Torque for Piping VXA Connection thread Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Recommended Unacceptable 28 to 30 Fig. 2 Binding tubes with bands 36 to 38 Wiring 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. Warning 5.

New

22 24.5 24.5 40 48 62 66 1/4, 3/8 1/2 3/4 1 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) Bracket mounting a b e f g h i j 56 56 70.5 70.5 Port size P Model a1Note) d 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 52 60 68 73 75 75 92 92 30 34.5 39 41 2.3 2.3 2.3 2.3 6.5 6.5 6.5 6.5 10.5 10.5

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

/N.O. 1/2 to 2 N.C. 1/4 to 1/2 10 to 50 20 to 50 10 2 Port for Dust Collector (Solenoid type, Air Operated type) Air Operated 2/3 Port VXF21/22, VXFA21/22 VXA21/22, VXA31/32 For Air For Air, Vacuum, Water, Oil The VX series has been renewed as the new VX series, with a new construction Orifice size mm Valve type Port size Orifice size mm 3 to 10 1.5 to 4 Valve type Model Port size VXA21/22

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

MHL2 1) If connections are reversed on a 2 wire type switch, the switch will not be damaged if protected by a protection circuit, but the switch will always stay in an ON state.

3

Tightening Torque for Piping Leakage current Connection thread Proper tightening torque (Nm) Rc1/8 7 to 9 Rc1/4 12 to 14 Rc3/8 22 to 24 Rc1/2 28 to 30 Rc3/4 Rc1 36 to 38 AC coil: 5% or less of rated voltage DC coil: 2% or less of rated voltage Mounting Warning 4. Connection of piping to products When connecting piping to a product, avoid mistakes regarding the supply port etc. 1.

Clean Series: Copper, Flourine & Silicon-Free+Low Particle Generation, Bore Size: 10mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore, Opening/Closing Stroke: Wide Opening, Auto Switch: -, Lead Wire: -, Number: -

Clean Series: 22 (Copper, Flourine & Silicon-Free+Low Particle Generation), Bore Size: 10mm, Thread Type: Rc: 32, 40 Bore; M Thread: 10, 16, 20, 25 Bore, Opening/Closing Stroke: 1 (Wide Opening)

Table of Contents

82 30 64 18 15 M6 x 1.0 1/8 1/4 3/8 7 to 9 0.5 mm or less 32 98 34 78 22 18 M8 x 1.25 12 to 14 1 mm or less 40 M8 x 1.25 106 40 86 22 18 22 to 24 1 mm or less 50 M10 x 1.5 130 46 110 27 22 a Plug M10 x 1.5 63 142 58 124 27 22 M12 x 1.75 80 180 54 156 33 28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

306 13-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure

MXQ

With end lock (12): MXQ12-R Operating port 2-M5 x 0.8 5 22 22 51 3 Other dimensions are the same as basic style.

Magnetically Coupled Rodless Cylinder

D-M9N D-M9P D-M9B 0.5 8 8 7 Lead wire length (m) 3 41 41 38 Auto Switch Internal Circuit D-M9N 5 68 68 63 DC (+) Brown Dimensions Unit: mm D-M9 Switch main circuit Switch main circuit Switch main circuit OUT Black Mounting screw M2.5 x 4 l Slotted set screw Indicator light DC () Blue 2.6 D-M9P 2.7 2.8 4 DC (+) Brown 22 3.2 OUT Black Most sensitive position 6 22 DC () Blue D-M9B OUT (+) Brown

Compact Cylinder

36 22 4 16 22 6.6 2.8 8 38 55 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon

MHK2

19 41 562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

MHK2

19 41 562 MHKL2-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.